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Han Z, Liu L, Zhang J, Han Q, Wang K, Song H, Wang Z, Jiao Z, Niu S, Ren L. High-performance flexible strain sensor with bio-inspired crack arrays. NANOSCALE 2018; 10:15178-15186. [PMID: 29892757 DOI: 10.1039/c8nr02514b] [Citation(s) in RCA: 45] [Impact Index Per Article: 6.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
Biomimetic sensor technology is always superior to existing human technologies. The scorpion, especially the forest scorpion, has a unique ability to detect subtle vibrations, which is attributed to the microcrack-shaped slit sensillum on its legs. Here, the biological sensing mechanism of the typical scorpion (Heterometrus petersii) was intensively studied in order to newly design and significantly improve the flexible strain sensors. Benefiting from the easy-crack property of polystyrene (PS) and using the solvent-induced swelling as well as double template transferring method, regular and controllable microcrack arrays were successfully fabricated on top of polydimethylsiloxane (PDMS). Using this method, any physical damage to PDMS could be effectively avoided. More fortunately, this bio-inspired crack arrays fabricated in this work also had a radial-like pattern similar to the slit sensillum of the scorpion, which was another unexpected imitation. The gauge factor (GF) of the sensor was conservatively evaluated at 5888.89 upon 2% strain and the response time was 297 ms. Afterward, it was demonstrated that the bio-inspired regular microcrack arrays could also significantly enhance the performance of traditional strain sensors, especially in terms of the sensitivity and response time. The practical applications, such as the detection of human motions and surface folding, were also tested in this work, with the results showing significant potential applications in numerous fields. This work changes the traditional waste cracks on some damaged products into valuable things for ultrasensitive mechanical sensors. Moreover, with this manufacturing technique, we could easily realize the simple, low cost and large-scale fabrication of advanced bioinpired sensors.
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Affiliation(s)
- Zhiwu Han
- Key Laboratory of Bionic Engineering, Ministry of Education, Jilin University, 130022, People's Republic of China.
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Chen X, Zhang L. Review in manufacturing methods of nanochannels of bio-nanofluidic chips. SENSORS AND ACTUATORS B: CHEMICAL 2018; 254:648-659. [DOI: 10.1016/j.snb.2017.07.139] [Citation(s) in RCA: 43] [Impact Index Per Article: 6.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/12/2025]
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3
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Ju HX, Zhuang QK, Long YT. The Preface. J Electroanal Chem (Lausanne) 2016. [DOI: 10.1016/j.jelechem.2016.11.040] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
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Peng R, Li D. Fabrication of polydimethylsiloxane (PDMS) nanofluidic chips with controllable channel size and spacing. LAB ON A CHIP 2016; 16:3767-76. [PMID: 27539019 DOI: 10.1039/c6lc00867d] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/18/2023]
Abstract
The ability to create reproducible and inexpensive nanofluidic chips is essential to the fundamental research and applications of nanofluidics. This paper presents a novel and cost-effective method for fabricating a single nanochannel or multiple nanochannels in PDMS chips with controllable channel size and spacing. Single nanocracks or nanocrack arrays, positioned by artificial defects, are first generated on a polystyrene surface with controllable size and spacing by a solvent-induced method. Two sets of optimal working parameters are developed to replicate the nanocracks onto the polymer layers to form the nanochannel molds. The nanochannel molds are used to make the bi-layer PDMS microchannel-nanochannel chips by simple soft lithography. An alignment system is developed for bonding the nanofluidic chips under an optical microscope. Using this method, high quality PDMS nanofluidic chips with a single nanochannel or multiple nanochannels of sub-100 nm width and height and centimeter length can be obtained with high repeatability.
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Affiliation(s)
- Ran Peng
- Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ontario, N2L 3G Canada.
