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Antireflection of optical anisotropic dielectric metasurfaces. Sci Rep 2023; 13:1641. [PMID: 36717640 PMCID: PMC9887059 DOI: 10.1038/s41598-023-28619-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/09/2022] [Accepted: 01/20/2023] [Indexed: 01/31/2023] Open
Abstract
We propose a hetero-nano-fin structure to further improve the efficiency of Pancharatnam-Berry phase metasurfaces. Two hetero-nano-fin types, MgF2/GaN and MgF2/Nb2O5, were investigated. The overall polarization conversion efficiency (PCE) improved from 52.7 to 54% for the MgF2/GaN nano-fin compared with the bare GaN nano-fin. The overall PCE of the Nb2O5 nano-fin was 1.7 times higher than that of the GaN nano-fin. The overall PCE improved from 92.4% up to 96% after the application of MgF2 antireflection. Moreover, the antireflection improves efficiency by an average of 4.3% in wavelengths from 450 to 700 nm. Although the increment of energy seems minimal, antireflection is crucial for a metasurface, not only enhancing efficiency but also reducing background signal of a meta-device.
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Hsu WL, Chen YC, Yeh SP, Zeng QC, Huang YW, Wang CM. Review of Metasurfaces and Metadevices: Advantages of Different Materials and Fabrications. NANOMATERIALS 2022; 12:nano12121973. [PMID: 35745310 PMCID: PMC9231017 DOI: 10.3390/nano12121973] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/24/2022] [Revised: 05/29/2022] [Accepted: 06/03/2022] [Indexed: 01/27/2023]
Abstract
Flat optics, metasurfaces, metalenses, and related materials promise novel on-demand light modulation within ultrathin layers at wavelength scale, enabling a plethora of next-generation optical devices, also known as metadevices. Metadevices designed with different materials have been proposed and demonstrated for different applications, and the mass production of metadevices is necessary for metadevices to enter the consumer electronics market. However, metadevice manufacturing processes are mainly based on electron beam lithography, which exhibits low productivity and high costs for mass production. Therefore, processes compatible with standard complementary metal–oxide–semiconductor manufacturing techniques that feature high productivity, such as i-line stepper and nanoimprint lithography, have received considerable attention. This paper provides a review of current metasurfaces and metadevices with a focus on materials and manufacturing processes. We also provide an analysis of the relationship between the aspect ratio and efficiency of different materials.
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Affiliation(s)
- Wei-Lun Hsu
- Department of Optics and Photonics, National Central University, Taoyuan 32001, Taiwan; (W.-L.H.); (Y.-C.C.); (S.P.Y.); (Q.-C.Z.)
| | - Yen-Chun Chen
- Department of Optics and Photonics, National Central University, Taoyuan 32001, Taiwan; (W.-L.H.); (Y.-C.C.); (S.P.Y.); (Q.-C.Z.)
| | - Shang Ping Yeh
- Department of Optics and Photonics, National Central University, Taoyuan 32001, Taiwan; (W.-L.H.); (Y.-C.C.); (S.P.Y.); (Q.-C.Z.)
| | - Qiu-Chun Zeng
- Department of Optics and Photonics, National Central University, Taoyuan 32001, Taiwan; (W.-L.H.); (Y.-C.C.); (S.P.Y.); (Q.-C.Z.)
| | - Yao-Wei Huang
- Department of Photonics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
- Correspondence: (Y.-W.H.); (C.-M.W.)
| | - Chih-Ming Wang
- Department of Optics and Photonics, National Central University, Taoyuan 32001, Taiwan; (W.-L.H.); (Y.-C.C.); (S.P.Y.); (Q.-C.Z.)
- Correspondence: (Y.-W.H.); (C.-M.W.)
