A hybrid achromatic metalens

Full-Color Quasi-Achromatic Imaging with a Dual-Functional Metasurface

Achieving broadband achromaticity in the visible spectrum is critical for enhancing the imaging performance of metalenses. However, many previous studies remain constrained by small device sizes or small numerical aperture. In this study, we propose a polarization-multiplexed metalens capable of generating zero- and high-order Bessel beams to achieve quasi-achromatic correction without size limitations. An image subtraction method with the two polarization channels is developed to mitigate the Bessel beam sidelobes to improve imaging quality. Our results demonstrate an effective quasi-achromatic focusing and imaging over a continuous wavelength range of 450-700 nm with long focus depth. The image subtraction method significantly enhances the image clarity and contrast, providing new insights for full-color imaging and detection.

Dispersion-engineered spin photonics based on folded-path metasurfaces

Spin photonics revolutionizes photonic technology by enabling precise manipulation of photon spin states, with spin-decoupled metasurfaces emerging as pivotal in complex optical field manipulation. Here, we propose a folded-path metasurface concept that enables independent dispersion and phase control of two opposite spin states, effectively overcoming the limitations of spin photonics in achieving broadband decoupling and higher integration levels. This advanced dispersion engineering is achieved by modifying the equivalent length of a folded path, generated by a virtual reflective surface, in contrast to previous methods that depended on effective refractive index control by altering structural geometries. Our approach unlocks previously unattainable capabilities, such as achieving achromatic focusing and achromatic spin Hall effect using the rotational degree of freedom, and generating spatiotemporal vector optical fields with only a single metasurface. This advancement substantially broadens the potential of metasurface-based spin photonics, extending its applications from the spatial domain to the spatiotemporal domain.

Nanofabrication for Nanophotonics

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

High-performance achromatic flat lens by multiplexing meta-atoms on a stepwise phase dispersion compensation layer

Flat optics have attracted interest for decades due to their flexibility in manipulating optical wave properties, which allows the miniaturization of bulky optical assemblies into integrated planar components. Recent advances in achromatic flat lenses have shown promising applications in various fields. However, it is a significant challenge for achromatic flat lenses with a high numerical aperture to simultaneously achieve broad bandwidth and expand the aperture sizes. Here, we present the zone division multiplex of the meta-atoms on a stepwise phase dispersion compensation (SPDC) layer to address the above challenge. In principle, the aperture size can be freely enlarged by increasing the optical thickness difference between the central and marginal zones of the SPDC layer, without the limit of the achromatic bandwidth. The SPDC layer also serves as the substrate, making the device thinner. Two achromatic flat lenses of 500 nm thickness with a bandwidth of 650-1000 nm are experimentally achieved: one with a numerical aperture of 0.9 and a radius of 20.1 µm, and another with a numerical aperture of 0.7 and a radius of 30.0 µm. To the best of our knowledge, they are the broadband achromatic flat lenses with highest numerical apertures, the largest aperture sizes and thinnest thickness reported so far. Microscopic imaging with a 1.10 µm resolution has also been demonstrated by white light illumination, surpassing any previously reported resolution attained by achromatic metalenses and multi-level diffractive lenses. These unprecedented performances mark a substantial step toward practical applications of flat lenses.

From Single to Multi-Material 3D Printing of Glass-Ceramics for Micro-Optics

Feynman's statement, "There is plenty of room at the bottom", underscores vast potential at the atomic scale, envisioning microscopic machines. Today, this vision extends into 3D space, where thousands of atoms and molecules are volumetrically patterned to create light-driven technologies. To fully harness their potential, 3D designs must incorporate high-refractive-index elements with exceptional mechanical and chemical resilience. The frontier, however, lies in creating spatially patterned micro-optical architectures in glass and ceramic materials of dissimilar compositions. This multi-material capability enables novel ways of shaping light, leveraging the interaction between diverse interfaced chemical compositions to push optical boundaries. Specifically, it encompasses both multi-material integration within the same architectures and the use of different materials for distinct architectural features in an optical system. Integrating fluid handling systems with two-photon lithography (TPL) provides a promising approach for rapidly prototyping such complex components. This review examines single and multi-material TPL processes, discussing photoresin customization, essential physico-chemical conditions, and the need for cross-scale characterization to assess optical quality. It reflects on challenges in characterizing multi-scale architectures and outlines advancements in TPL for both single and spatially patterned multi-material structures. The roadmap provides a bridge between research and industry, emphasizing collaboration and contributions to advancing micro-optics.

The Road to Commercializing Optical Metasurfaces: Current Challenges and Future Directions

Optical metasurfaces, components composed of artificial nanostructures, are recognized for pushing boundaries of wavefront manipulation while maintaining a lightweight, compact design that surpasses conventional optics. Such advantages align with the current trends in optical systems, which demand compact communication devices and immersive holographic projectors, driving significant investment from the industry. Although interest in commercialization of optical metasurfaces has steadily grown since the initial breakthrough with diffraction-limited focusing, their practical applications have remained limited by challenges such as, massive-production yield, absence of standardized evaluation methods, and constrained design methodology. Here, this Perspective addresses the challenges in commercialization of optical metasurfaces, particularly focused on mass production, fabrication tolerance, performance evaluation, and integration into commercial systems. Additionally, we select the fields where metasurfaces may soon play significant roles and provide a perspective on their potentials. By addressing the challenges and exploring the solutions, this Perspective aims to foster discussions that will accelerate the utilization of optical metasurfaces and further build near-future metaphotonics platforms.

Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper

Light manipulation and control are essential in various contemporary technologies, and as these technologies evolve, the demand for miniaturized optical components increases. Planar-lens technologies, such as metasurfaces and diffractive optical elements, have gained attention in recent years for their potential to dramatically reduce the thickness of traditional refractive optical systems. However, their fabrication, particularly for visible wavelengths, involves complex and costly processes, such as high-resolution lithography and dry-etching, which has limited their availability. In this study, we present a simplified method for fabricating visible Fresnel zone plate (FZP) planar lenses, a type of diffractive optical element, using an i-line stepper and a special photoresist (color resist) that only necessitates coating, exposure, and development, eliminating the need for etching or other post-processing steps. We fabricated visible FZP lens patterns using conventional photolithography equipment on 8-inch silica glass wafers, and demonstrated focusing of 550 nm light to a diameter of 1.1 μm with a focusing efficiency of 7.2%. Numerical simulations showed excellent agreement with experimental results, confirming the high precision and designability of our method. Our lenses were also able to image objects with features down to 1.1 μm, showcasing their potential for practical applications in imaging. Our method is a cost-effective, simple, and scalable solution for mass production of planar lenses and other optical components operating in the visible region. It enables the development of advanced, miniaturized optical systems to meet modern technology demand, making it a valuable contribution to optical component manufacturing.

3D-printed aberration-free terahertz metalens for ultra-broadband achromatic super-resolution wide-angle imaging with high numerical aperture

Terahertz (THz) lens constitutes a vital component in the THz system. Metasurfaces-based THz metalenses and classical bulky lenses are severely constrained by chromatic/ spherical aberration and the diffraction limit. Consequently, achromatic super-resolution THz lenses are urgently needed. In this study, through translating the required phase distribution into a refractive index (RI) profile with a specific thickness, an innovative approach to designing THz metalenses is proposed and achieved by dielectric gradient metamaterials. The samples fabricated by 3D printing can realize achromatic super focusing with a numerical aperture (NA) of 0.555 from 0.2 to 0.9 THz. Submillimeter features separated by approximately 0.2 mm can be resolved with high precision, such as glass fabric patterns within FR4 panels and fibrous tissue on leaves, with a field of view (FOV) of 90°. Our approach offers a feasible and cost-effective means to implement THz super-resolution imaging, which holds great potential in non-destructive testing and biomedical imaging.

High dioptric power micro-lenses fabricated by two-photon polymerization

Specimen-induced aberrations limit the penetration depth of standard optical imaging techniques in vivo, mainly due to the propagation of high NA beams in a non-homogenous medium. Overcoming these limitations requires complex optical imaging systems and techniques. Implantable high NA micro-optics can be a solution to tissue induced spherical aberrations, but in order to be implanted, they need to have reduced complexity, offering a lower surface to the host immune reaction. Here, we design, fabricate, and test a single micro-optical element with high dioptric power and high NA (up to 1.25 in water). The sag function is inspired by the classical metalens phase and improved to reduce the spherical aberrations arising from the refractive origin of the phase delay at the lens periphery. We successfully fabricated these high-NA quasi-parabolic aspheric microlenses with varying focal lengths by two-photon polymerization in biocompatible photoresist SZ2080. The entire process is optimized to minimize fabrication time while maintaining the structures' robustness: the smoothness reaches optical (λ20) quality. The dioptric power and magnification of the microlenses were quantified over a 200 × 200 µm aberration-free field of view. Our results indicate that these microlenses can be used for wide-field imaging under linear excitation and have the optical quality to be utilized for nonlinear excitation imaging. Moreover, being made of biocompatible photoresist, they can be implanted close to the observation volume and help to reduce the spherical aberration of laser beams penetrating living tissues.

Achromatic metalenses for full visible spectrum with extended group delay control via dispersion-matched layers

Achieving achromaticity across the visible light spectrum is crucial for metalenses in imaging systems. Single-layer metalenses struggle with weak focusing power or small aperture sizes due to inadequate group delay control. Multilayer metalenses offer some improvement but come with increased design and fabrication complexity. Here, we demonstrate a strategy using meta-atoms with material layers engineered for matching dispersion, allowing large and fine adjustments of group delay. Our design substantially broadens the group delay range, allowing us to experimentally demonstrate several polarization-independent metalenses operating across the entire visible spectrum (400-700 nm). We design, fabricate, and characterize achromatic metalenses with aperture diameters of 16 μm, 66 μm, 200 μm, and 400 μm, and numerical apertures of 0.27, 0.11, 0.04, and 0.02, respectively. Among them, the 400-μm diameter, 0.02-numerical-aperture metalens is used to demonstrate full-color imaging capabilities. Our results exhibit diffraction-limited performance, high efficiency, and accurate full-color image reproduction.

Dynamic photomask directed lithography based on electrically stimulated nematic liquid crystal architectures

Lithography technology is a powerful tool for preparing complex microstructures through projecting patterns from static templates with permanent features onto samples. To simplify fabrication and alignment processes, dynamic photomask for multiple configurations preparation becomes increasingly noteworthy. Hereby, we report a dynamic photomask by assembling the electrically stimulated nematic liquid crystal (NLC) into multifarious architectures. This results in reconfigurable and switchable diffraction patterns due to the hybrid phase arising from the NLC molecular orientations. These diffraction patterns are adopted as metamask to produce multiple microstructures with height gradients in one-step exposure and hierarchical microstructures through multiple in-situ exposures using standard photolithography. The fabricated pattern has feature size about 3.2 times smaller than the electrode pattern and can be transferred onto silicon wafer. This strategy can be extended to design diverse microstructures with great flexibility and controllability, offers a promising avenue for fabricating metamaterials via complex structures with simplified lithography processes.

