1
|
Xu G, Lu Z, Yuan J, Tan J. A 1064 nm laser adaptive limiter with visible light transparency based on one dimensional photonic crystals of LiNbO 3 defects. NANOSCALE 2024; 16:6033-6040. [PMID: 38411005 DOI: 10.1039/d3nr06593f] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/28/2024]
Abstract
Herein, we present the investigation of the visible light transparency and optical limiting characteristics of one dimensional photonic crystals with LiNbO3 defects fabricated by the sputtering technique. Transmission spectroscopy measurements reveal a broad photonic band gap with a 1064 nm defect mode and high transmittance within the visible range. The optical energy limiting performance in the photonic crystal can be attributed to the strong confinement of the optical field surrounding the LiNbO3 defect layer. The low energy 1064 nm laser demonstrates a transmittance of 82.15%. Notably, the optical limiting threshold is lower at 62.03 mJ cm-2 in comparison with conventional optical limiting materials. Additionally, the optical limiter achieves a transmittance of 68.57% within the visible light band.
Collapse
Affiliation(s)
- Guichuan Xu
- Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
- Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
| | - Zhengang Lu
- Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
- Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
| | - Jing Yuan
- Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
- Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
| | - Jiubin Tan
- Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
- Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
| |
Collapse
|
2
|
Liu X, Ruan Z, Sun S, Guo C, Chen K, Zhu N, Liu L. Sharp bend and large FSR ring resonator based on the free-form curves on a thin-film lithium niobate platform. OPTICS EXPRESS 2024; 32:9433-9441. [PMID: 38571178 DOI: 10.1364/oe.515173] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/02/2024] [Accepted: 02/14/2024] [Indexed: 04/05/2024]
Abstract
Sharp bends are crucial for large-scale and high-density photonics integration on thin-film lithium niobate platform. In this study, we demonstrate low-loss (<0.05 dB) and sharp bends (Reff = 30 µm) using free-form curves with a 200-nm-thick slab and a rib height of 200 nm on x-cut lithium niobate. Employing the same design method, we successfully realize a compact fully-etched ring resonator with a remarkably large free spectral range of 10.36 nm experimentally. Notably, the equivalent radius of the ring resonator is a mere 15 µm, with a loaded Q factor reaching 2.2 × 104.
Collapse
|
3
|
Yang Y, Chapman RJ, Haylock B, Lenzini F, Joglekar YN, Lobino M, Peruzzo A. Programmable high-dimensional Hamiltonian in a photonic waveguide array. Nat Commun 2024; 15:50. [PMID: 38167664 PMCID: PMC10761861 DOI: 10.1038/s41467-023-44185-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/02/2023] [Accepted: 12/02/2023] [Indexed: 01/05/2024] Open
Abstract
Waveguide lattices offer a compact and stable platform for a range of applications, including quantum walks, condensed matter system simulation, and classical and quantum information processing. However, to date, waveguide lattice devices have been static and designed for specific applications. We present a programmable waveguide array in which the Hamiltonian terms can be individually electro-optically tuned to implement various Hamiltonian continuous-time evolutions on a single device. We used a single array with 11 waveguides in lithium niobate, controlled via 22 electrodes, to perform a range of experiments that realized the Su-Schriffer-Heeger model, the Aubrey-Andre model, and Anderson localization, which is equivalent to over 2500 static devices. Our architecture's micron-scale local electric fields overcome the cross-talk limitations of thermo-optic phase shifters in other platforms such as silicon, silicon-nitride, and silica. Electro-optic control allows for ultra-fast and more precise reconfigurability with lower power consumption, and with quantum input states, our platform can enable the study of multiple condensed matter quantum dynamics with a single device.
