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For: Dey B, Bulou S, Gaulain T, Ravisy W, Richard-Plouet M, Goullet A, Granier A, Choquet P. Anatase TiO2 deposited at low temperature by pulsing an electron cyclotron wave resonance plasma source. Sci Rep 2020;10:21952. [PMID: 33319806 PMCID: PMC7738520 DOI: 10.1038/s41598-020-78956-1] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/18/2020] [Accepted: 11/27/2020] [Indexed: 01/26/2023]  Open
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