Strongly polarized color conversion of isotropic colloidal quantum dots coupled to fano resonances

Colloidal quantum dots (QDs) offer high color purity essential to high-quality liquid crystal displays (LCDs), which enables unprecedented levels of color enrichment in LCD-TVs today. However, for LCDs requiring polarized backplane illumination in operation, highly polarized light generation using inherently isotropic QDs remains a fundamental challenge. Here, we show strongly polarized color conversion of isotropic QDs coupled to Fano resonances of v-grooved surfaces compatible with surface-normal LED illumination for next-generation QD-TVs. This architecture overcomes the critically oblique excitation of surface plasmon coupled emission by using v-shapes imprinted on the backlight unit (BLU). With isotropic QDs coated on the proposed v-BLU surface, we experimentally measured a far-field polarization contrast ratio of ∼10. Full electromagnetic solution shows Fano line-shape transmission in transverse magnetic polarization allowing for high transmission as an indication for forward-scattering configuration. Of these QDs coupled to the surface plasmon-polariton modes, we observed strong modifications in their emission kinetics revealed by time-resolved photoluminescence spectroscopy and via dipole orientations identified by back focal plane imaging. This collection of findings indicates conclusively that these isotropic QDs are forced to radiate in a linearly polarized state from the patterned planar surface under surface-normal excitation. For next-generation QD-TVs, the proposed polarized color-converting isotropic QDs on such v-BLUs can be deployed in bendable electronic displays.

Multifaceted control of focal points along an arbitrary 3D curved trajectory

Metalenses can integrate the functionalities of multiple optical components thanks to the unprecedented capability of optical metasurfaces in light control. With the rapid development of optical metasurfaces, metalenses continue to evolve. Polarization and color play a very important role in understanding optics and serve as valuable tools for gaining insights into our world. Benefiting from the design flexibility of metasurfaces, we propose and experimentally demonstrate a super metalens that can realize multifaceted control of focal points along any 3D curved trajectory. The wavelengths and polarization states of all focal points are engineered in a desirable manner. The super metalens can simultaneously realize customized 3D positioning, polarization states, and wavelengths of focal points, which are experimentally demonstrated with incident wavelengths ranging from 501 to 700 nm. We further showcase the application of the developed super metalenses in 3D optical distance measurement. The compact nature of metasurfaces and unique properties of the proposed super metalenses hold promise to dramatically miniaturize and simplify the optical architecture for applications in optical metrology, imaging, detection, and security.

Specific wavelength peak emulation with amorphous metastructures

The conventional design process for metasurfaces is time-consuming and computationally expensive. To address this challenge, we utilize a deep convolutional generative adversarial network (DCGAN) to generate new nanohole metastructure designs that match a desired transmittance spectrum in the visible range. The trained DCGAN model demonstrates an exceptional performance in generating diverse and manufacturable metastructure designs that closely resemble the target optical properties. The proposed method provides several advantages over existing approaches. These include its capability to generate new designs without prior knowledge or assumptions regarding the relationship between metastructure geometries and optical properties, its high efficiency, and its generalizability to other types of metamaterials. The successful fabrication and experimental characterization of the predicted metastructures further validate the accuracy and effectiveness of our proposed method.

A Multi-foci Sparse-Aperture Metalens

Multi-foci lenses are essential components for optical communications, virtual reality display and microscopy, yet the bulkiness of conventional counterparts has significantly hindered their widespread applications. Benefiting from the unprecedented capability of metasurfaces in light modulation, metalenses are able to provide multi-foci functionality with a more compact footprint. However, achieving imaging quality comparable to that of corresponding single-foci metalenses at each focal point poses a challenge for existing multi-foci metalenses. Here, a polarization-independent all-dielectric multi-foci metalens is proposed and experimentally demonstrated by spatially integrating single-foci optical sparse-aperture sub-metalenses. Such design enables the metalens to generate multiple focal points, while maintaining the ability to capture target information comparable to that of a single-foci metalens. The proposed multi-foci metalens is composed of square-nanohole units array fabricated by two-photon polymerization. The focusing characteristic and imaging capability are demonstrated upon the illumination of an unpolarized light beam. This work finds a novel route toward multi-foci metalenses and may open a new avenue for dealing with the trade-off between multi-foci functionality and high-quality imaging performance.

Tailoring high-refractive-index nanocomposites for manufacturing of ultraviolet metasurfaces

Nanoimprint lithography (NIL) has been utilized to address the manufacturing challenges of high cost and low throughput for optical metasurfaces. To overcome the limitations inherent in conventional imprint resins characterized by a low refractive index (n), high-n nanocomposites have been introduced to directly serve as meta-atoms. However, comprehensive research on these nanocomposites is notably lacking. In this study, we focus on the composition of high-n zirconium dioxide (ZrO2) nanoparticle (NP) concentration and solvents used to produce ultraviolet (UV) metaholograms and quantify the transfer fidelity by the measured conversion efficiency. The utilization of 80 wt% ZrO2 NPs in MIBK, MEK, and acetone results in conversion efficiencies of 62.3%, 51.4%, and 61.5%, respectively, at a wavelength of 325 nm. The analysis of the solvent composition and NP concentration can further enhance the manufacturing capabilities of high-n nanocomposites in NIL, enabling potential practical use of optical metasurfaces.