Collapse
Affiliation(s)
- Yang Yang
- Quantum Photonics Laboratory and Centre for Quantum Computation and Communication Technology, RMIT University, Melbourne, VIC, 3000, Australia
| | - Robert J Chapman
- Quantum Photonics Laboratory and Centre for Quantum Computation and Communication Technology, RMIT University, Melbourne, VIC, 3000, Australia
- ETH Zurich, Optical Nanomaterial Group, Institute for Quantum Electronics, Department of Physics, 8093, Zurich, Switzerland
| | - Ben Haylock
- Centre for Quantum Computation and Communication Technology (Australian Research Council), Centre for Quantum Dynamics, Griffith University, Brisbane, QLD, 4111, Australia
- Institute for Photonics and Quantum Sciences, SUPA, Heriot-Watt University, Edinburgh, EH14 4AS, United Kingdom
| | - Francesco Lenzini
- Centre for Quantum Computation and Communication Technology (Australian Research Council), Centre for Quantum Dynamics, Griffith University, Brisbane, QLD, 4111, Australia
- Institute of Physics, University of Muenster, 48149, Muenster, Germany
| | - Yogesh N Joglekar
- Department of Physics, Indiana University Purdue University Indianapolis (IUPUI), Indianapolis, Indiana, 46202, USA.
| | - Mirko Lobino
- Centre for Quantum Computation and Communication Technology (Australian Research Council), Centre for Quantum Dynamics, Griffith University, Brisbane, QLD, 4111, Australia
- Department of Industrial Engineering, University of Trento, via Sommarive 9, 38123, Povo, Trento, Italy
- INFN-TIFPA, Via Sommarive 14, I-38123, Povo, Trento, Italy
| | - Alberto Peruzzo
- Quantum Photonics Laboratory and Centre for Quantum Computation and Communication Technology, RMIT University, Melbourne, VIC, 3000, Australia.
- Qubit Pharmaceuticals, Advanced Research Department, Paris, France.
| |
Collapse
|
4
|
Kumar CHSSP, Klimov NN, Kuo PS. Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform. AIP ADVANCES 2024; 14:10.1063/6.0003522. [PMID: 38915883 PMCID: PMC11194688 DOI: 10.1063/6.0003522] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/26/2024]
Abstract
Lithium niobate (LN) is used in diverse applications such as spectroscopy, remote sensing, and quantum communications. The emergence of lithium-niobate-on-insulator (LNOI) technology and its commercial accessibility represent significant milestones. This technology aids in harnessing the full potential of LN's properties, such as achieving tight mode confinement and strong overlap with applied electric fields, which has enabled LNOI-based electro-optic modulators to have ultra-broad bandwidths with low-voltage operation and low power consumption. Consequently, LNOI devices are emerging as competitive contenders in the integrated photonics landscape. However, the nanofabrication, particularly LN etching, presents a notable challenge. LN is hard, dense, and chemically inert. It has anisotropic etch behavior and a propensity to produce material redeposition during the reactive-ion plasma etch process. These factors make fabricating low-loss LNOI waveguides (WGs) challenging. Recognizing the pivotal role of addressing these fabrication challenges for obtaining low-loss WGs, our research focuses on a systematic study of various process steps in fabricating LNOI WGs and other photonic structures. In particular, our study involves (i) careful selection of hard mask materials, (ii) optimization of inductively coupled plasma etch parameters, and finally, (iii) determining the optimal post-etch cleaning approach to remove redeposited material on the sidewalls of the etched photonic structures. Using the recipe established, we realized optical WGs with total (propagation and coupling) loss value of -10.5 dB, comparable to established values found in the literature. Our findings broaden our understanding of optimizing fabrication processes for low-loss lithium-niobate waveguides and can serve as an accessible resource in advancing LNOI technology.
Collapse
Affiliation(s)
- CH. S. S. Pavan Kumar
- Information Technology Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
| | - Nikolai N. Klimov
- Physical Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
| | - Paulina S. Kuo
- Information Technology Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
| |
Collapse
|
5
|
Liu P, Wen H, Ren L, Shi L, Zhang X. χ (2) nonlinear photonics in integrated microresonators. FRONTIERS OF OPTOELECTRONICS 2023; 16:18. [PMID: 37460874 DOI: 10.1007/s12200-023-00073-4] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/04/2023] [Accepted: 05/22/2023] [Indexed: 07/20/2023]
Abstract
Second-order (χ(2)) optical nonlinearity is one of the most common mechanisms for modulating and generating coherent light in photonic devices. Due to strong photon confinement and long photon lifetime, integrated microresonators have emerged as an ideal platform for investigation of nonlinear optical effects. However, existing silicon-based materials lack a χ(2) response due to their centrosymmetric structures. A variety of novel material platforms possessing χ(2) nonlinearity have been developed over the past two decades. This review comprehensively summarizes the progress of second-order nonlinear optical effects in integrated microresonators. First, the basic principles of χ(2) nonlinear effects are introduced. Afterward, we highlight the commonly used χ(2) nonlinear optical materials, including their material properties and respective functional devices. We also discuss the prospects and challenges of utilizing χ(2) nonlinearity in the field of integrated microcavity photonics.