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3
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Ichiji N, Kubo A. Resonance-order-dependent plasmon-induced transparency in orthogonally arranged nanocavities. OPTICS LETTERS 2022; 47:265-268. [PMID: 35030583 DOI: 10.1364/ol.446534] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/24/2021] [Accepted: 12/13/2021] [Indexed: 06/14/2023]
Abstract
We investigate plasmon-induced transparency (PIT) in a resonator structure consisting of two orthogonally arranged metal-insulator-metal nanocavities. Finite-difference time- domain simulations reveal that when both cavities in this structure resonate at the same frequency, the PIT effect can be used to induce spectral modulation. This spectral modulation depends on the resonance order of the cavity coupled directly to the external field, as it occurs when first-order resonance is exhibited but not with second-order resonance. We confirmed that this behavior is caused by the discrepancies between odd-order and even-order resonances using classical mechanical models analogous to nanocavities. By tuning the resonance frequency and resonance order of the cavities, one can modulate the spectrum of the resonator structure in an order-selective manner. The resonant order-dependent PIT provides insight into the development of metamaterials that function only at specific resonant orders for incident waves of various bands.
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Tsai WY, Chung TL, Hsiao HH, Chen JW, Lin RJ, Wu PC, Sun G, Wang CM, Misawa H, Tsai DP. Second Harmonic Light Manipulation with Vertical Split Ring Resonators. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2019; 31:e1806479. [PMID: 30549339 DOI: 10.1002/adma.201806479] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/07/2018] [Revised: 11/15/2018] [Indexed: 06/09/2023]
Abstract
The second harmonic generation (SHG) of vertical and planar split-ring resonators (SRRs) that are broken centro-symmetry configurations at the interface of metal surface and air is investigated. Strong interactions, better electromagnetic field confinements, and less leakage into the substrate for vertical SRRs are found. Experimental results show a 2.6-fold enhancement of SHG nonlinearity, which is in good agreement with simulations and calculations. Demonstrations of 3D metastructures and vertical SRRs with strong SHG nonlinearity majorly result from magnetic dipole and electric quadrupole clearly provides potential applications for photonics and sensing.
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Affiliation(s)
- Wei-Yi Tsai
- Research Center for Applied Sciences, Academia Sinica, Taipei, 11529, Taiwan
| | - Tsung Lin Chung
- Department of Physics, National Taiwan University, Taipei, 10617, Taiwan
| | - Hui-Hsin Hsiao
- Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei, 11677, Taiwan
| | - Jia-Wern Chen
- Department of Physics, National Taiwan University, Taipei, 10617, Taiwan
| | - Ren Jie Lin
- Department of Physics, National Taiwan University, Taipei, 10617, Taiwan
| | - Pin Chieh Wu
- Research Center for Applied Sciences, Academia Sinica, Taipei, 11529, Taiwan
| | - Greg Sun
- Department of Engineering, University of Massachusetts at Boston, Boston, MA, 02125, USA
| | - Chih-Ming Wang
- Department of Opto-Electronic Engineering, National Dong Hwa University, Hualien, 97401, Taiwan
| | - Hiroaki Misawa
- Research Institute for Electronic Science, Hokkaido University, Sapporo, 001-0021, Japan
- Center for Emergent Functional Matter Science, National Chiao Tung University, Hsinchu, 30010, Taiwan
| | - Din Ping Tsai
- Research Center for Applied Sciences, Academia Sinica, Taipei, 11529, Taiwan
- Department of Physics, National Taiwan University, Taipei, 10617, Taiwan
- Department of Material Science and Engineering, National Tsing Hua University, 300, Hsinchu, Taiwan
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5
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Su VC, Chu CH, Sun G, Tsai DP. Advances in optical metasurfaces: fabrication and applications [Invited]. OPTICS EXPRESS 2018; 26:13148-13182. [PMID: 29801344 DOI: 10.1364/oe.26.013148] [Citation(s) in RCA: 91] [Impact Index Per Article: 15.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/30/2018] [Accepted: 03/23/2018] [Indexed: 05/23/2023]
Abstract
The research and development of optical metasurfaces has been primarily driven by the curiosity for novel optical phenomena that are unattainable from materials that exist in nature and by the desire for miniaturization of optical devices. Metasurfaces constructed of artificial patterns of subwavelength depth make it possible to achieve flat, ultrathin optical devices of high performance. A wide variety of fabrication techniques have been developed to explore their unconventional functionalities which in many ways have revolutionized the means with which we control and manipulate electromagnetic waves. The relevant research community could benefit from an overview on recent progress in the fabrication and applications of the metasurfaces. This review article is intended to serve that purpose by reviewing the state-of-the-art fabrication methods and surveying their cutting-edge applications.