Versatile polarization-converted non-diffractive Bessel beams based on fully phase-modulated metasurfaces

The Bessel beam has become significant in optical research due to its properties such as a long focal depth, self-healing, and non-diffraction. However, conventional methods for generating Bessel beams have drawbacks such as limited flexibility and tunability and the use of bulky optics. These factors lead to the complexity of the optical systems. This paper presents what we believe is a novel approach to generating Bessel beams by utilizing a fully phase-modulated all-dielectric metasurface. The proposed method enables the arbitrary and independent manipulation of cross-polarized and co-polarized components, allowing the creation of Bessel beams featuring multiple polarization conversions when subjected to left-handed circularly polarized (LCP) incidence. To demonstrate the versatility and effectiveness of the method, three metasurfaces with distinct characteristics are designed. The simulated generated Bessel beams exhibit qualities including long focal depth, non-diffraction behavior, self-healing capabilities, and polarization conversion, which align with the theoretical predictions. This work presents novel possibilities for effectively generating and multi-functional application of Bessel beams.

Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high-numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

Achieving focal invariance in different background refractive indices through a dual-environment metalens

A conventional metalens is designed with a fixed working environment, and its focal length depends on the background refractive index. In this study, we propose a dual-environment metalens that can maintain the same focal length in both media of air and water. The metalens consists of 16 types of meta-atoms with different geometries, which can cover the 0-2π phase range in both air and water. We perform finite-difference time-domain simulations to investigate the metalens and demonstrate that its focal length remains unchanged, regardless of whether the background medium is air or water. Furthermore, we investigated the optical forces within the focal field of the metalens in both air and water, indicating its potential trapping capability in these media. Our method provides a new insight into dual-environment metasurfaces and advances the methodology of electromagnetic structures in extensive applications.

Diffractive optical computing in free space

Structured optical materials create new computing paradigms using photons, with transformative impact on various fields, including machine learning, computer vision, imaging, telecommunications, and sensing. This Perspective sheds light on the potential of free-space optical systems based on engineered surfaces for advancing optical computing. Manipulating light in unprecedented ways, emerging structured surfaces enable all-optical implementation of various mathematical functions and machine learning tasks. Diffractive networks, in particular, bring deep-learning principles into the design and operation of free-space optical systems to create new functionalities. Metasurfaces consisting of deeply subwavelength units are achieving exotic optical responses that provide independent control over different properties of light and can bring major advances in computational throughput and data-transfer bandwidth of free-space optical processors. Unlike integrated photonics-based optoelectronic systems that demand preprocessed inputs, free-space optical processors have direct access to all the optical degrees of freedom that carry information about an input scene/object without needing digital recovery or preprocessing of information. To realize the full potential of free-space optical computing architectures, diffractive surfaces and metasurfaces need to advance symbiotically and co-evolve in their designs, 3D fabrication/integration, cascadability, and computing accuracy to serve the needs of next-generation machine vision, computational imaging, mathematical computing, and telecommunication technologies.

Multifocal meta-fiber based on the fractional Talbot effect

Multi-focusing of light is a crucial capability for photonic devices that can be effectively achieved by precisely modulating the phase delay on the incident wavefront. However, integrating functional structures into optical fibers for remote light focusing remains challenging due to the complex device design and limited fabrication approaches. Here, we present the design and fabrication of metalens array on the end-face of a tailored single-mode step-index fiber for focusing light field into closely packed focal spot array. The metalenses are configured based on the fractional Talbot effect and benefit a modular design capability. Light passing through the optical fiber can be focused into different focal planes. With a synergistic 3D laser nanoprinting technique based on two-photon polymerization, high-quality meta-fibers are demonstrated for focusing light parallelly with a uniform numerical aperture (NA) as high as approximately 0.77. This may facilitate various applications such as optical trapping, generation of sophisticated beam profiles, and boosting light coupling efficiencies.

Dual-wavelength metalens enables Epi-fluorescence detection from single molecules

Single molecule fluorescence spectroscopy is at the heart of molecular biophysics research and the most sensitive biosensing assays. The growing demand for precision medicine and environmental monitoring requires the creation of miniaturized and portable sensing platforms. However, the need for highly sophisticated objective lenses has precluded the development of single molecule detection systems for truly portable devices. Here, we propose a dielectric metalens device of submicrometer thickness to excite and collect light from fluorescent molecules instead of an objective lens. The high numerical aperture, high focusing efficiency, and dual-wavelength operation of the metalens enable the implementation of fluorescence correlation spectroscopy with a single Alexa 647 molecule in the focal volume. Moreover, the metalens enables real-time monitoring of individual fluorescent nanoparticle transitions and identification of hydrodynamic diameters ranging from a few to hundreds of nanometers. This advancement in sensitivity extends the application of the metalens technology to ultracompact single-molecule sensors.

3D-printed multilayer structures for high-numerical aperture achromatic metalenses

Flat optics consisting of nanostructures of high-refractive index materials produce lenses with thin form factors that tend to operate only at specific wavelengths. Recent attempts to achieve achromatic lenses uncover a trade-off between the numerical aperture (NA) and bandwidth, which limits performance. Here, we propose a new approach to design high-NA, broadband, and polarization-insensitive multilayer achromatic metalenses (MAMs). We combine topology optimization and full-wave simulations to inversely design MAMs and fabricate the structures in low-refractive index materials by two-photon polymerization lithography. MAMs measuring 20 μm in diameter operating in the visible range of 400 to 800 nm with 0.5 and 0.7 NA were achieved with efficiencies of up to 42%. We demonstrate broadband imaging performance of the fabricated MAM under white light and RGB narrowband illuminations. These results highlight the potential of the 3D-printed multilayer structures for realizing broadband and multifunctional meta-devices with inverse design.

