Surface passivation of a photonic crystal band-edge laser by atomic layer deposition of SiO2 and its application for biosensing

29 GHz single-mode vertical-cavity surface-emitting lasers passivated by atomic layer deposition

The fabrication processes of high-speed oxide-confined single-mode (SM)-vertical-cavity surface-emitting lasers (VCSELs) are complex, costly, and often held back by reliability and yield issues, which substantially set back the high-volume processing and mass commercialization of SM-VCSELs in datacom or other applications. In this article, we report the effects of Al₂O₃ passivation films deposited by atomic layer deposition (ALD) on the mesa sidewalls of high-speed 850-nm SM-VCSELs. The ALD-deposited film alleviates the trapping of carriers by sidewall defects and is an effective way to improve the performance of SM-VCSELs. The ALD-passivated SM-VCSELs showed statistically significant static performance improvements and reached a believed to be record-breaking SM-modulation bandwidth of 29.1 GHz. We also propose an improved microwave small-signal equivalent circuit model for SM-VCSELs that accounts for the losses attributed to the mesa sidewalls. These findings demonstrate that ALD passivation can mitigate processing-induced surface damage, enhance the performance of SM-VCSELs, and enable mass production of high-quality SM-VCSELs for mid- to long-reach optical interconnects.

pH-sensitive GaInAsP photonic crystal fractal band-edge laser

The light emission characteristics of GaInAsP semiconductors in aqueous solutions are modified by the surface charge, depending on the balance between radiative and nonradiative recombination. This Letter demonstrates the application of a GaInAsP photonic crystal band-edge laser in sensing a solution pH, which reflects the surface charge. The sensitivity is enhanced by a hybrid of fractal honeycomb and close-packed structures with a large surface-to-volume ratio and a high quality factor (Q), which allows a low threshold carrier density. We experimentally obtained a maximum pH sensitivity of 1.9 dB/pH near the threshold and a signal-to-noise ratio of 52/pH (pH resolution of 0.019) at a pump power 2.4 times the threshold where the intensity noise diminished.

Atomic layer deposition SiO2 films over dental ZrO2 towards strong adhesive to resin

Atomic layer deposition (ALD) is a self-limiting nanoscale film deposition technology with the advantages of good stability, consistency and conformability. In this study, we proposed to deposit silica (SiO₂) films over dental zirconium-oxide (ZrO₂) by ALD for better SiO₂ films and higher bond strength between ZrO₂ and resin. To investigate the superiority of film deposited by ALD, other surface modification methods such as sol-gel, vapor phase hydrolysis and electrostatic self-assembly were compared in terms of the short-term and long-term bond strength between ZrO₂ and resin, measured by universal testing machine. Meanwhile, the surface morphology and chemical elemental analysis were characterized by scanning electron microscopy (SEM), energy dispersive spectrometer (EDS) and Fourier transform infrared spectroscopy (FTIR). Results showed that the SiO₂ films deposited by ALD or electrostatic self-assembly were uniform and consistent while sol-gel and vapor phase hydrolysis formed SiO₂ films with cracks or pores, changing the morphology of ZrO₂. ALD had the best results among all methods and increased the bond strength to 16.49 ± 1.60 MPa and 13.44 ± 1.63 MPa before and after aging respectively, which is expected to improve the long-term success rate of clinical dental ZrO₂ prostheses.

Self-aligned nanoislands nanobeam bandedge lasers

We propose and demonstrate a novel one-dimensional nanobeam bandedge laser constituted by self-aligned nanoisland quantum-well (QW) structures. The formation of self-aligned InGaAsP nanoislands sandwiched between two InP claddings is the result of selective removal of QW through wet-etching processes. By controlling wet-etching time, we show a good spatial and spectral overlap between the dielectric mode and the self-aligned nanoisland structures leads to the realization of nanobeam bandedge lasers with low-threshold operations and high slope efficiencies. Optical characterization results indicate a strong correlation between the size of individual nanoisland and the threshold power of our nanobeam bandedge lasers. We obtain an approximately 81% reduction in the absorbed threshold power as we optimize the size of the nanoislands.