Tang M, Zhang S, Qiang Y, Chen S, Luo L, Gao J, Feng L, Qin Z. 4,6-Dimethyl-2-mercaptopyrimidine as a potential leveler for microvia filling with electroplating copper.
RSC Adv 2017. [DOI:
10.1039/c7ra06857c]
[Citation(s) in RCA: 23] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/27/2022] Open
Abstract
Filling performance of microvia was defined as following equation: η = (A/B) × 100%.
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