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Yamada Y, Ichii T, Utsunomiya T, Kimura K, Kobayashi K, Yamada H, Sugimura H. Fundamental and higher eigenmodes of qPlus sensors with a long probe for vertical-lateral bimodal atomic force microscopy. NANOSCALE ADVANCES 2023; 5:840-850. [PMID: 36756504 PMCID: PMC9890686 DOI: 10.1039/d2na00686c] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/07/2022] [Accepted: 12/26/2022] [Indexed: 06/18/2023]
Abstract
The detection of vertical and lateral forces at the nanoscale by atomic force microscopy (AFM) reveals various mechanical properties on surfaces. The qPlus sensor is a widely used force sensor, which is built from a quartz tuning fork (QTF) and a sharpened metal probe, capable of high-resolution imaging in viscous liquids such as lubricant oils. Although a simultaneous detection technique of vertical and lateral forces by using a qPlus sensor is required in the field of nanotribology, it has still been difficult because the torsional oscillations of QTFs cannot be detected. In this paper, we propose a method to simultaneously detect vertical and lateral force components by using a qPlus sensor with a long probe. The first three eigenmodes of the qPlus sensor with a long probe are theoretically studied by solving a set of equations of motion for the QTF prong and probe. The calculation results were in good agreement with the experimental results. It was found that the tip oscillates laterally in the second and third modes. Finally, we performed friction anisotropy measurements on a polymer film by using a bimodal AFM utilizing the qPlus sensor with a long probe to confirm the lateral force detection.
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Affiliation(s)
- Yuya Yamada
- Department of Materials Science and Engineering, Kyoto University Yoshida Honmachi, Sakyo Kyoto 606-8501 Japan
| | - Takashi Ichii
- Department of Materials Science and Engineering, Kyoto University Yoshida Honmachi, Sakyo Kyoto 606-8501 Japan
| | - Toru Utsunomiya
- Department of Materials Science and Engineering, Kyoto University Yoshida Honmachi, Sakyo Kyoto 606-8501 Japan
| | - Kuniko Kimura
- Department of Electronic Science and Engineering, Kyoto University Katsura, Nishikyo Kyoto 615-8510 Japan
| | - Kei Kobayashi
- Department of Electronic Science and Engineering, Kyoto University Katsura, Nishikyo Kyoto 615-8510 Japan
| | - Hirofumi Yamada
- Department of Electronic Science and Engineering, Kyoto University Katsura, Nishikyo Kyoto 615-8510 Japan
| | - Hiroyuki Sugimura
- Department of Materials Science and Engineering, Kyoto University Yoshida Honmachi, Sakyo Kyoto 606-8501 Japan
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Chen K, Liu Z, Xie Y, Zhang C, Xu G, Song W, Xu K. Numerical analysis of vibration modes of a qPlus sensor with a long tip. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:82-92. [PMID: 33564605 PMCID: PMC7849263 DOI: 10.3762/bjnano.12.7] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/19/2020] [Accepted: 12/20/2020] [Indexed: 05/14/2023]
Abstract
We study the oscillatory behavior of qPlus sensors with a long tilted tip by means of finite element simulations. The vibration modes of a qPlus sensor with a long tip are quite different from those of a cantilever with a short tip. Flexural vibration of the tungsten tip will occur. The tip can no longer be considered as a rigid body that moves with the prong of the tuning fork. Instead, it oscillates both horizontally and vertically. The vibration characteristics of qPlus sensors with different tip sizes were studied. An optimized tip size was derived from obtained values of tip amplitude, ratio between vertical and lateral amplitude components, output current, and quality factor. For high spatial resolution the optimal diameter was found to be 0.1 mm.
