Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 µm

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

Ultralarge suspended and perforated graphene membranes for cell culture applications

With its high mechanical strength and its remarkable thermal and electrical properties, suspended graphene has long been expected to find revolutionary applications in optoelectronics or as a membrane in nano-devices. However, the lack of efficient transfer and patterning processes still limits its potential. In this work, we report an optimized anthracene-based transfer process to suspend few layers of graphene (1-, 2- and 4-layers) in the millimeter range (up to 3 mm) with high reproducibility. We have explored the advantages and limitations for patterning of these membranes with micrometer-resolution by focused ion beam (FIB) and picosecond pulsed laser ablation techniques. The FIB approach offers higher patterning resolution but suffers from the low throughput. We demonstrate that cold laser ablation is a fast and flexible method for micro-structuring of suspended graphene. One promising field of application of ultimately thin, microporous graphene membranes is their use as next-generation cell culture supports as alternative to track-etched polymer membranes, which often exhibit poor permeability and limited cell-to-cell communication across the membranes. To this end, we confirmed good adhesion and high viability of placental trophoblast cells cultivated on suspended porous graphene membranes without rupturing of the membranes. Overall, there is high potential for the further development of ultrathin suspended graphene membranes for many future applications, including their use for biobarrier cell culture models to enable predictive transport and toxicity assessment of drugs, environmental pollutants, and nanoparticles.

Significant Enhanced Mechanical Properties of Suspended Graphene Film by Stacking Multilayer CVD Graphene Films

Suspended graphene film is of great significance for building high-performance electrical devices. However, fabricating large-area suspended graphene film with good mechanical properties is still a challenge, especially for the chemical vapor deposition (CVD)-grown graphene films. In this work, the mechanical properties of suspended CVD-grown graphene film are investigated systematically for the first time. It is found that monolayer graphene film is hard to maintain on circular holes with a diameter of tens of micrometers, which can be improved greatly by increasing the layer of graphene films. The mechanical properties of CVD-grown multilayer graphene films suspended on a circular hole with a diameter of 70 µm can be increased by 20%, and multilayer graphene films prepared by layer-layer stacking process can be increased by up to 400% for the same size. The corresponding mechanism was also discussed in detail, which might pave the way for building high-performance electrical devices based on high-strength suspended graphene film.

Nonlinear oscillations, chaotic dynamics, and stability analysis of bilayer graphene-like structures

In this work, we have investigated the nonlinear oscillations and chaotic dynamics of perturbed bilayer graphene-like structures. The potential energy surface (PES) of bilayer graphene-like geometries is obtained by considering interactions of a co-aligned and counter-aligned arrangement of atoms. We studied the dynamics using the Poincaré surface of section for co-aligned hydrofluorinated graphene (HFG) and counter-aligned hexagonal boron nitride (h-BN) and generalized it for other systems using various choices of interaction parameters. The nature of the oscillations is understood via power spectra and the Lyapunov exponents. We found that the PES is very sensitive to the perturbation for all bilayer graphene-like systems. It is seen that the bilayer HFG system displays chaotic oscillations for strong perturbation, while for the h-BN system, the signature of chaos is found for weak perturbation. We have also generalized the work for perturbed bilayer graphene-like geometries, considering different interlayer interactions and the strength of perturbation. We found a signature of transition from regular to quasiperiodic and finally chaotic oscillations tuned via the strength of the perturbation for these geometries. The nature of the equilibrium points for bilayer graphene-like systems is analyzed via Jacobian stability conditions. We found three stable nodes for co-aligned HFG and counter-aligned h-BN systems for all interaction strengths. Though all other nodes are unstable saddle nodes, the signature of a local bifurcation is also found for weak perturbation.

Fabrication of a 100 × 100 mm2 nanometer-thick graphite pellicle for extreme ultraviolet lithography by a peel-off and camphor-supported transfer approach

An extreme ultraviolet (EUV) lithography pellicle is used to physically protect a mask from contaminants during the EUV exposure process and needs to have a high EUV transmittance. The EUV pellicle should be fabricated using a freestanding thin film with several tens of nanometer thickness in an area of 110 × 142 mm², which is a challenging task. Here, we propose a peel-off approach to directly detach the nanometer-thick graphite film (NGF)/Ni film from SiO₂/Si wafer and significantly shorten the etching time of the Ni film. Combined with the residue-damage-free transfer method that used camphor as a supporting layer, we successfully fabricated a large-area (100 × 100 mm²) NGF pellicle with a thickness of ∼20 nm, and an EUV transmittance of ∼87.2%.

