Self-adjusted all-dielectric metasurfaces for deep ultraviolet femtosecond pulse generation

Rapid Electrohydrodynamic-Driven Pattern Replication over a Large Area via Ultrahigh Voltage Pulses

Despite the prospects of electrohydrodynamic instability patterning (EHIP), poor process parameter controllability is a significant challenge in uniform large-scale nanopatterning. Herein, we introduce a EHIP process using an ultrahigh electric field (>108 V/m) to effectively accelerate the pattern growth evolution. Owing to the strong dependence on a temporal parameter (1/τm) of the field strength, our method not only reduces the completion time of pattern growth but also overcomes critical parametric restrictions on the pattern replication, thereby enhancing the replicated pattern quality in three dimensions. The pattern can be uniformly replicated over the entire film surface even without a perfectly uniform air gap, which has been severely difficult in the conventional method. To further demonstrate how straightforward yet versatile our approach is, we applied our EHIP approach to successfully replicate the densely packed nanostructures of cicada wings.

Universal Narrowband Wavefront Shaping with High Quality Factor Meta-Reflect-Arrays

Optical metasurfaces offer unprecedented flexibility in light wave manipulation but suffer weak resonant enhancement. Tackling this problem, we experimentally unveil a new phase gradient metasurface platform made entirely from individually addressable high quality factor (high-Q) silicon meta-atoms. Composed of pairs of nearly identical nanoblocks, these meta-atoms support dipolar-guided-mode resonances that, due to the controlled suppression of radiation loss, serve as highly sensitive phase pixels when placed above a mirror. A key novelty of this platform lies in the vanishingly small structural perturbations needed to produce universal phase fronts. Having fabricated elements with Q-factor ∼380 and spaced by λ/1.2, we achieve strong beam steering, up to 59% efficient, to angles 32.3°, 25.3°, and 20.9°, with variations in nanoantenna volume fractions across the metasurfaces of ≤2.6%, instead of >50% required by traditional versions. Aside from extreme sensitivity, the metasurfaces exhibit near-field intensity enhancement over 1000×. Taken together, these properties represent an exciting prospect for dynamic and nonlinear wave shaping.

Self-Aligned Plasmonic Lithography for Maskless Fabrication of Large-Area Long-Range Ordered 2D Nanostructures

This paper proposes a one-step maskless 2D nanopatterning approach named self-aligned plasmonic lithography (SPL) by line-shaped ultrafast laser ablation under atmospheric conditions for the first time. Through a theoretical calculation of electric field and experimental verification, we proved that homogeneous interference of laser-excited surface plasmon polaritons (SPPs) can be achieved and used to generate long-range ordered 2D nanostructures in a self-aligned way over a wafer-sized area within several minutes. Moreover, the self-aligned nanostructures can be freely transferred between embossed nanopillars and engraved nanoholes by modulating the excitation intensity of SPPs interference through altering the incident laser energy. The SPL technique exhibits further controllability in the shape, orientation, and period of achievable nanopatterns on a wide range of semiconductors and metals by tuning processing parameters. Nanopatterned films can further act as masks to transfer structures into other bulk materials, as demonstrated in silica.

Femtosecond Laser Fabrication of Hybrid Metal-Dielectric Structures with Nonlinear Photoluminescence

Fabrication of hybrid micro- and nanostructures with a strong nonlinear response is challenging and represents a great interest due to a wide range of photonic applications. Usually, such structures are produced by quite complicated and time-consuming techniques. This work demonstrates laser-induced hybrid metal-dielectric structures with strong nonlinear properties obtained by a single-step fabrication process. We determine the influence of several incident femtosecond pulses on the Au/Si bi-layer film on produced structure morphology. The created hybrid systems represent isolated nanoparticles with a height of 250–500 nm exceeding the total thickness of the Au-Si bi-layer. It is shown that fabricated hybrid nanostructures demonstrate enhancement of the SHG signal (up to two orders of magnitude) compared to the initial planar sample and a broadband photoluminescence signal (more than 200 nm in width) in the visible spectral region. We establish the correlation between nonlinear signal and phase composition provided by Raman scattering measurements. Such laser-induced structures have significant potential in optical sensing applications and can be used as components for different nanophotonic devices.

Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses

Amorphous silicon (α-Si) film present an inexpensive and promising material for optoelectronic and nanophotonic applications. Its basic optical and optoelectronic properties are known to be improved via phase transition from amorphous to polycrystalline phase. Infrared femtosecond laser radiation can be considered to be a promising nondestructive and facile way to drive uniform in-depth and lateral crystallization of α-Si films that are typically opaque in UV-visible spectral range. However, so far only a few studies reported on use of near-IR radiation for laser-induced crystallization of α-Si providing less information regarding optical properties of the resultant polycrystalline Si films demonstrating rather high surface roughness. The present work demonstrates efficient and gentle single-pass crystallization of α-Si films induced by their direct irradiation with near-IR femtosecond laser pulses coming at sub-MHz repetition rate. Comprehensive analysis of morphology and composition of laser-annealed films by atomic-force microscopy, optical, micro-Raman and energy-dispersive X-ray spectroscopy, as well as numerical modeling of optical spectra, confirmed efficient crystallization of α-Si and high-quality of the obtained films. Moreover, we highlight localized laser-induced crystallization of α-Si as a promising way for optical information encryption, anti-counterfeiting and fabrication of micro-optical elements.

Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications

Here, we applied direct laser-induced periodic surface structuring to drive the phase transition of amorphous silicon (a-Si) into nanocrystalline (nc) Si imprinted as regular arrangement of Si nanopillars passivated with a SiO2 layer. By varying the laser beam scanning speed at a fixed pulse energy, we successfully tailored the resulting unique surface morphology of the formed LIPSSs that change from ordered arrangement of conical protrusions to highly uniform surface gratings, where sub-wavelength scale ripples decorate the valleys between near-wavelength scale ridges. Along with the surface morphology, the nc-Si/SiO2 volume ratio can also be controlled via laser processing parameters allowing the tailoring of the optical properties of the produced textured surfaces to achieve anti-reflection performance or partial transmission in the visible spectral range. Diverse hierarchical LIPSSs can be fabricated and replicated over large-scale areas opening a pathway for various applications including optical sensors, nanoscale temperature management, and solar light harvesting. By taking advantage of good wettability, enlarged surface area and remarkable light-trapping characteristics of the produced hierarchical morphologies, we demonstrated the first LIPSS-based surface enhanced fluorescent sensor that allowed the identification of metal cations providing a sub-nM detection limit unachievable by conventional fluorescence measurements in solutions.

Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces

Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.

Laser printing of optically resonant hollow crystalline carbon nanostructures from 1D and 2D metal-organic frameworks

Using a hybrid approach involving a slow diffusion method to synthesize 1D and 2D MOFs followed by their treatment with femtosecond infrared laser radiation, we generated 100-600 nm well-defined hollow spheres and hemispheres of graphite. This ultra-fast technique extends the library of shapes of crystalline MOF derivatives appropriate for all-dielectric nanophotonics.

All-Silicon Broadband Ultraviolet Metasurfaces

Featuring high photon energy and short wavelength, ultraviolet (UV) light enables numerous applications such as high-resolution imaging, photolithography, and sensing. In order to manipulate UV light, bulky optics are usually required, and hence do not meet the fast-growing requirements of integration in compact systems. Recently, metasurfaces have shown unprecedented control of light, enabling substantial miniaturization of photonic devices from terahertz to visible regions. However, material challenges have hampered the realization of such functionalities at shorter wavelengths. Herein, it is experimentally demonstrated that all-silicon (Si) metasurfaces with thicknesses of only one-tenth of the working wavelength can be designed and fabricated to manipulate broadband UV light with efficiencies comparable to plasmonic metasurface performance in infrared (IR). Also, for the first time, photolithography enabled by metasurface-generated UV holograms is shown. Such performance enhancement is attributed to increased scattering cross sections of Si antennas in the UV range, which is adequately modeled via a circuit. The new platform introduced here will deepen the understanding of light-matter interactions and introduce even more material options to broadband metaphotonic applications, including those in integrated photonics and holographic lithography technologies.

Nanophotonics with 2D transition metal dichalcogenides [Invited]

Two-dimensional semiconducting transition metal dichalcogenides (TMDCs) have recently become attractive materials for several optoelectronic applications, such as photodetection, light harvesting, phototransistors, light-emitting diodes, and lasers. Their bandgap lies in the visible and near-IR range, and they possess strong excitonic resonances, high oscillator strengths, and valley-selective response. Coupling these materials to optical nanocavities enhances the quantum yield of exciton emission, enabling advanced quantum optics and nanophotonics devices. Here, we review the state-of-the-art advances of hybrid exciton-polariton structures based on monolayer TMDCs coupled to plasmonic and dielectric nanocavities. We discuss the optical properties of 2D WS₂, WSe₂, MoS₂ and MoSe₂ materials, paying special attention to their energy bands, photoluminescence/absorption spectra, excitonic fine structure, and to the dynamics of exciton formation and valley depolarization. We also discuss light-matter interactions in such hybrid exciton-polariton structures. Finally, we focus on weak and strong coupling regimes in monolayer TMDCs-based exciton-polariton systems, envisioning research directions and future opportunities for this material platform.

