Silicon-photonics acoustic detector for optoacoustic micro-tomography

Molecular Ferroelectrics for Highly Sensitive Detection Toward Low-Frequency Sound Recognition

Human hearing cannot sensitively detect sounds below 100 Hz, which can affect the physical well-being and lead to dizziness, headaches, and nausea. Piezoelectric acoustic sensors still lack sensitivity to low-frequency sounds owing to the low piezoelectric coefficient or high elastic modulus of materials. The low elastic modulus and substantial piezoelectric coefficient of molecular ferroelectric materials make them excellent candidates for acoustic sensors. In this study, the molecular ferroelectric, [(CH3)3NCH2Cl]CdCl3, is used as a piezoelectric active layer in the construction of a piezoelectric acoustic sensor for low-frequency sound detection. The sensor exhibits high sensitivity (47.43 mV Pa-1 cm-2) at 87 Hz, with an excellent level of frequency resolution (up to 0.1 Hz). This facilitates the accurate discrimination and detection of low-frequency sounds, which is suitable for noise detection applications. The sensor differentiates between various musical instruments and heartbeats, and recognizes audio signals. This study highlights the potential of molecular ferroelectric materials in piezoelectric acoustic device applications, including noise detection, health monitoring, and human-computer interactions.

Towards in vivo photoacoustic human imaging: Shining a new light on clinical diagnostics

Multiscale visualization of human anatomical structures is revolutionizing clinical diagnosis and treatment. As one of the most promising clinical diagnostic techniques, photoacoustic imaging (PAI), or optoacoustic imaging, bridges the spatial-resolution gap between pure optical and ultrasonic imaging techniques, by the modes of optical illumination and acoustic detection. PAI can non-invasively capture multiple optical contrasts from the endogenous agents such as oxygenated/deoxygenated hemoglobin, lipid and melanin or a variety of exogenous specific biomarkers to reveal anatomy, function, and molecular for biological tissues in vivo, showing significant potential in clinical diagnostics. In 2001, the worldwide first clinical prototype of the photoacoustic system was used to screen breast cancer in vivo, which opened the prelude to photoacoustic clinical diagnostics. Over the past two decades, PAI has achieved monumental discoveries and applications in human imaging. Progress towards preclinical/clinical applications includes breast, skin, lymphatics, bowel, thyroid, ovarian, prostate, and brain imaging, etc., and there is no doubt that PAI is opening new avenues to realize early diagnosis and precise treatment of human diseases. In this review, the breakthrough researches and key applications of photoacoustic human imaging in vivo are emphatically summarized, which demonstrates the technical superiorities and emerging applications of photoacoustic human imaging in clinical diagnostics, providing clinical translational orientations for the photoacoustic community and clinicians. The perspectives on potential improvements of photoacoustic human imaging are finally highlighted.

Bragg grating etalon-based optical fiber for ultrasound and optoacoustic detection

Fiber-based interferometers receive significant interest as they lead to miniaturization of optoacoustic and ultrasound detectors without the quadratic loss of sensitivity common to piezoelectric elements. Nevertheless, in contrast to piezoelectric crystals, current fiber-based ultrasound detectors operate with narrow ultrasound bandwidth which limits the application range and spatial resolution achieved in imaging implementations. We port the concept of silicon waveguide etalon detection to optical fibers using a sub-acoustic reflection terminator to a Bragg grating embedded etalon resonator (EER), uniquely implementing direct and forward-looking access to incoming ultrasound waves. Precise fabrication of the terminator is achieved by continuously recording the EER spectrum during polishing and fitting the spectra to a theoretically calculated spectrum for the selected thickness. Characterization of the EER inventive design reveals a small aperture (10.1 µm) and an ultra-wide bandwidth (160 MHz) that outperforms other fiber resonators and enables an active detection area and overall form factor that is smaller by more than an order of magnitude over designs based on piezoelectric transducers. We discuss how the EER paves the way for the most adept fiber-based miniaturized sound detection today, circumventing the limitations of currently available designs.