Theory and Fundamental Limit of Quasiachromatic Metalens by Phase Delay Extension

The periodic extension of phase difference is commonly applied in device design to obtain phase compensation beyond the system's original phase modulation capabilities. Based on this extension approach, we propose the application of quasiphase delay matching to extend the range of dispersion compensation for meta-atoms with limited height. Our theory expands the limit of frequency bandwidth coverage and relaxes the constraints of aperture, NA, and bandwidth for metalenses. By applying the uncertainty principle, we explain the fundamental limit of this achromatic bandwidth and obtain the achromatic spectrum using perturbation analysis. To demonstrate the effectiveness of this extended limit, we simulate a quasiachromatic metalens with a diameter of 2 mm and a NA of 0.55 in the range of 400-1500 nm. Our findings provide a novel theory for correcting chromatic aberration in large-diameter ultrawide bandwidth devices.

Asymptotic dispersion engineering for ultra-broadband meta-optics

Dispersion decomposes compound light into its monochromatic components, which is detrimental to broadband imaging but advantageous for spectroscopic applications. Metasurfaces provide a unique path to modulate the dispersion by adjusting structural parameters on a two-dimensional plane. However, conventional linear phase compensation does not adequately match the meta-unit's dispersion characteristics with required complex dispersion, hindering at-will dispersion engineering over a very wide bandwidth particularly. Here, we propose an asymptotic phase compensation strategy for ultra-broadband dispersion-controlled metalenses. Metasurfaces with extraordinarily high aspect ratio nanostructures have been fabricated for arbitrary dispersion control in ultra-broad bandwidth, and we experimentally demonstrate the single-layer achromatic metalenses in the visible to infrared spectrum (400 nm~1000 nm, NA = 0.164). Our proposed scheme provides a comprehensive theoretical framework for single-layer meta-optics, allowing for arbitrary dispersion manipulation without bandwidth restrictions. This development is expected to have significant applications in ultra-broadband imaging and chromatography detection, among others.

Polarization-independent achromatic Huygens' metalens with large numerical aperture and broad bandwidth

Achromatic lenses, which have the same focal length regardless of the illumination frequency, find strong applications in imaging, sensing, and communication systems. Making achromatic lenses with metasurfaces is highly desirable because they are flat, ultrathin, relatively light, and easily fabricable. However, existing metalenses experience combinations of limitations which include single polarization operation, narrow bandwidth, and small numerical aperture (NA). In this work, we propose a dual polarized, broadband and high NA achromatic metalens based on the Huygens' metasurface. We use Huygens' metasurface unit cells with three tunable resonances to realize a stable group delay over a large bandwidth, while also achieving high transparency and large phase tunability. With these cells, we construct a dual-polarized achromatic Huygens' metalens with an NA of 0.64 that works from 22 to 26 GHz. Our achromatic metalens achieves diffraction-limited focusing with 2 % maximum focal length deviation and 70 % average focusing efficiency over a bandwidth of 16.7 %. Most key performance metrics for this lens surpass or are comparable with the best of previous metalenses. An achromatic metalens simultaneously achieving broad bandwidth, large NA, and polarization-independent operation will open wide-ranging opportunities for microwave and mm-wave imaging and communication applications.

Single chip simultaneous chiral and achiral imaging based on high efficiency 3D plasmonic metalens

We propose and experimentally demonstrate a single chip metasurface for simultaneous chiral and achiral imaging and polarimetric detecting using a high efficiency three dimensional plasmonic metalens (3D-PM) with capability of designed separation of different circular polarizations. The proposed 3D-PM combines both propagating and geometric phases so that two orthogonal circular polarization components of the incidence can be precisely separated and imaged into two channels and the incident polarization state can be detected with differentiation of the two channels. One single set of an array of Au layer covered anisotropic polymethyl methacrylate elliptical nanopillars is employed, in which height of each nanopillar is added as a new design degree of freedom to realize both full phase manipulation (0-2π) and high efficiency (>0.85) with coupled equivalent Fabry-Pérot cavity and localized surface plasmons. At design wavelength of 1550 nm, experimental results show that optical resolution of both chiral and achiral images approaches the diffraction limit, extinction ratio of circular polarizations in two channels is ∼33:1, and the energy efficiency reaches ∼63 %. The proposed 3D-PM provides a new and simple way for chiral/achiral imaging and polarimetric measurement, and can be applied in integrated optics, optical communication, and biomolecule detection.

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

Three-dimensional (3D) printing of silica glass is dominated by techniques that rely on traditional particle sintering. At the nanoscale, this limits their adoption within microsystem technology, which prevents technological breakthroughs. We introduce the sinterless, two-photon polymerization 3D printing of free-form fused silica nanostructures from a polyhedral oligomeric silsesquioxane (POSS) resin. Contrary to particle-loaded sacrificial binders, our POSS resin itself constitutes a continuous silicon-oxygen molecular network that forms transparent fused silica at only 650°C. This temperature is 500°C lower than the sintering temperatures for fusing discrete silica particles to a continuum, which brings silica 3D printing below the melting points of essential microsystem materials. Simultaneously, we achieve a fourfold resolution enhancement, which enables visible light nanophotonics. By demonstrating excellent optical quality, mechanical resilience, ease of processing, and coverable size scale, our material sets a benchmark for micro- and nano-3D printing of inorganic solids.

Hybrid achromatic microlenses with high numerical apertures and focusing efficiencies across the visible

Compact visible wavelength achromats are essential for miniaturized and lightweight optics. However, fabrication of such achromats has proved to be exceptionally challenging. Here, using subsurface 3D printing inside mesoporous hosts we densely integrate aligned refractive and diffractive elements, forming thin high performance hybrid achromatic imaging micro-optics. Focusing efficiencies of 51-70% are achieved for 15μm thick, 90μm diameter, 0.3 numerical aperture microlenses. Chromatic focal length errors of less than 3% allow these microlenses to form high-quality images under broadband illumination (400-700 nm). Numerical apertures upwards of 0.47 are also achieved at the cost of some focusing efficiency, demonstrating the flexibility of this approach. Furthermore, larger area images are reconstructed from an array of hybrid achromatic microlenses, laying the groundwork for achromatic light-field imagers and displays. The presented approach precisely combines optical components within 3D space to achieve thin lens systems with high focusing efficiencies, high numerical apertures, and low chromatic focusing errors, providing a pathway towards achromatic micro-optical systems.

