Micromechanical String Resonators: Analytical Tool for Thermal Characterization of Polymers

Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensing

Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection. In this approach, the nanomechanical resonator detects shifts in resonant frequency due to photothermal heating. However, the relationship between photothermal sensitivity, response time, and resonator design has not been fully explored. This paper compares three resonator types - strings, drumheads, and trampolines - to explore this relationship. Through theoretical modeling, experimental validation, and finite element method simulations, we find that strings offer the highest sensitivity (with a noise equivalent power of 280 fW/Hz1/2 for strings made of silicon nitride), while drumheads exhibit the fastest thermal response. The study reveals that photothermal sensitivity correlates with the average temperature rise and not the peak temperature. Finally, the impact of photothermal back-action is discussed, which can be a major source of frequency instability. This work clarifies the performance differences and limits among resonator designs and guides the development of advanced nanomechanical photothermal sensors, benefiting a wide range of applications.

Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing

Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on the film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate optical extinction κext at a 632.8 nm wavelength in low-pressure chemical vapor deposition (LPCVD) SiN strings across a wide range of deposition-related tensile stresses (200-850 MPa). Measurements reveal a reduction in κext from 103 to 101 ppm with increasing stress, correlated to variations in Si/N content ratio. Within the band-fluctuations framework, this trend indicates an increase of the energy bandgap with the stress, ultimately reducing absorption. Overall, this study showcases the power and simplicity of nanomechanical photothermal sensing for low absorption measurements, offering a sensitive, scattering-free platform for material analysis in nanophotonics and nanomechanics.

Quartz Enhanced Conductance Spectroscopy for Polymer Nano-Mechanical Thermal Analysis

A fast and highly sensitive polymer nano-mechanical thermal analysis method for determining the melting temperature (Tm) of polymer microwires was proposed. In this method, a small-size, low-cost quartz tuning fork was used as a piezoelectric transducer to analyze the thermodynamics of polymer microwires at the nanogram level without changing its own properties. Due to the thin wire sample, which has a length of 1.2 mm and a diameter of ~5 µm, which is bridged across the prongs of the tuning fork, the nanogram-level sample greatly reduces the thermal equilibrium time for the measurement, resulting in a fast analysis for the melting temperature of the polymer sample. Compared with the traditional method, the analysis method based on the quartz enhanced conductivity spectrum (QECS) does not require annealing before measurement, which is an essential process for conventional thermal analysis to reduce the hardness, refine the grain, and eliminate the residual stress. In this work, the melting temperatures of three of the most commonly used polymers, namely polymers polymethyl methacrylate, high-density polyethylene, and disproportionated rosin, were obtained under the temperature from room temperature to >180 °C, proving the QECS method to be a useful tool for nano-mechanical thermal analysis.

Single particles as resonators for thermomechanical analysis

Thermal methods are indispensable for the characterization of most materials. However, the existing methods require bulk amounts for analysis and give an averaged response of a material. This can be especially challenging in a biomedical setting, where only very limited amounts of material are initially available. Nano- and microelectromechanical systems (NEMS/MEMS) offer the possibility of conducting thermal analysis on small amounts of materials in the nano-microgram range, but cleanroom fabricated resonators are required. Here, we report the use of single drug and collagen particles as micro mechanical resonators, thereby eliminating the need for cleanroom fabrication. Furthermore, the proposed method reveals additional thermal transitions that are undetected by standard thermal methods and provide the possibility of understanding fundamental changes in the mechanical properties of the materials during thermal cycling. This method is applicable to a variety of different materials and opens the door to fundamental mechanistic insights.

Temperature-Modulated Micromechanical Thermal Analysis with Microstring Resonators Detects Multiple Coherent Features of Small Molecule Glass Transition

Micromechanical Thermal Analysis utilizes microstring resonators to analyze a minimum amount of sample to obtain both the thermal and mechanical responses of the sample during a heating ramp. We introduce a modulated setup by superimposing a sinusoidal heating on the linear heating and implementing a post-measurement data deconvolution process. This setup is utilized to take a closer look at the glass transition as an important fundamental feature of amorphous matter with relations to the processing and physical stability of small molecule drugs. With an additionally developed image and qualitative mode shape analysis, we are able to separate distinct features of the glass transition process and explain a previously observed two-fold change in resonance frequency. The results from this setup indicate the detection of initial relaxation to viscous flow onset as well as differences in mode responsivity and possible changes in the primary resonance mode of the string resonators. The modulated setup is helpful to distinguish these processes during the glass transition with varying responses in the frequency and quality factor domain and offers a more robust way to detect the glass transition compared to previously developed methods. Furthermore, practical and theoretical considerations are discussed when performing measurements on string resonators (and comparable emerging analytical techniques) for physicochemical characterization.