Ultrasound sensing with optical microcavities

Ultrasound sensors play an important role in biomedical imaging, industrial nondestructive inspection, etc. Traditional ultrasound sensors that use piezoelectric transducers face limitations in sensitivity and spatial resolution when miniaturized, with typical sizes at the millimeter to centimeter scale. To overcome these challenges, optical ultrasound sensors have emerged as a promising alternative, offering both high sensitivity and spatial resolution. In particular, ultrasound sensors utilizing high-quality factor (Q) optical microcavities have achieved unprecedented performance in terms of sensitivity and bandwidth, while also enabling mass production on silicon chips. In this review, we focus on recent advances in ultrasound sensing applications using three types of optical microcavities: Fabry-Perot cavities, π-phase-shifted Bragg gratings, and whispering gallery mode microcavities. We provide an overview of the ultrasound sensing mechanisms employed by these microcavities and discuss the key parameters for optimizing ultrasound sensors. Furthermore, we survey recent advances in ultrasound sensing using these microcavity-based approaches, highlighting their applications in diverse detection scenarios, such as photoacoustic imaging, ranging, and particle detection. The goal of this review is to provide a comprehensive understanding of the latest advances in ultrasound sensing with optical microcavities and their potential for future development in high-performance ultrasound imaging and sensing technologies.

Ultrasound-Sensitive Intelligent Nanosystems: A Promising Strategy for the Treatment of Neurological Diseases

Neurological diseases are a major global health challenge, affecting hundreds of millions of people worldwide. Ultrasound therapy plays an irreplaceable role in the treatment of neurological diseases due to its noninvasive, highly focused, and strong tissue penetration capabilities. However, the complexity of brain and nervous system and the safety risks associated with prolonged exposure to ultrasound therapy severely limit the applicability of ultrasound therapy. Ultrasound-sensitive intelligent nanosystems (USINs) are a novel therapeutic strategy for neurological diseases that bring greater spatiotemporal controllability and improve safety to overcome these challenges. This review provides a detailed overview of therapeutic strategies and clinical advances of ultrasound in neurological diseases, focusing on the potential of USINs-based ultrasound in the treatment of neurological diseases. Based on the physical and chemical effects induced by ultrasound, rational design of USINs is a prerequisite for improving the efficacy of ultrasound therapy. Recent developments of ultrasound-sensitive nanocarriers and nanoagents are systemically reviewed. Finally, the challenges and developing prospects of USINs are discussed in depth, with a view to providing useful insights and guidance for efficient ultrasound treatment of neurological diseases.

Echelon grating refractive index sensor

There are few reports on optical refractive index sensors that have both high resonant-wavelength resolution (RWR) and high refractive index sensitivity (RIS). Herein, based on an echelon grating, we design a refractive index sensor that combines the two advantages together. The principal fringe of echelon grating has a small full width at half maximum and a good signal-to-noise ratio, leading to a high RWR. The wavefront splitting interference makes the sensor have high RIS. The large free spectral range (FSR) of the principal fringes expands the dynamic range of the sensor. The experimentally realized RWR, RIS, and FSR are 2 × 10-2 nm, 1.14 × 104 nm/RIU (RIU: refractive index unit), and 130 nm, respectively. The detection limit of refractive index is 1.59 × 10-6 RIU. The dynamic range of the sensor is 1.14 × 10-2 RIU. In addition, there are schemes to improve RWR and RIS, which can further reduce the detection limit of refractive index. The echelon grating refractive index sensor features low detection limit, low cost, high stability, and good robustness.