Design of a centimeter-scale achromatic hybrid metalens with polarization insensitivity in the visible

Achromatic metalenses formed using previous design methods face a compromise between diameter, numerical aperture, and working wave band. To address this problem, the authors coat the refractive lens with a dispersive metasurface and numerically demonstrate a centimeter-scale hybrid metalens for the visible band of 440-700 nm. By revisiting the generalized Snell law, a universal design of a chromatic aberration correction metasurface is proposed for a plano-convex lens with arbitrary surface curvatures. A highly precise semi-vector method is also presented for large-scale metasurface simulation. Benefiting from this, the reported hybrid metalens is carefully evaluated and exhibits 81% chromatic aberration suppression, polarization insensitivity, and broadband imaging capacity.

Transmission optimized LWIR metalens

Thermal imaging at the infrared wavelength regime has long been applied to different areas such as agriculture and defense industries. Metasurfaces, 2D engineered ultra-thin structures, have attracted much attention due to their compact size, superior performance, and different functionalities at optical frequencies. This work details the design and fabrication of high transmission metalenses operating at the long-wave infrared (LWIR) spectrum. We minimize the reflection losses through anti-reflection coating (ARC) while maintaining the full wavefront control at the central wavelength 9.07 µm. Our unit cell structure provides an average transmission of 97.5%. We experimentally verify our results and show that the fabricated metalenses perform diffraction-limited imaging at the design wavelength.

Large-scale achromatic flat lens by light frequency-domain coherence optimization

Flat lenses, including metalens and diffractive lens, have attracted increasing attention due to their ability to miniaturize the imaging devices. However, realizing a large scale achromatic flat lens with high performance still remains a big challenge. Here, we developed a new framework in designing achromatic multi-level diffractive lenses by light coherence optimization, which enables the implementation of large-scale flat lenses under non-ideal conditions. As results, a series achromatic polymer lenses with diameter from 1 to 10 mm are successfully designed and fabricated. The subsequent optical characterizations substantially validate our theoretical framework and show relatively good performance of the centimeter-scale achromatic multi-level diffractive lenses with a super broad bandwidth in optical wavelengths (400-1100 nm). After comparing with conventional refractive lens, this achromatic lens shows significant advantages in white-light imaging performance, implying a new strategy in developing practical planar optical devices.

Relative-phase simulated annealing for time-efficient and large-scale inverse design of achromatic thin lenses

High-efficiency, broadband, wafer-size, and ultra-thin lenses are highly demanded, due to its great potential in abundant applications such as compact imaging modules. It is usually conceived that this target might be attainable given the advancement in nanofabrication, computation power and emerging algorithms, though challenging. Here, we reveal the inconvenient truth that for ultra-thin lenses, there actually exists intrinsic check-and-balance between size, broadband and performance. Unveiled by our inverse design algorithm, Relative-Phase Simulated Annealing (RPSA), focusing efficiency inevitably drops with refining wavelength intervals for better achromatic broadband features in optimized lens; and drops exponentially with increasing diameter and bandwidth, supported by our empirical formula. Meanwhile, with a slightly compromised goal, the powerfulness of RPSA is unlocked since it could provide a globally optimized design recipe whose time complexity relates to lens scale linearly rather than exponentially. This work, as a fast search engine for optimal solutions, paves the way towards practical large-scale achromatic ultra-thin lenses.

An achromatic metafiber for focusing and imaging across the entire telecommunication range

Dispersion engineering is essential to the performance of most modern optical systems including fiber-optic devices. Even though the chromatic dispersion of a meter-scale single-mode fiber used for endoscopic applications is negligible, optical lenses located on the fiber end face for optical focusing and imaging suffer from strong chromatic aberration. Here we present the design and nanoprinting of a 3D achromatic diffractive metalens on the end face of a single-mode fiber, capable of performing achromatic and polarization-insensitive focusing across the entire near-infrared telecommunication wavelength band ranging from 1.25 to 1.65 µm. This represents the whole single-mode domain of commercially used fibers. The unlocked height degree of freedom in a 3D nanopillar meta-atom largely increases the upper bound of the time-bandwidth product of an achromatic metalens up to 21.34, leading to a wide group delay modulation range spanning from -8 to 14 fs. Furthermore, we demonstrate the use of our compact and flexible achromatic metafiber for fiber-optic confocal imaging, capable of creating in-focus sharp images under broadband light illumination. These results may unleash the full potential of fiber meta-optics for widespread applications including hyperspectral endoscopic imaging, femtosecond laser-assisted treatment, deep tissue imaging, wavelength-multiplexing fiber-optic communications, fiber sensing, and fiber lasers.

Dielectric metalens for miniaturized imaging systems: progress and challenges

Lightweight, miniaturized optical imaging systems are vastly anticipated in these fields of aerospace exploration, industrial vision, consumer electronics, and medical imaging. However, conventional optical techniques are intricate to downscale as refractive lenses mostly rely on phase accumulation. Metalens, composed of subwavelength nanostructures that locally control light waves, offers a disruptive path for small-scale imaging systems. Recent advances in the design and nanofabrication of dielectric metalenses have led to some high-performance practical optical systems. This review outlines the exciting developments in the aforementioned area whilst highlighting the challenges of using dielectric metalenses to replace conventional optics in miniature optical systems. After a brief introduction to the fundamental physics of dielectric metalenses, the progress and challenges in terms of the typical performances are introduced. The supplementary discussion on the common challenges hindering further development is also presented, including the limitations of the conventional design methods, difficulties in scaling up, and device integration. Furthermore, the potential approaches to address the existing challenges are also deliberated.