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Cheng BH, Ye YS, Lan YC, Tsai DP. Temperature tunability of surface plasmon enhanced Smith-Purcell terahertz radiation for semiconductor-based grating. Sci Rep 2017; 7:6443. [PMID: 28743944 PMCID: PMC5527105 DOI: 10.1038/s41598-017-06839-z] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/04/2017] [Accepted: 06/21/2017] [Indexed: 11/18/2022] Open
Abstract
In this work, the terahertz (THz) Smith-Purcell radiations (SPRs) for the relativistic electron bunch passing over an indium antimonide (InSb)-based substrate with a subwavelength grating under various temperatures of substrate are investigated by FDTD simulations and theoretical analyses. The explored SPR is locked and enhanced at a certain emission wavelength with the emission angle still following the wavelength-angle relation of the traditional SPR. This wavelength agrees with the (vacuum) wavelength of surface plasmons (SPs) at the air-InSb interface excited by the electron bunch. The enhancement of SPR at this wavelength is attributed to the energy from electron concentrated in the excited SPs and then transformed into radiation via the SPR mechanism. When the temperature of InSb increases, the emission wavelength of the enhanced SPR decreases along with the emission angles increasing gradually. This work demonstrates that the emission wavelength and angle of the enhanced SPR from the InSb grating can be manipulated by the temperature of InSb. The temperature tunability of SP-enhanced SPR has potential applications in the fields of optical beam steering and metamaterial light source.
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Affiliation(s)
- Bo Han Cheng
- Department of Photonics and Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan, 70101, Taiwan
| | - Yu-Siou Ye
- Department of Photonics and Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan, 70101, Taiwan
| | - Yung-Chiang Lan
- Department of Photonics and Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan, 70101, Taiwan.
| | - Din Ping Tsai
- Research Center for Applied Sciences, Academia Sinica, Taipei, 115, Taiwan. .,Department of Physics, National Taiwan University, Taipei, 10617, Taiwan.
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Alrasheed S, Fabrizio ED. Design and simulation of reflect-array metasurfaces in the visible regime. APPLIED OPTICS 2017; 56:3213-3218. [PMID: 28414383 DOI: 10.1364/ao.56.003213] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Metasurfaces are new, promising ultrathin materials that can enable many novel optical devices due to their ability to act as a discontinuity interface that introduces an abrupt change in amplitude, phase, and sometimes the polarization of the incident light at the wavelength scale. Therefore they can function as flat optical elements. Here, we investigate the anomalous reflection of light for transverse-magnetic (TM) polarization for normal and oblique incidence in the visible regime. We propose gradient phase gap-surface plasmon metasurfaces that exhibit high conversion efficiency (up to ∼97% of total reflected light) to the anomalous reflection angle for blue, green, and red wavelengths at normal and oblique incidence, and where light polarization is unchanged after the reflection.