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Suh YD, Yeo J, Lee H, Hong S, Kwon J, Kim K, Ko SH. Control and Manipulation of Nano Cracks Mimicking Optical Wave. Sci Rep 2015; 5:17292. [PMID: 26612107 PMCID: PMC4661517 DOI: 10.1038/srep17292] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/14/2015] [Accepted: 10/28/2015] [Indexed: 11/09/2022] Open
Abstract
Generally, a fracture is considered as an uncontrollable thus useless phenomenon due to its highly random nature. The aim of this study is to investigate highly ordered cracks such as oscillatory cracks and to manipulate via elaborate control of mechanical properties of the cracking medium including thickness, geometry, and elastic mismatch. Specific thin film with micro-sized notches was fabricated on a silicon based substrate in order to controllably generate self-propagating cracks in large area. Interestingly, various nano-cracks behaved similar to optical wave including refraction, total internal reflection and evanescent wave. This novel phenomena of controlled cracking was used to fabricate sophisticated nano/micro patterns in large area which cannot be obtained even with conventional nanofabrication methods. We also have showed that the cracks are directly implementable into a nano/micro-channel application since the cracks naturally have a form of channel-like shape.
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Affiliation(s)
- Young D Suh
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K)
| | - Junyeob Yeo
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K).,Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, USA
| | - Habeom Lee
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K)
| | - Sukjoon Hong
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K)
| | - Jinhyeong Kwon
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K)
| | - Kyunkyu Kim
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K)
| | - Seung Hwan Ko
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea (R.O.K)
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Abstract
Preconcentration of biomolecules by electrokinetic trapping at the nano/microfluidic interface has been extensively studied due to its significant efficiency. Conventionally, sample preconcentration takes place in continuous flow and therefore suffers from diffusion and dispersion. Encapsulation of the preconcentrated sample into isolated droplets offers a superior way to preserve the sample concentration for further analysis. Nevertheless, the rationale for an optimal design to obviate the sample dilution prior to encapsulation is still lacking. Herein, we propose a pressure-assisted strategy for positioning the concentrated sample plug directly at the ejecting nozzle, which greatly eliminates the concentration decline during sample ejection. A distinctive mechanism for this plug localization was elucidated by two-dimensional numerical simulations. Based on the simulation results, we developed an on-demand nanofluidic concentrator in which the nanochannels were facilely generated through lithography-free nanocracking on a polystyrene substrate. By wisely implementing an on-demand droplet generation module, our system can adaptively encapsulate the highly concentrated sample and effectively enhance the long-term stability. We experimentally demonstrated the preconcentration of a fluorescently labelled biomolecule, bovine serum albumin (BSA), by using an amplification factor of 10(4). We showed that, by adjusting the applied voltage, accumulation time, and pulsed pressure imposed on the control microchannel, our system can generate a droplet of the desired volume with a target sample concentration at a prescribed time. This study not only provides insights into the previously unidentified role of assisted pressure in sample positioning, but also offers an avenue for varied requirements in low-abundance biomolecule detection and analysis.
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Affiliation(s)
- Miao Yu
- Bioengineering Graduate Program, Biomedical Engineering Division, The Hong Kong University of Science and Technology, Hong Kong, China.
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Peng R, Li D. Fabrication of nanochannels on polystyrene surface. BIOMICROFLUIDICS 2015; 9:024117. [PMID: 25945143 PMCID: PMC4401800 DOI: 10.1063/1.4918643] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/02/2015] [Accepted: 04/08/2015] [Indexed: 05/14/2023]
Abstract
Solvent-induced nanocrack formation on polystyrene surface is investigated experimentally. Solubility parameter and diffusion coefficient of alcohols are employed to elucidate the swelling and cracking processes as well as the crack size. Experimental results show that the crack size increases with the heating temperature, heating time, and the concentration and volume of the alcohols. A guideline on fabricating single smaller nanocracks on polymers by solvent-induced method is provided. Nanocracks of approximately 64 nm in width and 17.4 nm in depth were created and replicated onto PDMS (polydimethylsiloxane) slabs to form nanochannels.