Collapse
Affiliation(s)
- Pengfei Liu
- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Hao Wen
- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Linhao Ren
- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Lei Shi
- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China.
- Optics Valley Laboratory, Wuhan, 430074, China.
| | - Xinliang Zhang
- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China
- Optics Valley Laboratory, Wuhan, 430074, China
| |
Collapse
|
6
|
Rukerandanga F, Musyoki S, Ataro EO. 3D design and analysis of an electro-optically tunable athermal and polarization-insensitive ring resonator-based add-drop filter for DWDM systems. Heliyon 2022; 8:e09567. [PMID: 35663458 PMCID: PMC9160769 DOI: 10.1016/j.heliyon.2022.e09567] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/20/2022] [Revised: 03/07/2022] [Accepted: 05/25/2022] [Indexed: 11/06/2022] Open
Abstract
Dense Wavelength Division Multiplexing system-based optical networks are currently the most appropriate solutions for all-optical networks that efficiently utilize the large bandwidth offered by optical fiber networks. Tunable ring resonator-based filters are highly attractive owing to their bandwidth and channel tunability, high spectral selectivity, low losses, low power consumption, and compactness; thus they are very good candidates for optical integrated circuits at a very large scale. We used titanium oxide and silicon oxide as the upper-cladding and under-cladding materials, respectively, around a silicon-rich nitride core to design an electro-optically tunable, polarization-insensitive, and thermally resilient sixth-order add-drop optical filter in the L-band (1565 nm-1625 nm). A thin film of lithium niobate added on the top of silicon oxide was used to enhance the tunability of the filter. A 3D multiphysics approach considering thermo-optic, and stress-optical effects while minimizing the polarization rotation has been adopted to solve the electromagnetic problem in a filter that can accommodate arbitrary Transverse Electric and Transverse Magnetic polarized optical signals. The device has a bandwidth of 50 GHz (linewidth of 0.4 nm) at a resonant wavelength of 1575.4 nm, an extended FSR of 2.512 THz, and losses of 0.82 dB in the bandpass. The filter is ultra-compact with a footprint of 15μm×160μm. We achieved a high-quality factor of 3250, a tunability efficiency of 8.95 pm/V, and a finesse of 31. To the best of our knowledge, it is the first time a complementary metal-oxide-semiconductor-compatible, electro-optically tunable, athermal, polarization-insensitive high order add-drop filter in the L-band with a top-flat response in the passband, and with an extended FSR has been designed for Dense Wavelength Division Multiplexing systems.
Collapse
|
7
|
Lin YC, Chen BY, Hsueh WJ. Conjugated topological interface-states in coupled ring resonators. Sci Rep 2021; 11:12104. [PMID: 34103563 PMCID: PMC8187389 DOI: 10.1038/s41598-021-91288-y] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/17/2020] [Accepted: 05/19/2021] [Indexed: 12/03/2022] Open
Abstract
The optical properties of topological photonics have attracted much interest recently because its potential applications for robust unidirectional transmission that are immune to scattering at disorder. However, researches on topological series coupled ring resonators (T-SCRR) have been much less discussed. The existence of topological interface-states (TIS) in the T-SCRR is described for the first time in this article. An approach has been developed to achieve this goal via the band structure of dielectric binary ring resonators and the Zak phase of each bandgap. It is found that an ultra-high-Q with complete transmission is obtained by the conjugated topological series coupled ring resonators due to the excitation of conjugated topological interface-states, which is different from those in conventional TIS. Furthermore, the problem of transmission decreases resulting from high-Q increases in the traditional photonic system is significantly improved by this approach. These findings could pave a novel path for developing advanced high-Q filters, optical sensors, switches, resonators, communications and quantum information processors.
