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Wang B, Wei R, Shi H, Bao Y. Dynamic Spatial-Selective Metasurface with Multiple-Beam Interference. NANO LETTERS 2024; 24:5886-5893. [PMID: 38687301 DOI: 10.1021/acs.nanolett.4c01254] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/02/2024]
Abstract
The emergence of the metasurface has provided a versatile platform for the manipulation of light at the nanoscale. Recent research in metasurfaces has explored a plethora of dynamic control and switching of multifunctionalities, paving the way for innovative applications in fields such as imaging, sensing, and communication. However, current dynamic multifunctional metasurfaces face challenges in terms of functional scalability and selective activation. In this work, we introduce and experimentally demonstrate a strategy that utilizes multiple plane waves to create arbitrary periodic patterns on the metasurface, thus enabling the dynamic and arbitrary spatial-selective activation of its embedded multiplexed functionalities. Furthermore, our strategy facilitates dynamic light control through mechanical translation, as demonstrated by a high-speed, dynamically switchable beam deflection scenario. Our method effectively overcomes the limitations associated with traditional spatially multiplexing techniques, offering greater flexibility and selectivity for dynamic control in multifunctional metasurfaces.
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Affiliation(s)
- Boyou Wang
- Guangdong Provincial Key Laboratory of Nanophotonic Manipulation, Institute of Nanophotonics, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou 511443, China
| | - Rui Wei
- Guangdong Provincial Key Laboratory of Nanophotonic Manipulation, Institute of Nanophotonics, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou 511443, China
| | - Hongsheng Shi
- Guangdong Provincial Key Laboratory of Nanophotonic Manipulation, Institute of Nanophotonics, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou 511443, China
| | - Yanjun Bao
- Guangdong Provincial Key Laboratory of Nanophotonic Manipulation, Institute of Nanophotonics, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou 511443, China
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2
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Bi Q, Chen R, Ye X, Peng Y, Wang S, Wang Z. Chiral quasi bound states in the continuum for augmented reality. OPTICS EXPRESS 2024; 32:16103-16114. [PMID: 38859247 DOI: 10.1364/oe.519057] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/15/2024] [Accepted: 03/27/2024] [Indexed: 06/12/2024]
Abstract
Augmented Reality technology enables users to interact with virtual imagines and the real world. The emergence of AR has propelled the development of the next generation of optical devices towards miniaturization, lightweight design, and enhanced light field manipulation capabilities. However, current AR glass still suffer from shortcomings of low efficiency. This work proposes a near-eye display device based on bilayer chiral quasi-BIC (Bound States in the continuum) nonlocal metasurfaces which can reflect narrow bandwidth RGB light with high efficiency while being able to see the natural environment clearly. At the same time, the geometric phase is introduced to realize oblique emission and reflective focusing. Due to its ability to manipulate narrowband light fields, it can reduce the interaction of metasurfaces and environment light, and has potential applications in the fields of imaging and near-eye display.
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3
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Wu XY, Feng HY, Wan F, Wei M, Guo C, Cai L, Wu F, Jiang ZH, Kang L, Hong W, Werner DH. An Ultrathin, Fast-Response, Large-Scale Liquid-Crystal-Facilitated Multi-Functional Reconfigurable Metasurface for Comprehensive Wavefront Modulation. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2402170. [PMID: 38587064 DOI: 10.1002/adma.202402170] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/09/2024] [Revised: 04/01/2024] [Indexed: 04/09/2024]
Abstract
The rapid advancement of prevailing communication/sensing technologies necessitates cost-effective millimeter-wave arrays equipped with a massive number of phase-shifting cells to perform complicated beamforming tasks. Conventional approaches employing semiconductor switch/varactor components or tunable materials encounter obstacles such as quantization loss, high cost, high complexity, and limited adaptability for realizing large-scale arrays. Here, a low-cost, ultrathin, fast-response, and large-scale solution relying on metasurface concepts combined together with liquid crystal (LC) materials requiring a layer thickness of only 5 µm is reported. Rather than immersing resonant structures in LCs, a joint material-circuit-based strategy is devised, via integrating deep-subwavelength-thick LCs into slow-wave structures, to achieve constitutive metacells with continuous phase shifting and stable reflectivity. An LC-facilitated reconfigurable metasurface sub-system containing more than 2300 metacells is realized with its unprecedented comprehensive wavefront manipulation capacity validated through various beamforming functions, including beam focusing/steering, reconfigurable vortex beams, and tunable holograms, demonstrating a milli-second-level function-switching speed. The proposed methodology offers a paradigm shift for modulating electromagnetic waves in a non-resonating broadband fashion with fast-response and low-cost properties by exploiting functionalized LC-enabled metasurfaces. Moreover, this extremely agile metasurface-enabled antenna technology will facilitate a transformative impact on communication/sensing systems and empower new possibilities for wavefront engineering and diffractive wave calculation/inference.