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Affiliation(s)
- Ran Peng
- Department of Mechanical and Mechatronics Engineering, University of Waterloo , Waterloo, Ontario N2L 3G1, Canada
| | - Dongqing Li
- Department of Mechanical and Mechatronics Engineering, University of Waterloo , Waterloo, Ontario N2L 3G1, Canada
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Rapid, single-molecule assays in nano/micro-fluidic chips with arrays of closely spaced parallel channels fabricated by femtosecond laser machining. SENSORS 2014; 14:15400-14. [PMID: 25140634 PMCID: PMC4178987 DOI: 10.3390/s140815400] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/16/2014] [Revised: 08/08/2014] [Accepted: 08/18/2014] [Indexed: 12/24/2022]
Abstract
Cost-effective pharmaceutical drug discovery depends on increasing assay throughput while reducing reagent needs. To this end, we are developing an ultrasensitive, fluorescence-based platform that incorporates a nano/micro-fluidic chip with an array of closely spaced channels for parallelized optical readout of single-molecule assays. Here we describe the use of direct femtosecond laser machining to fabricate several hundred closely spaced channels on the surfaces of fused silica substrates. The channels are sealed by bonding to a microscope cover slip spin-coated with a thin film of poly(dimethylsiloxane). Single-molecule detection experiments are conducted using a custom-built, wide-field microscope. The array of channels is epi-illuminated by a line-generating red diode laser, resulting in a line focus just a few microns thick across a 500 micron field of view. A dilute aqueous solution of fluorescently labeled biomolecules is loaded into the device and fluorescence is detected with an electron-multiplying CCD camera, allowing acquisition rates up to 7 kHz for each microchannel. Matched digital filtering based on experimental parameters is used to perform an initial, rapid assessment of detected fluorescence. More detailed analysis is obtained through fluorescence correlation spectroscopy. Simulated fluorescence data is shown to agree well with experimental values.
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Kim BC, Moraes C, Huang J, Thouless M, Takayama S. Fracture-based micro- and nanofabrication for biological applications. Biomater Sci 2014; 2:288-296. [PMID: 24707353 PMCID: PMC3972810 DOI: 10.1039/c3bm60276a] [Citation(s) in RCA: 24] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/09/2023]
Abstract
While fracture is generally considered to be undesirable in various manufacturing processes, delicate control of fracture can be successfully implemented to generate structures at micro/nano length scales. Fracture-based fabrication techniques can serve as a template-free manufacturing method, and enables highly-ordered patterns or fluidic channels to be formed over large areas in a simple and cost-effective manner. Such technologies can be leveraged to address biologically-relevant problems, such as in the analysis of biomolecules or in the design of culture systems that imitate the cellular or molecular environment. This mini review provides an overview of current fracture-guided fabrication techniques and their biological applications. We first survey the mechanical principles of fracture-based approaches. Then we describe biological applications at the cellular and molecular levels. Finally, we discuss unique advantages of the different system for biological studies.
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Affiliation(s)
- Byoung Choul Kim
- Department of Biomedical Engineering, College of Engineering, University of Michigan, 2200 Bonisteel Blvd, Ann Arbor, MI 48109, USA
- Macromolecular Science and Engineering Center, College of Engineering, University of Michigan, 2300 Hayward St., Ann Arbor, MI 48109, USA
| | - Christopher Moraes
- Department of Biomedical Engineering, College of Engineering, University of Michigan, 2200 Bonisteel Blvd, Ann Arbor, MI 48109, USA
| | - Jiexi Huang
- Department of Mechanical Engineering, College of Engineering, University of Michigan, 2350 Hayward St., Ann Arbor, MI 48109, USA
| | - M.D. Thouless
- Department of Mechanical Engineering, College of Engineering, University of Michigan, 2350 Hayward St., Ann Arbor, MI 48109, USA
- Department of Materials Science & Engineering, College of Engineering, University of Michigan, 2300 Hayward St., Ann Arbor, MI 48109, USA
| | - Shuichi Takayama
- Department of Biomedical Engineering, College of Engineering, University of Michigan, 2200 Bonisteel Blvd, Ann Arbor, MI 48109, USA
- Macromolecular Science and Engineering Center, College of Engineering, University of Michigan, 2300 Hayward St., Ann Arbor, MI 48109, USA
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XU Z, LI YK, WANG JY, LIU C, LIU JS, CHEN L, WANG LD. A Novel Method for Fabrication of Micro-Nanofluidic Devices and Its Application in Trace Enrichment. CHINESE JOURNAL OF ANALYTICAL CHEMISTRY 2014. [DOI: 10.1016/s1872-2040(13)60707-0] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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11