Collapse
Affiliation(s)
- Yu-Chuan Lin
- Photonics Group, Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Road, Taipei, 10660, Taiwan
- Taiwan Instrument Research Institute, National Applied Research Laboratories, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu, 30076, Taiwan
| | - Bo-Yu Chen
- Photonics Group, Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Road, Taipei, 10660, Taiwan
| | - Wen-Jeng Hsueh
- Photonics Group, Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Road, Taipei, 10660, Taiwan.
| |
Collapse
|
8
|
Design, Simulation, and Analysis of Optical Microring Resonators in Lithium Tantalate on Insulator. CRYSTALS 2021. [DOI: 10.3390/cryst11050480] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
In this paper we design, simulate, and analyze single-mode microring resonators in thin films of z-cut lithium tantalate. They operate at wavelengths that are approximately equal to 1.55 μm. The single-mode conditions and transmission losses of lithium tantalate waveguides are simulated for different geometric parameters and silica thicknesses. An analysis is presented on the quality factor and free spectral range of the microring resonators in lithium tantalate at contrasting radii and gap sizes. The electro-optical modulation performance is analyzed for microring resonators with a radius of 20 μm. Since they have important practical applications, the filtering characteristics of the microring resonators that contain two straight waveguides are analyzed. This work enhances the knowledge of lithium tantalate microring structures and offers guidance on the salient parameters for the fabrication of highly efficient multifunctional photonic integrated devices, such as tunable filters and modulators.
Collapse
|
9
|
Su S, Ye X, Liu S, Zheng Y, Chen X. Active mode selection by defects in lithium niobate on insulator microdisks. OPTICS EXPRESS 2021; 29:11885-11891. [PMID: 33984960 DOI: 10.1364/oe.422113] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/08/2021] [Accepted: 03/23/2021] [Indexed: 06/12/2023]
Abstract
Whispering gallery mode (WGM) optical microcavities are important building blocks in photonic integrated circuits. Operation of such cavities on specific lower- or higher- order transverse modes has much interest in application perspectives. Here, we demonstrate active mode selection by introducing defects in lithium niobate on insulator microdisks. A focused ion beam is applied to precisely inscribe nano slits into the perimeter of the microdisk. The transmission spectra can be significantly thinned out without severe quality factor degradation. Either fundamental or high-order transverse WGMs can be retained by properly designing the size and location of the defects. The approach may have promising applications in single-mode lasing and nonlinear optics.
Collapse
|
10
|
Hou C, Ma T, Gao J, Liu H, Wang F. Mid-infrared electro-optic modulator based on a graphene-embedded plasmonic rib waveguide with ultrahigh electro-optic wavelength tuning. APPLIED OPTICS 2021; 60:2795-2802. [PMID: 33798154 DOI: 10.1364/ao.419388] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/13/2021] [Accepted: 03/06/2021] [Indexed: 06/12/2023]
Abstract
A graphene-embedded plasmonic rib waveguide (GEPRW) is designed for the mid-infrared electro-optic modulator. The mode characteristics and electro-optic (EO) modulation performances are simulated and optimized by using the finite element method. The results show that propagation length of 103mm and figure of merit of 106 are obtained by adjusting the bias voltage applied to the GEPRW. The EO wavelength tunings are -66.69 and -78.87nm/V for peak L and peak R in the loss spectra when w=3µm and h1=2µm. For a 100 µm long GEPRW, the modulation depths of ∼96.4,∼97.1,∼93.7, and ∼94.9%, and FWHMs of ∼30,∼74,∼34, and ∼59nm can be achieved when λ=1.55, 1.87. 1.89, and 2.23 µm. The EO modulator based on the GEPRW has a wide wavelength tuning range from 1.05 to 2.23 µm. It has high modulation depth, low insertion loss, and broad bandwidth, which can be used as EO tunable devices such as optical interconnects and optical switches.
Collapse
|
11
|
Liu X, Ying P, Zhong X, Xu J, Han Y, Yu S, Cai X. Highly efficient thermo-optic tunable micro-ring resonator based on an LNOI platform. OPTICS LETTERS 2020; 45:6318-6321. [PMID: 33186979 DOI: 10.1364/ol.410192] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/15/2020] [Accepted: 10/22/2020] [Indexed: 06/11/2023]
Abstract
We demonstrate a high-efficiency thermo-optic (TO) tunable micro-ring resonator in thin-film lithium niobate. Thermal insulation trenches around the heated micro-ring resonator and the underlying silicon substrate significantly reduce the heating power consumption and improve the tuning efficiency. Compared to conventional TO devices without thermal insulation trenches, the proposed device achieves a full free spectral range wavelength shift with a 14.9 mW heating power, corresponding to a thermal tuning efficiency of 53.7 pm/mW, a more than 20-fold improvement of tuning efficiency. The approach enables energy-efficient high-performance TO devices such as optical switches, wavelength routers, and other reconfigurable photonic devices.