Artificial Intelligence in Meta-optics

Recent years have witnessed promising artificial intelligence (AI) applications in many disciplines, including optics, engineering, medicine, economics, and education. In particular, the synergy of AI and meta-optics has greatly benefited both fields. Meta-optics are advanced flat optics with novel functions and light-manipulation abilities. The optical properties can be engineered with a unique design to meet various optical demands. This review offers comprehensive coverage of meta-optics and artificial intelligence in synergy. After providing an overview of AI and meta-optics, we categorize and discuss the recent developments integrated by these two topics, namely AI for meta-optics and meta-optics for AI. The former describes how to apply AI to the research of meta-optics for design, simulation, optical information analysis, and application. The latter reports the development of the optical Al system and computation via meta-optics. This review will also provide an in-depth discussion of the challenges of this interdisciplinary field and indicate future directions. We expect that this review will inspire researchers in these fields and benefit the next generation of intelligent optical device design.

Metasurface wavefront control for high-performance user-natural augmented reality waveguide glasses

Augmented reality (AR) devices, as smart glasses, enable users to see both the real world and virtual images simultaneously, contributing to an immersive experience in interactions and visualization. Recently, to reduce the size and weight of smart glasses, waveguides incorporating holographic optical elements in the form of advanced grating structures have been utilized to provide light-weight solutions instead of bulky helmet-type headsets. However current waveguide displays often have limited display resolution, efficiency and field-of-view, with complex multi-step fabrication processes of lower yield. In addition, current AR displays often have vergence-accommodation conflict in the augmented and virtual images, resulting in focusing-visual fatigue and eye strain. Here we report metasurface optical elements designed and experimentally implemented as a platform solution to overcome these limitations. Through careful dispersion control in the excited propagation and diffraction modes, we design and implement our high-resolution full-color prototype, via the combination of analytical–numerical simulations, nanofabrication and device measurements. With the metasurface control of the light propagation, our prototype device achieves a 1080-pixel resolution, a field-of-view more than 40°, an overall input–output efficiency more than 1%, and addresses the vergence-accommodation conflict through our focal-free implementation. Furthermore, our AR waveguide is achieved in a single metasurface-waveguide layer, aiding the scalability and process yield control.

Deep learning assisted design of high reflectivity metamirrors

The advent of optical metasurfaces, i.e. carefully designed two-dimensional nanostructures, allows unique control of electromagnetic waves. To unlock the full potential of optical metasurfaces to match even complex optical functionalities, machine learning provides elegant solutions. However, these methods struggle to meet the tight requirements when it comes to metasurface devices for the optical performance, as it is the case, for instance, in applications for high-precision optical metrology. Here, we utilize a tandem neural network framework to render a focusing metamirror with high mean and maximum reflectivity of R_mean = 99.993 % and R_max = 99.9998 %, respectively, and a minimal phase mismatch of Δϕ = 0.016 % that is comparable to state-of-art dielectric mirrors.

Polarization-insensitive achromatic metalens based on computational wavefront coding

Broadband achromatic metalens imaging is of great interest in various applications, such as integrated imaging and augmented/virtual reality display. Current methods of achromatic metalenses mainly rely on the compensation of a linear phase dispersion implemented with complex nanostructures. Here, we propose and experimentally demonstrate a polarization-insensitive achromatic metalens (PIA-ML) based on computational wavefront coding. In this method, simple circular or square nanopillars are individually coded such that the focal depths at wavelengths at both ends of the achromatic bandwidth overlap at the designed focal plane, which removes the limitation of requiring a linear phase dispersion. An optimized PIA-ML that works in the full optical communication band from 1300 to 1700nm was obtained using a particle swarm optimization algorithm. Experimental results show that both focusing and imaging of the fabricated metalens are consistent with theoretical predictions within the broadband wavelength range, which provides a new methodology for ultra-broadband achromatic imaging with simple-shaped nanostructures.

High-efficiency broadband achromatic metalens for near-IR biological imaging window

Over the past years, broadband achromatic metalenses have been intensively studied due to their great potential for applications in consumer and industry products. Even though significant progress has been made, the efficiency of technologically relevant silicon metalenses is limited by the intrinsic material loss above the bandgap. In turn, the recently proposed achromatic metalens utilizing transparent, high-index materials such as titanium dioxide has been restricted by the small thickness and showed relatively low focusing efficiency at longer wavelengths. Consequently, metalens-based optical imaging in the biological transparency window has so far been severely limited. Herein, we experimentally demonstrate a polarization-insensitive, broadband titanium dioxide achromatic metalens for applications in the near-infrared biological imaging. A large-scale fabrication technology has been developed to produce titanium dioxide nanopillars with record-high aspect ratios featuring pillar heights of 1.5 µm and ~90° vertical sidewalls. The demonstrated metalens exhibits dramatically increased group delay range, and the spectral range of achromatism is substantially extended to the wavelength range of 650–1000 nm with an average efficiency of 77.1%–88.5% and a numerical aperture of 0.24–0.1. This research paves a solid step towards practical applications of flat photonics.

Though broadband achromatic metalens are attractive for biological applications, existing metalenses show limited performance in the biological imaging window. Here, the authors report high-efficiency broadband achromatic metalens featuring record-high aspect ratio titanium dioxide metasurfaces.