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Dorfman KD, King SB, Olson DW, Thomas JDP, Tree DR. Beyond gel electrophoresis: microfluidic separations, fluorescence burst analysis, and DNA stretching. Chem Rev 2013; 113:2584-667. [PMID: 23140825 PMCID: PMC3595390 DOI: 10.1021/cr3002142] [Citation(s) in RCA: 141] [Impact Index Per Article: 11.8] [Reference Citation Analysis] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/18/2022]
Affiliation(s)
- Kevin D. Dorfman
- Department of Chemical Engineering and Materials Science, University of Minnesota — Twin Cities, 421 Washington Ave. SE, Minneapolis, MN 55455, Phone: 1-612-624-5560. Fax: 1-612-626-7246
| | - Scott B. King
- Department of Chemical Engineering and Materials Science, University of Minnesota — Twin Cities, 421 Washington Ave. SE, Minneapolis, MN 55455, Phone: 1-612-624-5560. Fax: 1-612-626-7246
| | - Daniel W. Olson
- Department of Chemical Engineering and Materials Science, University of Minnesota — Twin Cities, 421 Washington Ave. SE, Minneapolis, MN 55455, Phone: 1-612-624-5560. Fax: 1-612-626-7246
| | - Joel D. P. Thomas
- Department of Chemical Engineering and Materials Science, University of Minnesota — Twin Cities, 421 Washington Ave. SE, Minneapolis, MN 55455, Phone: 1-612-624-5560. Fax: 1-612-626-7246
| | - Douglas R. Tree
- Department of Chemical Engineering and Materials Science, University of Minnesota — Twin Cities, 421 Washington Ave. SE, Minneapolis, MN 55455, Phone: 1-612-624-5560. Fax: 1-612-626-7246
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Rahmanian O, DeVoe DL. Pen microfluidics: rapid desktop manufacturing of sealed thermoplastic microchannels. LAB ON A CHIP 2013; 13:1102-8. [PMID: 23344819 PMCID: PMC3582333 DOI: 10.1039/c2lc41057e] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/20/2023]
Abstract
A unique technique for the rapid fabrication of thermoplastic microfluidic chips is described. The method enables the realization of fully-sealed microchannels in around one hour while requiring only minimal infrastructure by taking advantage of a solvent swelling mechanism that allows raised features to be patterned on the surface of homogeneous thermoplastic materials. Patterning is achieved without photolithography by simply drawing the desired microchannel pattern onto the polymer surface using a suitable ink as a masking layer, either manually or under robotic control, followed by timed exposure to solvent vapor to yield a desired depth for the masked channel features. The channels are then permanently sealed through solvent bonding of the microchannel chip to a mating thermoplastic substrate. The process is demonstrated using cyclic olefin copolymer as a thermoplastic material, with fully operational microfluidic devices fabricated following a true desktop manufacturing model suitable for rapid prototyping.
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Affiliation(s)
- Omid Rahmanian
- Department of Bioengineering, University of Maryland, College Park MD 20742, USA
| | - Don L. DeVoe
- Department of Bioengineering, University of Maryland, College Park MD 20742, USA
- Department of Mechanical Engineering, University of Maryland, College Park MD 20742, USA
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13
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Duan C, Wang W, Xie Q. Review article: Fabrication of nanofluidic devices. BIOMICROFLUIDICS 2013; 7:26501. [PMID: 23573176 PMCID: PMC3612116 DOI: 10.1063/1.4794973] [Citation(s) in RCA: 121] [Impact Index Per Article: 10.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/26/2012] [Accepted: 02/26/2013] [Indexed: 05/07/2023]
Abstract
Thanks to its unique features at the nanoscale, nanofluidics, the study and application of fluid flow in nanochannels/nanopores with at least one characteristic size smaller than 100 nm, has enabled the occurrence of many interesting transport phenomena and has shown great potential in both bio- and energy-related fields. The unprecedented growth of this research field is apparently attributed to the rapid development of micro/nanofabrication techniques. In this review, we summarize recent activities and achievements of nanofabrication for nanofluidic devices, especially those reported in the past four years. Three major nanofabrication strategies, including nanolithography, microelectromechanical system based techniques, and methods using various nanomaterials, are introduced with specific fabrication approaches. Other unconventional fabrication attempts which utilize special polymer properties, various microfabrication failure mechanisms, and macro/microscale machining techniques are also presented. Based on these fabrication techniques, an inclusive guideline for materials and processes selection in the preparation of nanofluidic devices is provided. Finally, technical challenges along with possible opportunities in the present nanofabrication for nanofluidic study are discussed.