Collapse
|
12
|
Abstract
Micro-optical gyroscopes (MOGs) are a type of high-accuracy gyroscope, which have the advantages of miniaturization, low cost, and satisfactory operating power. The quality factor (Q) of the waveguide ring resonators (WRRs) is very important to the performance of MOGs. This paper reviews various MOGs using WRRs made from different materials, including silica, indium phosphide, calcium fluoride, and polymer WRRs. The different architectures of the MOGs are reviewed, such as double-ring resonator MOGs and multiple-ring resonator MOGs. Candidate high-Q WRRs for MOGs, including silicon nitride, lithium niobite, calcium fluoride, and magnesium fluoride WRRs, are also reviewed. The manufacturing process, Q, and integration density values are compared. Summarizing the advanced WRRs and calculating the shot-noise-limited sensitivity are helpful processes in selecting suitable materials to fabricate MOGs.
Collapse
|
13
|
He Q, Zhang Z, Zhao Y. Photonics-assisted frequency-coded signal receiver with ultra low minimum detectable power. OPTICS EXPRESS 2020; 28:29122-29131. [PMID: 33114817 DOI: 10.1364/oe.404425] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/07/2020] [Accepted: 09/07/2020] [Indexed: 06/11/2023]
Abstract
A receiver for weak frequency-coded microwave signal reception based on microring resonators array is proposed. This setup uses the nonlinear interaction of a microwave signal and an optical pump to generate an up-conversion signal to achieve the wideband signal reception. The minimum detectable power of this method reaches -93.2 dBm, which is suitable for the detection of weak signals. The results demonstrate a huge power conversion efficiency with η = 4.37×104, a wide conversion bandwidth of 2π×200 MHz, and a large 1-dB compressed dynamic range of 70.2 dB. The receiver can directly use the microwave signal received by the antenna that greatly reduces the volume and power consumption of the detection system. It is highly competitive in microwave photonics radar fields.
Collapse
|
14
|
Zhang Z, Dai Z, Wang Y, Chu C, Su Q, Kosareva O, Zhang N, Lin L, Liu W. Fabricating THz spiral zone plate by high throughput femtosecond laser air filament direct writing. Sci Rep 2020; 10:13965. [PMID: 32811898 PMCID: PMC7434771 DOI: 10.1038/s41598-020-70997-w] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/01/2020] [Accepted: 08/04/2020] [Indexed: 11/09/2022] Open
Abstract
The sixth-generation wireless communication will exploit the radio band with frequencies higher than 90 GHz, reaching terahertz (THz) band, to achieve huge signal bandwidths. However, the cost-effective fabrication methods of the key components in THz band, which can compromise large scale, high precision, and high efficiency, remain great challenges at present. In this work, we have developed a high throughput fabrication method based on the femtosecond laser filament direct writing. The ability of fabricating large-scale THz elements with high precision and fast speed has been demonstrated by fabricating 100 × 100 mm2 spiral zone plates (SZPs), which can convert the Gaussian THz beam into vortex beam. The performance of the obtained THz vortex beam is in good agreement with the theoretical predictions. The fabrication method reported here has promising applications in fabricating various kinds of THz elements on substrates with both flat and curved surfaces.
Collapse
Affiliation(s)
- Zhi Zhang
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China
| | - Zijie Dai
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China
| | - Yunfei Wang
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China
| | - Chunyue Chu
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China
| | - Qiang Su
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China
| | - Olga Kosareva
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China.,International Laser Center, Lomonosov Moscow State University, Moscow, 119991, Russia
| | - Nan Zhang
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China.
| | - Lie Lin
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China
| | - Weiwei Liu
- Institute of Modern Optics, Nankai University, Tianjin, 300350, China.
| |
Collapse
|