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Terahertz metamaterials and systems based on rolled-up 3D elements: designs, technological approaches, and properties. Sci Rep 2017; 7:43334. [PMID: 28256587 PMCID: PMC5335716 DOI: 10.1038/srep43334] [Citation(s) in RCA: 34] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/05/2016] [Accepted: 01/25/2017] [Indexed: 11/20/2022] Open
Abstract
Electromagnetic metamaterials opened the way to extraordinary manipulation of radiation. Terahertz (THz) and optical metamaterials are usually fabricated by traditional planar-patterning approaches, while the majority of practical applications require metamaterials with 3D resonators. Making arrays of precise 3D micro- and nanoresonators is still a challenging problem. Here we present a versatile set of approaches to fabrication of metamaterials with 3D resonators rolled-up from strained films, demonstrate novel THz metamaterials/systems, and show giant polarization rotation by several chiral metamaterials/systems. The polarization spectra of chiral metamaterials on semiconductor substrates exhibit ultrasharp quasiperiodic peaks. Application of 3D printing allowed assembling more complex systems, including the bianisotropic system with optimal microhelices, which showed an extreme polarization azimuth rotation of 85° with drop by 150° at a frequency shift of 0.4%. We refer the quasiperiodic peaks in the polarization spectra of metamaterial systems to the interplay of different resonances, including peculiar chiral waveguide resonance. Formed metamaterials cannot be made by any other presently available technology. All steps of presented fabrication approaches are parallel, IC-compatible and allow mass fabrication with scaling of rolled-up resonators up to visible frequencies. We anticipate that the rolled-up meta-atoms will be ideal building blocks for future generations of commercial metamaterials, devices and systems on their basis.
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Huang C, Sun B, Pan W, Cui J, Wu X, Luo X. Dynamical beam manipulation based on 2-bit digitally-controlled coding metasurface. Sci Rep 2017; 7:42302. [PMID: 28176870 PMCID: PMC5296720 DOI: 10.1038/srep42302] [Citation(s) in RCA: 24] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/28/2016] [Accepted: 01/05/2017] [Indexed: 12/03/2022] Open
Abstract
Recently, a concept of digital metamaterials has been proposed to manipulate field distribution through proper spatial mixtures of digital metamaterial bits. Here, we present a design of 2-bit digitally-controlled coding metasurface that can effectively modulate the scattered electromagnetic wave and realize different far-field beams. Each meta-atom of this metasurface integrates two pin diodes, and by tuning their operating states, the metasurface has four phase responses of 0, π/2, π, and 3π/2, corresponding to four basic digital elements “00”, “01”, “10”, and “11”, respectively. By designing the coding sequence of the above digital element array, the reflected beam can be arbitrarily controlled. The proposed 2-bit digital metasurface has been demonstrated to possess capability of achieving beam deflection, multi-beam and beam diffusion, and the dynamical switching of these different scattering patterns is completed by a programmable electric source.
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Affiliation(s)
- Cheng Huang
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Bo Sun
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Wenbo Pan
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Jianhua Cui
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Xiaoyu Wu
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Xiangang Luo
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
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10
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Cheng BH, Chen HW, Jen YJ, Lan YC, Tsai DP. Tunable tapered waveguide for efficient compression of light to graphene surface plasmons. Sci Rep 2016; 6:28799. [PMID: 27353171 PMCID: PMC4926281 DOI: 10.1038/srep28799] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/11/2016] [Accepted: 06/10/2016] [Indexed: 11/25/2022] Open
Abstract
Dielectric-graphene-dielectric (DGD) structure has been widely used to construct optical devices at infrared region with features of small footprint and low-energy dissipation. The optical properties of graphene can be manipulated by changing its chemical potential by applying a biased voltage onto graphene. However, the excitation efficiency of surface wave on graphene by end-fire method is very low because of large wavevector mismatch between infrared light and surface wave. In this paper, a dielectric-semiconductor-dielectric (DSD) tapered waveguide with magnetic tunability for efficient excitation of surface waves on DGD at infrared region is proposed and analyzed. Efficient excitation of surface waves on DGD with various chemical potentials in graphene layer and incident frequencies can be attained by merely changing the external magnetic field applied onto the DSD tapered waveguide. The electromagnetic simulations verify the design of the proposed structure. More importantly, the constituent materials used in the proposed structure are available in nature. This work opens the door toward various applications in the field of using surface waves.