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Affiliation(s)
- Chuanhua Duan
- Department of Mechanical Engineering, Boston University, 110 Cummington Street, Boston, Massachusetts 02215, USA
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Xia D, Yan J, Hou S. Fabrication of nanofluidic biochips with nanochannels for applications in DNA analysis. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2012; 8:2787-801. [PMID: 22778064 DOI: 10.1002/smll.201200240] [Citation(s) in RCA: 59] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/01/2012] [Revised: 03/19/2012] [Indexed: 05/15/2023]
Abstract
With the development of nanotechnology, great progress has been made in the fabrication of nanochannels. Nanofluidic biochips based on nanochannel structures allow biomolecule transport, bioseparation, and biodetection. The domain applications of nanofluidic biochips with nanochannels are DNA stretching and separation. In this Review, the general fabrication methods for nanochannel structures and their applications in DNA analysis are discussed. These representative fabrication approaches include conventional photolithography, interference lithography, electron-beam lithography, nanoimprint lithography and polymer nanochannels. Other nanofabrication methods used to fabricate unique nanochannels, including sub-10-nm nanochannels, single nanochannels, and vertical nanochannels, are also mentioned. These nanofabrication methods provide an effective way to form nanoscale channel structures for nanofluidics and biosensor devices for DNA separation, detection, and sensing. The broad applications of nanochannels and future perspectives are also discussed.
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Affiliation(s)
- Deying Xia
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA.
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Wu ZY, Li CY, Guo XL, Li B, Zhang DW, Xu Y, Fang F. Nanofracture on fused silica microchannel for Donnan exclusion based electrokinetic stacking of biomolecules. LAB ON A CHIP 2012; 12:3408-12. [PMID: 22785610 DOI: 10.1039/c2lc40571g] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/15/2023]
Abstract
Due to Donnan exclusion, charged molecules are prohibited from passing through a channel of electrical double layer scale (nanometers), even though the molecules are smaller than the lowest dimension of the channel. To employ this effect for on-chip pre-concentration, an ion channel of nanometer scale has to be introduced. Here we introduced a simple method of generating a fracture (11-250 nm) directly on the commercially available open tubular fused silica capillary, and a chip comprised of the capillary with the nanofracture was prepared. A ring-disk model of the fracture was derived with which the fracture width can be easily characterized online without any damage to the chip, and the result was validated by a scanning electron microscope (SEM). The fractures can be used directly as a nanofluidic interface exhibiting an obvious ion concentration polarization effect with high current flux. On-chip electrokinetic stacking of SYBR Green I labeled λDNA inside the capillary was successfully demonstrated, and a concentration factor close to the amplification rate of the polymerase chain reaction (PCR) was achieved within 7 min. The chip is inexpensive and easy to prepare in common chemistry and biochemistry laboratories without limitations in expensive microfabrication facilities and sophisticated expertise. More applications of this interface could be found for enhancing the detectability of capillary based microfluidic analytical systems for the analysis of low concentrated charged species.
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Affiliation(s)
- Zhi-Yong Wu
- Research Center for Analytical Sciences, Northeastern University, Shenyang, China.