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Affiliation(s)
- Xin Yu Wu
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Hong Yuan Feng
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Fengshuo Wan
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Meng Wei
- Central Research Institute, BOE Technology Group Company Ltd., Beijing, 100176, China
| | - Chong Guo
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Longzhu Cai
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Fan Wu
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Zhi Hao Jiang
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Lei Kang
- Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Wei Hong
- State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing, 210096, China
| | - Douglas H Werner
- Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, 16802, USA
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Palmieri A, Dorrah AH, Yang J, Oh J, Dainese P, Capasso F. Do dielectric bilayer metasurfaces behave as a stack of decoupled single-layer metasurfaces? OPTICS EXPRESS 2024; 32:8146-8159. [PMID: 38439479 DOI: 10.1364/oe.505401] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/12/2023] [Accepted: 12/11/2023] [Indexed: 03/06/2024]
Abstract
Flat optics or metasurfaces have opened new frontiers in wavefront shaping and its applications. Polarization optics is one prominent area which has greatly benefited from the shape-birefringence of metasurfaces. However, flat optics comprising a single layer of meta-atoms can only perform a subset of polarization transformations, constrained by a symmetric Jones matrix. This limitation can be tackled using metasurfaces composed of bilayer meta-atoms but exhausting all possible combinations of geometries to build a bilayer metasurface library is a very daunting task. Consequently, bilayer metasurfaces have been widely treated as a cascade (product) of two decoupled single-layer metasurfaces. Here, we test the validity of this assumption for dielectric metasurfaces by considering a metasurface made of titanium dioxide on fused silica substrate at a design wavelength of 532 nm. We explore regions in the design space where the coupling between the top and bottom layers can be neglected, i.e., producing a far-field response which approximates that of two decoupled single-layer metasurfaces. We complement this picture with the near-field analysis to explore the underlying physics in regions where both layers are strongly coupled. We also show the generality of our analysis by applying it to silicon metasurfaces at telecom wavelengths. Our unified approach allows the designer to efficiently build a multi-layer dielectric metasurface, either in transmission or reflection, by only running one full-wave simulation for a single-layer metasurface.
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Chen C, Xiao X, Ye X, Sun J, Ji J, Yu R, Song W, Zhu S, Li T. Neural network assisted high-spatial-resolution polarimetry with non-interleaved chiral metasurfaces. LIGHT, SCIENCE & APPLICATIONS 2023; 12:288. [PMID: 38044390 PMCID: PMC10694149 DOI: 10.1038/s41377-023-01337-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/06/2023] [Revised: 10/31/2023] [Accepted: 11/12/2023] [Indexed: 12/05/2023]
Abstract
Polarimetry plays an indispensable role in modern optics. Nevertheless, the current strategies generally suffer from bulky system volume or spatial multiplexing scheme, resulting in limited performances when dealing with inhomogeneous polarizations. Here, we propose a non-interleaved, interferometric method to analyze the polarizations based on a tri-channel chiral metasurface. A deep convolutional neural network is also incorporated to enable fast, robust and accurate polarimetry. Spatially uniform and nonuniform polarizations are both measured through the metasurface experimentally. Distinction between two semblable glasses is also demonstrated. Our strategy features the merits of compactness and high spatial resolution, and would inspire more intriguing design for detecting and sensing.
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Affiliation(s)
- Chen Chen
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Xingjian Xiao
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Xin Ye
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Jiacheng Sun
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Jitao Ji
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Rongtao Yu
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Wange Song
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Shining Zhu
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China
| | - Tao Li
- Nanjing University, National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulations, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, 210093, Nanjing, China.