High-sensitivity fiber-tip acoustic sensor with ultrathin gold diaphragm

Miniature acoustic sensors with high sensitivity are highly desired for applications in medical photoacoustic imaging, acoustic communications and industrial nondestructive testing. However, conventional acoustic sensors based on piezoelectric, piezoresistive and capacitive detectors usually require a large element size on a millimeter to centimeter scale to achieve a high sensitivity, greatly limiting their spatial resolution and the application in space-confined sensing scenarios. Herein, by using single-crystal two-dimensional gold flakes (2DGFs) as the sensing diaphragm of an extrinsic Fabry-Perot interferometer on a fiber tip, we demonstrate a miniature optical acoustic sensor with high sensitivity. Benefiting from the ultrathin thickness (∼8 nm) and high reflectivity of the 2DGF, the fiber-tip acoustic sensor gives an acoustic pressure sensitivity of ∼300 mV/Pa in the frequency range from 100 Hz to 20 kHz. The noise-equivalent pressure of the fiber-tip acoustic sensor at the frequency of 13 kHz is as low as 62.8 µPa/Hz1/2, which is one or two orders of magnitude lower than that of reported optical acoustic sensors with the same size.

A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement

A surface acoustic wave (SAW) gyroscope measures the rate of rotational angular velocity by exploiting a phenomenon known as the SAW gyroscope effect. Such a gyroscope is a great candidate for application in harsh environments because of the simplification of the suspension vibration mechanism necessary for traditional microelectromechanical system (MEMS) gyroscopes. Here, for the first time, we propose a novel toroidal standing-wave-mode SAW gyroscope using focused interdigitated transducers (FIDTs). Unlike traditional SAW gyroscopes that use linear IDTs to generate surface acoustic waves, which cause beam deflection and result in energy dissipation, this study uses FIDTs to concentrate the SAW energy based on structural features, resulting in better focusing performance and increased SAW amplitude. The experimental results reveal that the sensitivity of the structure is 1.51 µV/(°/s), and the bias instability is 0.77°/s, which are improved by an order of magnitude compared to those of a traditional SAW gyroscope. Thus, the FIDT component can enhance the performance of the SAW gyroscope, demonstrating its superiority for angular velocity measurements. This work provides new insights into improving the sensitivity and performance of SAW gyroscopes.

Insights into Materials, Physics, and Applications in Flexible and Wearable Acoustic Sensing Technology

Sound plays a crucial role in the perception of the world. It allows to communicate, learn, and detect potential dangers, diagnose diseases, and much more. However, traditional acoustic sensors are limited in their form factors, being rigid and cumbersome, which restricts their potential applications. Recently, acoustic sensors have made significant advancements, transitioning from rudimentary forms to wearable devices and smart everyday clothing that can conform to soft, curved, and deformable surfaces or surroundings. In this review, the latest scientific and technological breakthroughs with insightful analysis in materials, physics, design principles, fabrication strategies, functions, and applications of flexible and wearable acoustic sensing technology are comprehensively explored. The new generation of acoustic sensors that can recognize voice, interact with machines, control robots, enable marine positioning and localization, monitor structural health, diagnose human vital signs in deep tissues, and perform organ imaging is highlighted. These innovations offer unique solutions to significant challenges in fields such as healthcare, biomedicine, wearables, robotics, and metaverse. Finally, the existing challenges and future opportunities in the field are addressed, providing strategies to advance acoustic sensing technologies for intriguing real-world applications and inspire new research directions.

Optical ultrasound sensors for photoacoustic imaging: a review

Significance

Photoacoustic (PA) imaging is an emerging biomedical imaging modality that can map optical absorption contrast in biological tissues by detecting ultrasound signal. Piezoelectric transducers are commonly used in PA imaging to detect the ultrasound signals. However, piezoelectric transducers suffer from low sensitivity when the dimensions are reduced and are easily influenced by electromagnetic interference. To avoid these limitations, various optical ultrasound sensors have been developed and shown their great potential in PA imaging.

Aim

Our study aims to summarize recent progress in optical ultrasound sensor technologies and their applications in PA imaging.

Approach

The commonly used optical ultrasound sensing techniques and their applications in PA systems are reviewed. The technical advances of different optical ultrasound sensors are summarized.

Results

Optical ultrasound sensors can provide wide bandwidth and improved sensitivity with miniatured size, which enables their applications in PA imaging.