Active Modulating the Intensity of Bifocal Metalens with Electrically Tunable Barium Titanate (BTO) Nanofins

The multifocal metalens with an adjustable intensity has great potential in many applications such as the multi-imaging system, but it is less studied. In this paper, by combining the electro-optic material barium titanate (BTO) with the Pancharatnam-Berry phase, an electrically modulated bifocal metalens in a visible light band is innovatively proposed. Due to the electro-optic effect, we can control the refractive index of the BTO nanofins to vary between 2.4 and 3.07 by applying different voltages (0–60 V). Thus, the method of modulating the intensity ratio of the two focal points is applying an electric field. It is different from using phase change materials or changing the ellipticity of incident light, the strategies proposed in previous studies. Moreover, when the applied voltage is 0 V or 60 V, the bifocal metalens becomes a single focal metalens with different focal lengths, and the full width at half maximum of each focal point is close to the diffraction limit. It has great potential in applications of optical storage, communication and imaging systems.

Rotationally tunable varifocal 3D metalens

Varifocal optics have a variety of applications in imaging systems. Metasurfaces offer control of the phase, transmission, and polarization of light using subwavelength engineered structures. However, conventional metasurface designs lack dynamic wavefront shaping which limits their application. In this work, we design and fabricate 3D doublet metalenses with a tunable focal length. The phase control of light is obtained through the mutual rotation of the singlet structures. Inspired by Moiré lenses, the proposed structure consists of two all-dielectric metasurfaces. The singlets have reverse-phase profiles resulting in the cancellation of the phase shift in the nominal position. In this design, we show that the mutual rotation of the elements produces different wavefronts with quadratic radial dependence. Thus, an input plane wave is converted to spherical wavefronts whose focal length depends on the rotation. We use a combination of a nanopillar and a phase plate as the unit cell structure working at a wavelength of 1500 nm. Our design holds promise for a range of applications such as zoom lenses, microscopy, and augmented reality.

Characterization of Monochromatic Aberrated Metalenses in Terms of Intensity-Based Moments

Consistent with wave-optics simulations of metasurfaces, aberrations of metalenses should also be described in terms of wave optics and not ray tracing. In this respect, we have shown, through extensive numerical simulations, that intensity-based moments and the associated parameters defined in terms of them (average position, spatial extent, skewness and kurtosis) adequately capture changes in beam shapes induced by aberrations of a metalens with a hyperbolic phase profile. We have studied axial illumination, in which phase-discretization induced aberrations exist, as well as non-axial illumination, when coma could also appear. Our results allow the identification of the parameters most prone to induce changes in the beam shape for metalenses that impart on an incident electromagnetic field a step-like approximation of an ideal phase profile.

Dielectric Metalens: Properties and Three-Dimensional Imaging Applications

Recently, optical dielectric metasurfaces, ultrathin optical skins with densely arranged dielectric nanoantennas, have arisen as next-generation technologies with merits for miniaturization and functional improvement of conventional optical components. In particular, dielectric metalenses capable of optical focusing and imaging have attracted enormous attention from academic and industrial communities of optics. They can offer cutting-edge lensing functions owing to arbitrary wavefront encoding, polarization tunability, high efficiency, large diffraction angle, strong dispersion, and novel ultracompact integration methods. Based on the properties, dielectric metalenses have been applied to numerous three-dimensional imaging applications including wearable augmented or virtual reality displays with depth information, and optical sensing of three-dimensional position of object and various light properties. In this paper, we introduce the properties of optical dielectric metalenses, and review the working principles and recent advances in three-dimensional imaging applications based on them. The authors envision that the dielectric metalens and metasurface technologies could make breakthroughs for a wide range of compact optical systems for three-dimensional display and sensing.

Full Color and Grayscale Painting with 3D Printed Low-Index Nanopillars

Sculpting nanostructures into different geometries in either one or two dimensions produces a wide range of colorful elements in microscopic prints. However, achieving different shades of gray and control of color saturation remain challenging. Here, we report a complete approach to color and grayscale generation based on the tuning of a single nanostructure geometry. Through two-photon polymerization lithography, we systematically investigated color generation from the basic single nanopillar geometry in low-refractive-index (n < 1.6) material. Grayscale and full color palettes were achieved that allow decomposition onto hue, saturation, and brightness values. This approach enabled the "painting" of arbitrary colorful and grayscale images by mapping desired prints to precisely controllable parameters during 3D printing. We further extend our understanding of the scattering properties of the low-refractive-index nanopillar to demonstrate grayscale inversion and color desaturation and steganography at the level of single nanopillars.

Constructing an achromatic polarization-dependent bifocal metalens with height-gradient metastructures

Metalenses possess the extraordinary capability to tailor the wavefront of light with compact metastructures. However, it remains challenging to eliminate chromatic aberration and realize multifunctionality. Here we report an achromatic bifocal metalens (ABM) made of three-dimensional standing nano blocks (SNBs). By introducing a height gradient to SNBs, the ABM can achieve achromatic focusing in the wavelength range of 760-1550 nm with two different focal lengths by merely orthogonally switching the linear polarization of the incident beam. Such an achromatic multi-functional element may have applications in polarization sensing/display and shared-aperture optics design, among many others.

Hybrid metasurfaces for simultaneous focusing and filtering

This work presents the design and fabrication of polymeric, structural optical filters that simultaneously focus light. These filters represent a novel, to the best of our knowledge, design at the boundary between diffractive optics and metasurfaces that may provide significant advantages for both digital and hyperspectral imaging. Filters for visible and near-infrared wavelengths were designed using finite-difference time-domain (FDTD) simulations. Prototype filters were fabricated using two-photon lithography, a form of nanoscale 3D printing, and have geometries suitable to replication by molding. The experimentally measured spectral transmission and focused spot size of each filter show excellent agreement with simulation.