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Affiliation(s)
- Bo Han Cheng
- Department of Electro-Optical Engineering, National Taipei University of Technology, Taipei 106, Taiwan
| | - Hong Wen Chen
- Department of Photonics and Advanced Optoelectronic Technology Center, National Cheng Kung University, Taiwan 70101, Taiwan
| | - Yi-Jun Jen
- Department of Electro-Optical Engineering, National Taipei University of Technology, Taipei 106, Taiwan
| | - Yung-Chiang Lan
- Department of Photonics and Advanced Optoelectronic Technology Center, National Cheng Kung University, Taiwan 70101, Taiwan
| | - Din Ping Tsai
- Research Center for Applied Sciences, Academia Sinica, Taipei 115, Taiwan.,Department of Physics, National Taiwan University, Taipei 10617, Taiwan
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Zhao Y, Cao X, Gao J, Liu X, Li S. Jigsaw puzzle metasurface for multiple functions: polarization conversion, anomalous reflection and diffusion. OPTICS EXPRESS 2016; 24:11208-11217. [PMID: 27409942 DOI: 10.1364/oe.24.011208] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
We demonstrate a simple reconfigurable metasurface with multiple functions. Anisotropic tiles are investigated and manufactured as fundamental elements. Then, the tiles are combined in a certain sequence to construct a metasurface. Each of the tiles can be adjusted independently which is like a jigsaw puzzle and the whole metasurface can achieve diverse functions by different layouts. For demonstration purposes, we realize polarization conversion, anomalous reflection and diffusion by a jigsaw puzzle metasurface with 6 × 6 pieces of anisotropic tile. Simulated and measured results prove that our method offers a simple and effective strategy for metasurface design.
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12
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Huang C, Pan W, Ma X, Luo X. Multi-spectral Metasurface for Different Functional Control of Reflection Waves. Sci Rep 2016; 6:23291. [PMID: 27001206 PMCID: PMC4802343 DOI: 10.1038/srep23291] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/27/2016] [Accepted: 03/03/2016] [Indexed: 12/05/2022] Open
Abstract
Metasurface have recently generated much interest due to its strong manipulation of
electromagnetic wave and its easy fabrication compared to bulky metamaterial. Here,
we propose the design of a multi-spectral metasurface that can achieve beam
deflection and broadband diffusion simultaneously at two different frequency bands.
The metasurface is composed of two-layered metallic patterns backed by a metallic
ground plane. The top-layer metasurface utilizes the cross-line structures with two
different dimensions for producing 0 and π reflection phase response,
while the bottom-layer metasurface is realized by a topological morphing of the
I-shaped patterns for creating the gradient phase distribution. The whole
metasurface is demonstrated to independently control the reflected waves to realize
different functions at two bands when illuminated by a normal linear-polarized wave.
Both simulation and experimental results show that the beam deflection is achieved
at K-band with broadband diffusion at X-Ku band.
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Affiliation(s)
- Cheng Huang
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Wenbo Pan
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Xiaoliang Ma
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
| | - Xiangang Luo
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu 610209, China
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Metasurface-based broadband hologram with high tolerance to fabrication errors. Sci Rep 2016; 6:19856. [PMID: 26818130 PMCID: PMC4730226 DOI: 10.1038/srep19856] [Citation(s) in RCA: 40] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/29/2015] [Accepted: 12/18/2015] [Indexed: 12/19/2022] Open
Abstract
With new degrees of freedom to achieve full control of the optical wavefront, metasurfaces could overcome the fabrication embarrassment faced by the metamaterials. In this paper, a broadband hologram using metasurface consisting of elongated nanoapertures array with different orientations has been experimentally demonstrated. Owing to broadband characteristic of the polarization-dependent scattering, the performance is verified at working wavelength ranging from 405 nm to 914 nm. Furthermore, the tolerance to the fabrication errors, which include the length and width of the elongated aperture, the shape deformation and the phase noise, has been theoretically investigated to be as large as 10% relative to the original hologram. We believe the method proposed here is promising in emerging applications such as holographic display, optical information processing and lithography technology etc.
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