Conclusions

The optical ultrasound sensors are promising transducers in PA imaging to provide higher-resolution images and can be used in new applications with their unique advantages.

Photoacoustic imaging plus X: a review

Significance

Photoacoustic (PA) imaging (PAI) represents an emerging modality within the realm of biomedical imaging technology. It seamlessly blends the wealth of optical contrast with the remarkable depth of penetration offered by ultrasound. These distinctive features of PAI hold tremendous potential for various applications, including early cancer detection, functional imaging, hybrid imaging, monitoring ablation therapy, and providing guidance during surgical procedures. The synergy between PAI and other cutting-edge technologies not only enhances its capabilities but also propels it toward broader clinical applicability.

Aim

The integration of PAI with advanced technology for PA signal detection, signal processing, image reconstruction, hybrid imaging, and clinical applications has significantly bolstered the capabilities of PAI. This review endeavor contributes to a deeper comprehension of how the synergy between PAI and other advanced technologies can lead to improved applications.

Approach

An examination of the evolving research frontiers in PAI, integrated with other advanced technologies, reveals six key categories named "PAI plus X." These categories encompass a range of topics, including but not limited to PAI plus treatment, PAI plus circuits design, PAI plus accurate positioning system, PAI plus fast scanning systems, PAI plus ultrasound sensors, PAI plus advanced laser sources, PAI plus deep learning, and PAI plus other imaging modalities.

Results

After conducting a comprehensive review of the existing literature and research on PAI integrated with other technologies, various proposals have emerged to advance the development of PAI plus X. These proposals aim to enhance system hardware, improve imaging quality, and address clinical challenges effectively.

Conclusions

The progression of innovative and sophisticated approaches within each category of PAI plus X is positioned to drive significant advancements in both the development of PAI technology and its clinical applications. Furthermore, PAI not only has the potential to integrate with the above-mentioned technologies but also to broaden its applications even further.

Large-field-of-view optical-resolution optoacoustic microscopy using a stationary silicon-photonics acoustic detector

Significance

Optical-resolution optoacoustic microscopy (OR-OAM) enables label-free imaging of the microvasculature by using optical pulse excitation and acoustic detection, commonly performed by a focused optical beam and an ultrasound transducer. One of the main challenges of OR-OAM is the need to combine the excitation and detection in a coaxial configuration, often leading to a bulky setup that requires physically scanning the ultrasound transducer to achieve a large field of view.

Aim

The aim of this work is to develop an OR-OAM configuration that does not require physically scanning the ultrasound transducer or the acoustic beam path.

Approach

Our OR-OAM system is based on a non-coaxial configuration in which the detection is performed by a silicon-photonics acoustic detector (SPADE) with a semi-isotropic sensitivity. The system is demonstrated in both epi- and trans-illumination configurations, where in both configurations SPADE remains stationary during the imaging procedure and only the optical excitation beam is scanned.

Results

The system is showcased for imaging resolution targets and for the in vivo visualization of the microvasculature in a mouse ear. Optoacoustic imaging with focal spots down to 1.3    μ m , lateral resolution of 4    μ m , and a field of view higher than 4 mm in both lateral dimensions were demonstrated.

Conclusions

We showcase a new OR-OAM design, compatible with epi-illumination configuration. This setup enables relatively large fields of view without scanning the acoustic detector or acoustic beam path. Furthermore, it offers the potential for high-speed imaging within compact, miniature probe and could potentially facilitate the clinical translation of OR-OAM technology.