Pyrolytic carbon resonators for micromechanical thermal analysis

Thermal analysis is essential for the characterization of polymers and drugs. However, the currently established methods require a large amount of sample. Here, we present pyrolytic carbon resonators as promising tools for micromechanical thermal analysis (MTA) of nanograms of polymers. Doubly clamped pre-stressed beams with a resonance frequency of 233 ± 4 kHz and a quality factor (Q factor) of 800 ± 200 were fabricated. Optimization of the electrical conductivity of the pyrolytic carbon allowed us to explore resistive heating for integrated temperature control. MTA was achieved by monitoring the resonance frequency and quality factor of the carbon resonators with and without a deposited sample as a function of temperature. To prove the potential of pyrolytic carbon resonators as thermal analysis tools, the glass transition temperature (T g) of semicrystalline poly(L-lactic acid) (PLLA) and the melting temperature (T m) of poly(caprolactone) (PCL) were determined. The results show that the T g of PLLA and T m of PCL are 61.0 ± 0.8 °C and 60.0 ± 1.0 °C, respectively, which are in excellent agreement with the values measured by differential scanning calorimetry (DSC).

Thin Film Analysis by Nanomechanical Infrared Spectroscopy

There is a fundamental need for techniques for thin film characterization. The current options for obtaining infrared (IR) spectra typically suffer from low signal-to-noise-ratios (SNRs) for sample thicknesses confined to a few nanometers. We present nanomechanical infrared spectroscopy (NAM-IR), which enables the measurement of a complete infrared fingerprint of a polyvinylpyrrolidone (PVP) layer as thin as 20 nm with an SNR of 307. Based on the characterization of the given NAM-IR setup, a minimum film thickness of only 160 pm of PVP can be analyzed with an SNR of 2. Compared to a conventional attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR) system, NAM-IR yields an SNR that is 43 times larger for a 20 nm-thick PVP layer and requires only a fraction of the acquisition time. These results pave the way for NAM-IR as a highly sensitive, fast, and practical tool for IR analysis of polymer thin films.

Ultrasensitive Microstring Resonators for Solid State Thermomechanical Analysis of Small and Large Molecules

Thermal analysis plays an important role in both industrial and fundamental research and is widely used to study thermal characteristics of a variety of materials. However, despite considerable effort using different techniques, research struggles to resolve the physicochemical nature of many thermal transitions such as amorphous relaxations or structural changes in proteins. To overcome the limitations in sensitivity of conventional techniques and to gain new insight into the thermal and mechanical properties of small- and large-molecule samples, we have developed an instrumental analysis technique using resonating low-stress silicon nitride microstrings. With a simple sample deposition method and postprocess data analysis, we are able to perform rapid thermal analysis of direct instrumental triplicate samples with only pico- to nanograms of material. Utilizing this method, we present the first measurement of amorphous alpha and beta relaxation, as well as liquid crystalline transitions and decomposition of small-molecule samples deposited onto a microstring resonator. Furthermore, sensitive measurements of the glass transition of polymers and yet unresolved thermal responses of proteins below their apparent denaturation temperature, which seem to include the true solid state glass transition of pure protein, are reported. Where applicable, thermal events detected with the setup were in good agreement with conventional techniques such as differential scanning calorimetry and dynamic mechanical analysis. The sensitive detection of even subtle thermal transitions highlights further possibilities and applications of resonating microstrings in instrumental physicochemical analysis.

Thermomechanical analysis of picograms of polymers using a suspended microchannel cantilever

Suspended microchannel cantilever offers high sensitivity of detecting various thermal transitions of picogram amount of polymers which is showed by the schematic and the SEM of the actual device and the data obtained from it.

Parallel Transduction of Nanomechanical Motion Using Plasmonic Resonators

We demonstrate parallel transduction of thermally driven mechanical motion of an array of gold-coated silicon nitride nanomechanical beams, by using near-field confinement in plasmonic metal-insulator-metal resonators supported in the gap between the gold layers. The free-space optical readout, enabled by the plasmonic resonances, allows for addressing multiple mechanical resonators in a single measurement. Light absorbed in the metal layer of the beams modifies their mechanical properties, allowing photothermal tuning of the eigenfrequencies. The appearance of photothermally driven parametric amplification indicates the possibility of plasmonic mechanical actuation.