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16
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Wu ZY, Fang F, He YQ, Li TT, Li JJ, Tian L. Flexible and Efficient Eletrokinetic Stacking of DNA and Proteins at an HF Etched Porous Junction on a Fused Silica Capillary. Anal Chem 2012; 84:7085-91. [DOI: 10.1021/ac301364j] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Zhi-Yong Wu
- Research
Center for Analytical Sciences, ‡Chemistry Department, Northeastern University, Shenyang 110819, PR China
| | - Fang Fang
- Research
Center for Analytical Sciences, ‡Chemistry Department, Northeastern University, Shenyang 110819, PR China
| | - Yan-Qin He
- Research
Center for Analytical Sciences, ‡Chemistry Department, Northeastern University, Shenyang 110819, PR China
| | - Ting-Ting Li
- Research
Center for Analytical Sciences, ‡Chemistry Department, Northeastern University, Shenyang 110819, PR China
| | - Jing-Jing Li
- Research
Center for Analytical Sciences, ‡Chemistry Department, Northeastern University, Shenyang 110819, PR China
| | - Li Tian
- Research
Center for Analytical Sciences, ‡Chemistry Department, Northeastern University, Shenyang 110819, PR China
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Xu BY, Yan XN, Zhang JD, Xu JJ, Chen HY. Glass etching to bridge micro- and nanofluidics. LAB ON A CHIP 2012; 12:381-386. [PMID: 22068964 DOI: 10.1039/c1lc20741e] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
In this study, a simple and economical fabrication technique bridging micro- and nanostructures is proposed. Glass molds with micro-nanostructures are fabricated by glass microlithography. The microlithography provides flexibility for structure design, and the glass etching contributes to transform the micro glass ridge to the nanoscale. Glass ridge structures with triangular cross sections are generated by undercutting, which coupled the isotropic character of glass and the shield effect of the top Cr layer upon HF etching. Further etching induced the height of the glass ridges to shrink from micro- to nanometres due to the edge effects. At the late etching stage, the geometrical change of the glass greatly slows down, which gives better control over the size of the glass ridge. By glass structure mold-copy, well repeatable, mechanically stable and tunable polydimethylsiloxane (PDMS) channels and cones are fabricated. Scanning electron microscopy (SEM) and laser interferometry (LI) are carried out to characterize the micro-nanostructures. To demonstrate their workability, sample preconcentration to a single nanochannel level is carried out.
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Affiliation(s)
- Bi-Yi Xu
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093, China
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LIU WM, LI L, REN L, WANG JC, TU Q, WANG XQ, WANG JY. Diversification of Microfluidic Chip for Applications in Cell-Based Bioanalysis. CHINESE JOURNAL OF ANALYTICAL CHEMISTRY 2012. [DOI: 10.1016/s1872-2040(11)60519-7] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/09/2023]
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Chantiwas R, Park S, Soper SA, Kim BC, Takayama S, Sunkara V, Hwang H, Cho YK. Flexible fabrication and applications of polymer nanochannels and nanoslits. Chem Soc Rev 2011; 40:3677-702. [PMID: 21442106 PMCID: PMC4773912 DOI: 10.1039/c0cs00138d] [Citation(s) in RCA: 78] [Impact Index Per Article: 5.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/01/2023]
Abstract
Fluidic devices that employ nanoscale structures (<100 nm in one or two dimensions, slits or channels, respectively) are generating great interest due to the unique properties afforded by this size domain compared to their micro-scale counterparts. Examples of interesting nanoscale phenomena include the ability to preconcentrate ionic species at extremely high levels due to ion selective migration, unique molecular separation modalities, confined environments to allow biopolymer stretching and elongation and solid-phase bioreactions that are not constrained by mass transport artifacts. Indeed, many examples in the literature have demonstrated these unique opportunities, although predominately using glass, fused silica or silicon as the substrate material. Polymer microfluidics has established itself as an alternative to glass, fused silica, or silicon-based fluidic devices. The primary advantages arising from the use of polymers are the diverse fabrication protocols that can be used to produce the desired structures, the extensive array of physiochemical properties associated with different polymeric materials, and the simple and robust modification strategies that can be employed to alter the substrate's surface chemistry. However, while the strengths of polymer microfluidics is currently being realized, the evolution of polymer-based nanofluidics has only recently been reported. In this critical review, the opportunities afforded by polymer-based nanofluidics will be discussed using both elastomeric and thermoplastic materials. In particular, various fabrication modalities will be discussed along with the nanometre size domains that they can achieve for both elastomer and thermoplastic materials. Different polymer substrates that can be used for nanofluidics will be presented along with comparisons to inorganic nanodevices and the consequences of material differences on the fabrication and operation of nanofluidic devices (257 references).
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Affiliation(s)
- Rattikan Chantiwas
- Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803, USA
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