Interfacial Effect on the Transient Dielectric Function and Charge Transfer in a Monolayer WS2/Si Heterojunction

Monolayer tungsten disulfide (WS2) is a highly promising material for silicon photonics. Thus, the WS2/Si interface plays a very important role due to the interfacial complex effects and abundant states. Among them, the effect of charge transfer on exciton dynamics and the optoelectronic property is determined by the dielectric function, which is very crucial for the performance of optoelectronic devices. However, research on the exciton dynamics or the transient dielectric function of WS2 in such WS2/Si junctions is still rare. In this work, both the transient dielectric function and charge transfer of WS2/Si heterojunctions are analyzed based on the transient reflectance spectra measured by the pump-probe spectrometer. The dynamic processes of the A exciton, affected by charge transfer within the WS2/Si heterojunction, are interpreted. Moreover, the transient dielectric function of WS2 is quantitatively analyzed. The dielectric function of WS2 exhibits a notable 19% change, persisting for more than 180 ps within the WS2/Si heterojunction. These findings can pave the way for the advancement of silicon photonic devices based on WS2.

Formation of multiple complex light structures simultaneously in 3D volume using a single binary phase mask

Complex structure formation inside or through turbid media is a challenging task due to refractive index inhomogeneity, random light scattering, and speckle noise formation. In this article, we have coupled the data regression model in the R-squared metric and used its advantages as a fitness function in the genetic algorithm to advance the resolution and structural uniformity. As a compatible system with the binary genetic algorithm, we have presented a cost-effective iterative wavefront shaping system-design with binary phase modulation using an affordable ferroelectric liquid crystal (FLC) based binary-phase spatial light modulator (SLM). R-squared metric in the genetic algorithm is analyzed to optimize the binary phase mask, and the prototype system based on iterative binary phase modulation has been validated with a 120-grit ground glass diffuser and fresh chicken tissues of thickness 307 [Formula: see text] and 812 [Formula: see text]. The detailed results show that the proposed cost-effective wavefront shaping system with data regression model assisted R-squared fitness function can construct high-resolution multiple complex hetero-structures simultaneously in 3D volume using an optimized single phase-mask.

Review of Three-Dimensional Handheld Photoacoustic and Ultrasound Imaging Systems and Their Applications

Photoacoustic (PA) imaging is a non-invasive biomedical imaging technique that combines the benefits of optics and acoustics to provide high-resolution structural and functional information. This review highlights the emergence of three-dimensional handheld PA imaging systems as a promising approach for various biomedical applications. These systems are classified into four techniques: direct imaging with 2D ultrasound (US) arrays, mechanical-scanning-based imaging with 1D US arrays, mirror-scanning-based imaging, and freehand-scanning-based imaging. A comprehensive overview of recent research in each imaging technique is provided, and potential solutions for system limitations are discussed. This review will serve as a valuable resource for researchers and practitioners interested in advancements and opportunities in three-dimensional handheld PA imaging technology.

Silicon photonic acoustic detector (SPADE) using a silicon nitride microring resonator

Silicon photonics is an emerging platform for acoustic sensing, offering exceptional miniaturization and sensitivity. While efforts have focused on silicon-based resonators, silicon nitride resonators can potentially achieve higher Q-factors, further enhancing sensitivity. In this work, a 30 µm silicon nitride microring resonator was fabricated and coated with an elastomer to optimize acoustic sensitivity and signal fidelity. The resonator was characterized acoustically, and its capability for optoacoustic tomography was demonstrated. An acoustic bandwidth of 120 MHz and a noise-equivalent pressure of ∼ 7 mPa/Hz1/2 were demonstrated. The spatially dependent impulse response agreed with theoretical predictions, and spurious acoustic signals, such as reverberations and surface acoustic waves, had a marginal impact. High image fidelity optoacoustic tomography of a 20 µm knot was achieved, confirming the detector's imaging capabilities. The results show that silicon nitride offers low signal distortion and high-resolution optoacoustic imaging, proving its versatility for acoustic imaging applications.