Advances in optical metasurfaces: fabrication and applications [Invited]

The research and development of optical metasurfaces has been primarily driven by the curiosity for novel optical phenomena that are unattainable from materials that exist in nature and by the desire for miniaturization of optical devices. Metasurfaces constructed of artificial patterns of subwavelength depth make it possible to achieve flat, ultrathin optical devices of high performance. A wide variety of fabrication techniques have been developed to explore their unconventional functionalities which in many ways have revolutionized the means with which we control and manipulate electromagnetic waves. The relevant research community could benefit from an overview on recent progress in the fabrication and applications of the metasurfaces. This review article is intended to serve that purpose by reviewing the state-of-the-art fabrication methods and surveying their cutting-edge applications.

Highly Enhanced Third-Harmonic Generation in 2D Perovskites at Excitonic Resonances

Two-dimensional hybrid organic-inorganic Ruddlesden-Popper perovskites (RPPs) have attracted considerable attention due to their rich photonic and optoelectronic properties. The natural multi-quantum-well structure of 2D RPPs has been predicted to exhibit a large third-order nonlinearity. However, nonlinear optical studies on 2D RPPs have previously been conducted only on bulk polycrystalline samples, in which only weak third-harmonic generation (THG) has been observed. Here, we perform parametric nonlinear optical characterization of 2D perovskite nanosheets mechanically exfoliated from four different lead halide RPP single crystals, from which we observe ultrastrong THG with a maximum effective third-order susceptibility (χ⁽³⁾) of 1.12 × 10^-17 m² V^-2. A maximum conversion efficiency of 0.006% is attained, which is more than 5 orders of magnitude higher than previously reported values for 2D materials. The THG emission is resonantly enhanced at the excitonic band gap energy of the 2D RPP crystals and can be tuned from violet to red by selecting the RPP homologue with the requisite resonance. Due to signal depletion effects and phase-matching conditions, the strongest nonlinear response is achieved for thicknesses less than 100 nm.

Efficient Second-Harmonic Generation in Nanocrystalline Silicon Nanoparticles

Recent trends to employ high-index dielectric particles in nanophotonics are motivated by their reduced dissipative losses and large resonant enhancement of nonlinear effects at the nanoscale. Because silicon is a centrosymmetric material, the studies of nonlinear optical properties of silicon nanoparticles have been targeting primarily the third-harmonic generation effects. Here we demonstrate, both experimentally and theoretically, that resonantly excited nanocrystalline silicon nanoparticles fabricated by an optimized laser printing technique can exhibit strong second-harmonic generation (SHG) effects. We attribute an unexpectedly high yield of the nonlinear conversion to a nanocrystalline structure of nanoparticles supporting the Mie resonances. The demonstrated efficient SHG at green light from a single silicon nanoparticle is 2 orders of magnitude higher than that from unstructured silicon films. This efficiency is significantly higher than that of many plasmonic nanostructures and small silicon nanoparticles in the visible range, and it can be useful for a design of nonlinear nanoantennas and silicon-based integrated light sources.

Amplification of the molecular chiroptical effect by low-loss dielectric nanoantennas

We report here the chiroptical amplification effect occurring in the hybrid systems consisting of chiral molecules and Si nanostructures. Under resonant excitation of circularly polarized light, the hybrid systems show strong CD induction signals at the optical frequency, which arise from both the electric and magnetic responses of the Si nanostructures. More interestingly, the induced CD signals from Si-based dielectric nanoantennas are always larger than that from Au-based plasmonic counterparts. The related physical origin was disclosed. Furthermore, compared to the Au-based high-loss plasmonic nanoantennas, Si-based low-loss structures would generate negligible photothermal effect, which makes Si nanoantennas an optimized candidate to amplify molecular CD signals with ultralow thermal damage. Our findings may provide a guideline for the design of novel chiral nanosensors, which are applicable in the fields of biomedicine and pharmaceutics.