A Resonant Graphene NEMS Vibrometer

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

Sensitive Transfer-Free Wafer-Scale Graphene Microphones

During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85-155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa^-1, thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa^-1. The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20-20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.

A lensed fiber Bragg grating-based membrane-in-the-middle optomechanical cavity

Optomechanical systems benefit from the coupling between an optical field and mechanical vibrations. Fiber-based devices are well suited to easily exploit this interaction. We report an alternative approach of a silicon nitride membrane-in-the-middle of a high quality factor ([Formula: see text]-[Formula: see text]) Fabry-Perot, formed by a grating inscribed within a fiber core as an input mirror in front of a dielectric back mirror. The Pound-Drever-Hall technique used to stabilize the laser frequency on the optical resonance frequency allows us to reduce the low frequency noise down to [Formula: see text]. We present a detailed methodology for the characterization of the optical and optomechanical properties of this stabilized system, using various membrane geometries, with corresponding resonance frequencies in the range of several hundred of [Formula: see text]. The excellent long-term stability is illustrated by continuous measurements of the thermomechanical noise spectrum over several days, with the laser source maintained at optical resonance. This major result makes this system an ideal candidate for optomechanical sensing.

Fabrication of extreme ultraviolet lithography pellicle with nanometer-thick graphite film by sublimation of camphor supporting layer

An extreme ultraviolet (EUV) pellicle consists of freestanding thin films on a frame; these films are tens of nanometers in thickness and can include Si, SiN_X, or graphite. Nanometer-thick graphite films (NGFs), synthesized via chemical vapor deposition on a metal catalyst, are used as a pellicle material. The most common method to transfer NGFs onto a substrate or a frame is to use polymethyl methacrylate (PMMA) as a supporting layer. However, this PMMA-mediated technique involves several disadvantages in term of manufacturing NGF EUV pellicles. When removing the PMMA using acetone or O₂plasma, defects or deflections can occur in the NGFs. Furthermore, PMMA residues are generally present on large-area NGFs. In this study, a transfer method using camphor instead of PMMA as the supporting layer was developed to overcome these problems. After the camphor/NGF was formed on the frame, camphor was removed via sublimation in an atmosphere of ethanol vapor. This study investigated the deposition and sublimation of camphor, and confirmed that no residue was present and no deflection or defects were observed in the NGFs. Thus, a large-area NGF pellicle was successfully fabricated using the camphor transfer process.

Large-Size Suspended Mono-Layer Graphene Film Transfer Based on the Inverted Floating Method

Suspended graphene can perfectly present the excellent material properties of graphene, which has a good application prospect in graphene sensors. The existing suspended graphene pressure sensor has several problems that need to be solved, one of which is the fabrication of a suspended sample. It is still very difficult to obtain large-size suspended graphene films with a high integrity that are defect-free. Based on the simulation and analysis of the kinetic process of the traditional suspended graphene release process, a novel setup for large-size suspended graphene release was designed based on the inverted floating method (IFM). The success rate of the single-layer suspended graphene with a diameter of 200 μm transferred on a stainless-steel substrate was close to 50%, which is greatly improved compared with the traditional impregnation method. The effects of the defects and burrs around the substrate cavity on the stress concentration of graphene transfer explain why the transfer success rate of large-size suspended graphene is not high. This research lays the foundation for providing large-size suspended graphene films in the area of graphene high-precision sensors.

Binding Free Energy Calculations of Bilayer Graphenes Using Molecular Dynamics

Bilayer graphenes are dimeric assemblies of single graphene layers bound together by π-complexation interactions. Controlling these assemblies can be complicated, as the layered compounds disperse in solvents or aggregate into higher columnar configurations and clusters. One way to assess the interactions that contribute to the stability of the layered compounds is to use molecular simulation. We perform pulling molecular dynamics on bilayer graphenes with different sizes and obtain the normal and shear force profiles of dissociation. We generate pathways of dissociation along the two directions and calculate the binding free energies of the structures with umbrella sampling simulations. We show that the dissociation process is direction-dependent. Along the shear direction, we compute the same free energy for the different samples, which validates the consistency of our simulations. We notice that the dissociation is less adiabatic on the normal than the shear direction, having an entropic contribution to the Gibbs energy. This contribution is more enhanced for the larger bilayer graphenes.

Effect of the geometry of precursor crucibles on the growth of MoS2 flakes by chemical vapor deposition

Chemical vapor deposition (CVD) employing a furnace with multiple temperature zones is still the best and most widely used method for preparing high-quality MoS₂ flakes.