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6
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Chu Y, Chen C, Xiao X, Shen W, Ye X, Zhu S, Li T. Full-space wavefront control enabled by a bilayer metasurface sandwiching 1D photonic crystal. OPTICS LETTERS 2023; 48:5895-5898. [PMID: 37966746 DOI: 10.1364/ol.501949] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/28/2023] [Accepted: 10/15/2023] [Indexed: 11/16/2023]
Abstract
Metasurfaces, composed of sub-wavelength structures, have a powerful capability to manipulate light propagations. However, metasurfaces usually work either in pure reflection mode or pure transmission mode. Achieving full-space manipulation of light at will in the optical region is still challenging. Here we propose a design method of full-space meta-device containing a bilayer metasurface sandwiching 1D photonic crystal to manipulate the transmitted and reflected wave independently. To provide a proof-of-concept demonstration, a device is proposed to show the light focusing in transmission and a vortex beam in reflection. Meanwhile, a device focusing the reflected light with oblique 45° incidence and the transmitted light with normal incidence is designed to indicate its application potential in augmented reality (AR) application. Our design provides a promising way to enrich the multifunctional meta-devices for potential applications.
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Wang J, Yu F, Chen J, Wang J, Chen R, Zhao Z, Chen J, Chen X, Lu W, Li G. Continuous-Spectrum-Polarization Recombinant Optical Encryption with a Dielectric Metasurface. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2304161. [PMID: 37408327 DOI: 10.1002/adma.202304161] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/04/2023] [Revised: 06/28/2023] [Accepted: 07/03/2023] [Indexed: 07/07/2023]
Abstract
The Jones matrix, with eight degrees of freedom (DoFs), provides a general mathematical framework for the multifunctional design of metasurfaces. Theoretically, the maximum eight DoFs can be further extended in the spectrum dimension to endow unique encryption capabilities. However, the topology and intrinsic spectral responses of meta-atoms constrains the continuous engineering of polarization evolution over wavelength dimension. In this work, a forward evolution strategy to quickly establish the mapping relationships between the solutions of the dispersion Jones matrix and the spectral responses of meta-atoms is reported. Based on the eigenvector transformation method, arbitrary conjugate polarization channels over the continuous-spectrum dimension are successfully reconstructed. As a proof-of-concept, a silicon metadevice is demonstrated for optical information encryption transmission. Remarkably, the arbitrary combination forms of polarization and wavelength dimension increase the information capacity (210 ), and the measured polarization contrasts of the conjugate polarization conversion are >94% in the entire wavelength range (3-4 µm). It is believed that the proposed approach will benefit secure optical and quantum information technologies.
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Affiliation(s)
- Jiuxu Wang
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Sciences, No.19 Yuquan Road, Beijing, 100049, China
| | - Feilong Yu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
| | - Jin Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
| | - Jie Wang
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
| | - Rongsheng Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
| | - Zengyue Zhao
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
| | - Jian Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
| | - Xiaoshuang Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Sciences, No.19 Yuquan Road, Beijing, 100049, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No.1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
| | - Wei Lu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Sciences, No.19 Yuquan Road, Beijing, 100049, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No.1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
| | - Guanhai Li
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Sciences, No.19 Yuquan Road, Beijing, 100049, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No.1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
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Zhang Q, Wang J, Xie R, Gu Z, Zhang Z, Wang X, Zhang H, Chen C, Chen W, Ding J, Zhang X. Four-channel joint-polarization-frequency-multiplexing encryption meta-hologram based on dual-band polarization multiplexing meta-atoms. OPTICS EXPRESS 2023; 31:17569-17579. [PMID: 37381487 DOI: 10.1364/oe.487483] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/10/2023] [Accepted: 04/22/2023] [Indexed: 06/30/2023]
Abstract
Holography is an advanced imaging technology where image information can be reconstructed without a lens. Recently, multiplexing techniques have been widely adapted to realize multiple holographic images or functionalities in a meta-hologram. In this work, a reflective four-channel meta-hologram is proposed to further increase the channel capacity by simultaneously implementing frequency and polarization multiplexing. Compared to the single multiplexing technique, the number of channels achieves a multiplicative growth of the two multiplexing techniques, as well as allowing meta-devices to possess cryptographic characteristics. Specifically, spin-selective functionalities for circular polarizations can be achieved at lower frequency, while different functionalities can be obtained at higher frequency under different linearly polarized incidences. As an illustrative example, a four-channel joint-polarization-frequency-multiplexing meta-hologram is designed, fabricated, and characterized. The measured results agree well with the numerically calculated and full-wave simulated ones, which provides the proposed method with great potential in numerous opportunities such as multi-channel imaging and information encryption technology.