All-optical optoacoustic micro-tomography in reflection mode

High-resolution optoacoustic imaging at depths beyond the optical diffusion limit is conventionally performed using a microscopy setup where a strongly focused ultrasound transducer samples the image object point-by-point. Although recent advancements in miniaturized ultrasound detectors enables one to achieve microscopic resolution with an unfocused detector in a tomographic configuration, such an approach requires illuminating the entire object, leading to an inefficient use of the optical power, and imposing a trans-illumination configuration that is limited to thin objects. We developed an optoacoustic micro-tomography system in an epi-illumination configuration, in which the illumination is scanned with the detector. The system is demonstrated in phantoms for imaging depths of up to 5 mm and in vivo for imaging the vasculature of a mouse ear. Although image-formation in optoacoustic tomography generally requires static illumination, our numerical simulations and experimental measurements show that this requirement is relaxed in practice due to light diffusion, which homogenizes the fluence in deep tissue layers.

Parallel interrogation of the chalcogenide-based micro-ring sensor array for photoacoustic tomography

Photoacoustic tomography (PAT), also known as optoacoustic tomography, is an attractive imaging modality that provides optical contrast with acoustic resolutions. Recent progress in the applications of PAT largely relies on the development and employment of ultrasound sensor arrays with many elements. Although on-chip optical ultrasound sensors have been demonstrated with high sensitivity, large bandwidth, and small size, PAT with on-chip optical ultrasound sensor arrays is rarely reported. In this work, we demonstrate PAT with a chalcogenide-based micro-ring sensor array containing 15 elements, while each element supports a bandwidth of 175 MHz (-6 dB) and a noise-equivalent pressure of 2.2 mPaHz^-1/2. Moreover, by synthesizing a digital optical frequency comb (DOFC), we further develop an effective means of parallel interrogation to this sensor array. As a proof of concept, parallel interrogation with only one light source and one photoreceiver is demonstrated for PAT with this sensor array, providing images of fast-moving objects, leaf veins, and live zebrafish. The superior performance of the chalcogenide-based micro-ring sensor array and the effectiveness of the DOFC-enabled parallel interrogation offer great prospects for advancing applications in PAT.

High-resolution silicon photonics focused ultrasound transducer with a sub-millimeter aperture

We present an all-optical focused ultrasound transducer with a sub-millimeter aperture and demonstrate its capability for high-resolution imaging of tissue ex vivo. The transducer is composed of a wideband silicon photonics ultrasound detector and a miniature acoustic lens coated with a thin optically absorbing metallic layer used to produce laser-generated ultrasound. The demonstrated device achieves axial resolution and lateral resolutions of 12 μm and 60 μm, respectively, well below typical values achieved by conventional piezoelectric intravascular ultrasound. The size and resolution of the developed transducer may enable its use for intravascular imaging of thin fibrous cap atheroma.

Silicon-photonics focused ultrasound detector for minimally invasive optoacoustic imaging

One of the main challenges in miniaturizing optoacoustic technology is the low sensitivity of sub-millimeter piezoelectric ultrasound transducers, which is often insufficient for detecting weak optoacoustic signals. Optical detectors of ultrasound can achieve significantly higher sensitivities than their piezoelectric counterparts for a given sensing area but generally lack acoustic focusing, which is essential in many minimally invasive imaging configurations. In this work, we develop a focused sub-millimeter ultrasound detector composed of a silicon-photonics optical resonator and a micro-machined acoustic lens. The acoustic lens provides acoustic focusing, which, in addition to increasing the lateral resolution, also enhances the signal. The developed detector has a wide bandwidth of 84 MHz, a focal width smaller than 50 µm, and noise-equivalent pressure of 37 mPa/Hz^1/2 - an order of magnitude improvement over conventional intravascular ultrasound. We show the feasibility of the approach and the detector's imaging capabilities by performing high-resolution optoacoustic microscopy of optical phantoms with complex geometries.

