Leak-tight vertical membrane microvalves

Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels

Simple microfluidic systems for handling large particles such as three-dimensional (3D) cultured cells, microcapsules, and animalcules have contributed to the advancement of biology. However, obtaining a highly integrated microfluidic device for handling large particles is difficult because there are no suitable microvalves for deep microchannels. Therefore, this study proposes a microvalve with a trapezoid-shaped cross-section to close a deep microchannel. The proposed microvalve can close a 350 μm deep microchannel, which is suitable for handling hundreds of micrometer-scale particles. A double-inclined lithography process was used to fabricate the trapezoid-shaped cross-section. The microvalve was fabricated by bonding three polydimethylsiloxane layers: a trapezoid-shaped liquid channel layer, a membrane, and a pneumatic channel layer. The pneumatic balloon, consisting of the membrane and the pneumatic channel, was located beneath a trapezoid-shaped cross-section microchannel. The valve was operated by the application of pneumatic pressure to the pneumatic channel. We experimentally confirmed that the expansion of the pneumatic balloon could close the 350 μm deep microchannel.

A Review of Passive Constant Flow Regulators for Microfluidic Applications

This review gives an overview of passive constant flow regulators dedicated to microfluidic applications. Without external control and energy consumption, these devices deliver a constant flow rate regardless of pressure variations, making them very attractive for various microfluidic applications, including drug delivery, flow chemistry, point-of-care tests, or microdialysis. This technical review examines progress over the last three decades in the development of these flow regulators and focuses on the working principle, fabrication methods, performance, and potential applications.

Dielectrowetting manipulation for digital microfluidics: creating, transporting, splitting, and merging of droplets

Generating, splitting, transporting, and merging droplets are fundamental and critical unit operations for digital (droplet-based) microfluidics. State-of-the-art digital microfluidics performs such operations commonly using electrowetting-on-dielectric (EWOD) in the typical configuration of two parallel channel plates. This paper presents such operations using dielectrowetting (derived from liquid dielectrophoresis), not EWOD, with an array of interdigitated electrodes. The major and unique feature is that the present droplet manipulations are effective for conductive (water with/without surfactant) and non-conductive (propylene carbonate) fluids. An equally important aspect is that the manipulations are performed in an open space without the covering top plate. This behavior is attributed to the intrinsic nature of dielectrowetting to generate stronger wetting forces than EWOD (with the ability to achieve complete wetting with contact angle = 0° to form a thin film). Using dielectrowetting, micro-droplets of various volumes are created from a large droplet and transported. Splitting a single droplet as well as multiple droplets and merging them are also achieved, even when the droplets are smaller than the electrode pads. The above splitting, transport, and merging operations are effective for propylene carbonate as well as DI water with/without surfactant, though the creating operation is proven only for propylene carbonate at this moment. All the above manipulations are successfully carried out on a single plate, which not only simplifies the structure and operation procedure, but could also eliminate the restriction to the volume of fluid handled.

Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography

We used inclined lithography to fabricate a pneumatic microvalve for tall microchannels such as those used to convey large cells. The pneumatic microvalve consists of three layers. The upper layer is the actual liquid microchannel, which has a parallelogram-shaped cross section of width 500 μm, height 100 μm, and an acute angle of 53.6°. The lower layer is a pneumatic microchannel that functions as an actuator, and the middle layer is a thin polydimethylsiloxane membrane between the upper and lower layers. The operation of the pneumatic microchannel actuator causes the thin membrane to bend, resulting in the bending of the liquid microchannel and its closure. It was confirmed that the closure of the liquid microchannel completely stopped the flow of the HeLa cell suspension that was used to demonstrate the operation of the microvalve. The HeLa cells that passed through the microchannel were also observed to retain their proliferation and morphological properties.

Fabrication of complex PDMS microfluidic structures and embedded functional substrates by one-step injection moulding

We report a novel injection moulding technique for fabrication of complex multi-layer microfluidic structures, allowing one-step robust integration of functional components with microfluidic channels and fabrication of elastomeric valves.