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Chen J, Yu F, Liu X, Bao Y, Chen R, Zhao Z, Wang J, Wang X, Liu W, Shi Y, Qiu CW, Chen X, Lu W, Li G. Polychromatic full-polarization control in mid-infrared light. LIGHT, SCIENCE & APPLICATIONS 2023; 12:105. [PMID: 37142624 PMCID: PMC10160079 DOI: 10.1038/s41377-023-01140-3] [Citation(s) in RCA: 6] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/06/2023] [Revised: 03/23/2023] [Accepted: 03/29/2023] [Indexed: 05/06/2023]
Abstract
Objects with different shapes, materials and temperatures can emit distinct polarizations and spectral information in mid-infrared band, which provides a unique signature in the transparent window for object identification. However, the crosstalk among various polarization and wavelength channels prevents from accurate mid-infrared detections at high signal-to-noise ratio. Here, we report full-polarization metasurfaces to break the inherent eigen-polarization constraint over the wavelengths in mid-infrared. This recipe enables to select arbitrary orthogonal polarization basis at individual wavelength independently, therefore alleviating the crosstalk and efficiency degradation. A six-channel all-silicon metasurface is specifically presented to project focused mid-infrared light to distinct positions at three wavelengths, each with a pair of arbitrarily chosen orthogonal polarizations. An isolation ratio of 117 between neighboring polarization channels is experimentally recorded, exhibiting detection sensitivity one order of magnitude higher than existing infrared detectors. Remarkably, the high aspect ratio ~30 of our meta-structures manufactured by deep silicon etching technology at temperature -150 °C guarantees the large and precise phase dispersion control over a broadband from 3 to 4.5 μm. We believe our results would benefit the noise-immune mid-infrared detections in remote sensing and space-to-ground communications.
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Affiliation(s)
- Jin Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No. 1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Feilong Yu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No. 1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Xingsi Liu
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117583, Singapore
| | - Yanjun Bao
- Institute of Nanophotonics, Jinan University, Guangzhou, 511443, China
| | - Rongsheng Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Zengyue Zhao
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Jiuxu Wang
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Xiuxia Wang
- Center for Micro-and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, 230026, China
| | - Wen Liu
- Center for Micro-and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, 230026, China
| | - Yuzhi Shi
- Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Cheng-Wei Qiu
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117583, Singapore.
- National University of Singapore Suzhou Research Institute, No. 377 Linquan Street, Suzhou, Jiangsu, 215123, China.
| | - Xiaoshuang Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No. 1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Wei Lu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No. 1 SubLane Xiangshan, Hangzhou, 310024, China
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China
| | - Guanhai Li
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China.
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No. 1 SubLane Xiangshan, Hangzhou, 310024, China.
- Shanghai Research Center for Quantum Sciences, 99 Xiupu Road, Shanghai, 201315, China.
- University of Chinese Academy of Science, No. 19 Yuquan Road, Beijing, 100049, China.
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Hsieh HC, Wu MR, Huang XT. Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation. SENSORS (BASEL, SWITZERLAND) 2023; 23:s23094482. [PMID: 37177682 PMCID: PMC10181731 DOI: 10.3390/s23094482] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/28/2023] [Revised: 04/24/2023] [Accepted: 05/02/2023] [Indexed: 05/15/2023]
Abstract
The present study introduces an optimized overlay target design to minimize the overlay error caused by asymmetric sidewall structures in semiconductor manufacturing. To achieve this goal, the overlay error formula was derived by separating the asymmetric bottom grating structure into symmetric and asymmetric parts. Based on this formula, it was found that the overlay target design with the linewidth of the bottom grating closed to the grating period could effectively reduce the overlay error caused by the sidewall asymmetry structure. Simulation results demonstrate that the proposed design can effectively control the measurement error of different wavelengths within ±0.3 nm, even under varying sidewall angles and film thicknesses. Overall, the proposed overlay target design can significantly improve the overlay accuracy in semiconductor manufacturing processes.
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Affiliation(s)
- Hung-Chih Hsieh
- Department of Electro-Optical Engineering, National United University, No. 2 Lienda, Miaoli 36063, Taiwan
| | - Meng-Rong Wu
- Department of Electro-Optical Engineering, National United University, No. 2 Lienda, Miaoli 36063, Taiwan
| | - Xiang-Ting Huang
- Department of Electro-Optical Engineering, National United University, No. 2 Lienda, Miaoli 36063, Taiwan
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