Enhancing optoacoustic mesoscopy through calibration-based iterative reconstruction

Optoacoustic mesoscopy combines rich optical absorption contrast with high spatial resolution at tissue depths beyond reach for microscopic techniques employing focused light excitation. The mesoscopic imaging performance is commonly hindered by the use of inaccurate delay-and-sum reconstruction approaches and idealized modeling assumptions. In principle, image reconstruction performance could be enhanced by simulating the optoacoustic signal generation, propagation, and detection path. However, for most realistic experimental scenarios, the underlying total impulse response (TIR) cannot be accurately modelled. Here we propose to capture the TIR by scanning of a sub-resolution sized absorber. Significant improvement of spatial resolution and depth uniformity is demonstrated over 3 mm range, outperforming delay-and-sum and model-based reconstruction implementations. Reconstruction performance is validated by imaging subcutaneous murine vasculature and human skin in vivo. The proposed experimental calibration and reconstruction paradigm facilitates quantitative inversions while averting complex physics-based simulations. It can readily be applied to other imaging modalities employing TIR-based reconstructions.

Miniaturized ultrasound detector arrays in silicon photonics using pulse transmission amplitude monitoring

Silicon photonics holds promise for a new generation of ultrasound-detection technology, based on optical resonators, with unparalleled miniaturization levels, sensitivities, and bandwidths, creating new possibilities for minimally invasive medical devices. While existing fabrication technologies are capable of producing dense resonator arrays whose resonance frequency is pressure sensitive, simultaneously monitoring the ultrasound-induced frequency modulation of numerous resonators has remained a challenge. Conventional techniques, which are based on tuning a continuous wave laser to the resonator wavelength, are not scalable due to the wavelength disparity between the resonators, requiring a separate laser for each resonator. In this work, we show that the Q-factor and transmission peak of silicon-based resonators can also be pressure sensitive, exploit this phenomenon to develop a readout scheme based on monitoring the amplitude, rather than frequency, at the output of the resonators using a single-pulse source, and demonstrate its compatibility with optoacoustic tomography.

Ultrasound sensing at thermomechanical limits with optomechanical buckled-dome microcavities

We describe the use of monolithic, buckled-dome cavities as ultrasound sensors. Patterned delamination within a compressively stressed thin film stack produces high-finesse plano-concave optical resonators with sealed and empty cavity regions. The buckled mirror also functions as a flexible membrane, highly responsive to changes in external pressure. Owing to their efficient opto-acousto-mechanical coupling, thermal-displacement-noise limited sensitivity is achieved at low optical interrogation powers and for modest optical (Q ∼ 10³) and mechanical (Q ∼ 10²) quality factors. We predict and verify broadband (up to ∼ 5 MHz), air-coupled ultrasound detection with noise-equivalent pressure (NEP) as low as ∼ 30-100 µPa/Hz^1/2. This corresponds to an ultrasonic force sensitivity ∼ 2 × 10^-13 N/Hz^1/2 and enables the detection of MHz-range signals propagated over distances as large as ∼ 20 cm in air. In water, thermal-noise-limited sensitivity is demonstrated over a wide frequency range (up to ∼ 30 MHz), with NEP as low as ∼ 100-800 µPa/Hz^1/2. These cavities exhibit a nearly omnidirectional response, while being ∼ 3-4 orders of magnitude more sensitive than piezoelectric devices of similar size. Easily realized as large arrays and naturally suited to direct coupling by free-space beams or optical fibers, they offer significant practical advantages over competing optical devices, and thus could be of interest for several emerging applications in medical and industrial ultrasound imaging.

Flexible passive integrated photonic devices with superior optical and mechanical performance

Flexible integrated photonics is a rapidly emerging technology with a wide range of possible applications in the fields of flexible optical interconnects, conformal multiplexing sensing, health monitoring, and biotechnology. One major challenge in developing mechanically flexible integrated photonics is the functional component within an integrated photonic circuit with superior performance. In this work, several essential flexible passive devices for such a circuit were designed and fabricated based on a multi-neutral-axis mechanical design and a monolithic integration technique. The propagation loss of the waveguide is calculated to be 4.2 dB/cm. In addition, we demonstrate a microring resonator, waveguide crossing, multimode interferometer (MMI), and Mach-Zehnder interferometer (MZI) for use at 1.55 µm, each exhibiting superior optical and mechanical performance. These results represent a significant step towards further exploring a complete flexible photonic integrated circuit.