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Affiliation(s)
- Kebei Chen
- School of Nano Technology and Nano Bionics, University of Science and Technology of China, Suzhou 215123, China
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
- CAS Key Laboratory of Nanophotonic Materials and Devices, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou 215123, China
| | - Zhenghui Liu
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
- CAS Key Laboratory of Nanophotonic Materials and Devices, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou 215123, China
| | - Yuchen Xie
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
| | - Chunyu Zhang
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
- CAS Key Laboratory of Nanophotonic Materials and Devices, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou 215123, China
| | - Gengzhao Xu
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
- CAS Key Laboratory of Nanophotonic Materials and Devices, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou 215123, China
| | - Wentao Song
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
- CAS Key Laboratory of Nanophotonic Materials and Devices, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou 215123, China
| | - Ke Xu
- Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
- CAS Key Laboratory of Nanophotonic Materials and Devices, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou 215123, China
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Ma R, Huan Q, Wu L, Yan J, Zou Q, Wang A, Bobisch CA, Bao L, Gao HJ. Upgrade of a commercial four-probe scanning tunneling microscopy system. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2017; 88:063704. [PMID: 28668010 DOI: 10.1063/1.4986466] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Upgrade of a commercial ultra-high vacuum four-probe scanning tunneling microscopy system for atomic resolution capability and thermal stability is reported. To improve the mechanical and thermal performance of the system, we introduced extra vibration isolation, magnetic damping, and double thermal shielding, and we redesigned the scanning structure and thermal links. The success of the upgrade is characterized by its atomically resolved imaging, steady cooling down cycles with high efficiency, and standard transport measurement capability. Our design may provide a feasible way for the upgrade of similar commercial systems.
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Affiliation(s)
- Ruisong Ma
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | - Qing Huan
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | - Liangmei Wu
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | - Jiahao Yan
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | - Qiang Zou
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | - Aiwei Wang
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | | | - Lihong Bao
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
| | - Hong-Jun Gao
- Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
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González L, Oria R, Botaya L, Puig-Vidal M, Otero J. Determination of the static spring constant of electrically-driven quartz tuning forks with two freely oscillating prongs. NANOTECHNOLOGY 2015; 26:055501. [PMID: 25573912 DOI: 10.1088/0957-4484/26/5/055501] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Quartz tuning forks have become popular in nanotechnology applications, especially as sensors for scanning probe microscopy. The sensor's spring constant and the oscillation amplitude are required parameters to evaluate the tip-sample forces; however, there is certain controversy within the research community as to how to arrive at a value for the static spring constant of the device when working in shear mode. Here, we present two different methods based on finite element simulations, to determine the value of the spring constant of the sensors: the amplitude and Cleveland methods. The results obtained using these methods are compared to those using the geometrical method, and show that the latter overestimates the spring constant of the device.
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Affiliation(s)
- Laura González
- SIC-BIO, Bioelectronics and Nanobioengineering Group, Departament d'Electrònica, Universitat de Barcelona, Marti i Franques 1, E-08028 Barcelona, Spain
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Melcher J, Stirling J, Shaw GA. A simple method for the determination of qPlus sensor spring constants. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2015; 6:1733-42. [PMID: 26425425 PMCID: PMC4578344 DOI: 10.3762/bjnano.6.177] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/06/2015] [Accepted: 07/20/2015] [Indexed: 05/05/2023]
Abstract
qPlus sensors are widely used to measure forces at the atomic scale, however, confidence in these measurements is limited by inconsistent reports of the spring constant of the sensor and complications from finite tip heights. Here we combine a numerical investigation of the force reconstruction with an experimental characterization of the flexural mechanics of the qPlus sensor. Numerical studies reveal significant errors in reconstructed force for tip heights exceeding 400 μm or one sixth of the cantilever length. Experimental results with a calibrated nanoindenter reveal excellent agreement with an Euler-Bernoulli beam model for the sensor. Prior to the attachment of a tip, measured spring constants of 1902 ± 29 N/m are found to be in agreement with theoretical predictions for the geometry and material properties of the sensor once a peaked ridge in the beam cross section is included. We further develop a correction necessary to adjust the spring constant for the size and placement of the tip.
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Affiliation(s)
- John Melcher
- National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
| | - Julian Stirling
- National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
| | - Gordon A Shaw
- National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
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Finite element analysis of electrically excited quartz tuning fork devices. SENSORS 2013; 13:7156-69. [PMID: 23722828 PMCID: PMC3715236 DOI: 10.3390/s130607156] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/01/2013] [Revised: 05/22/2013] [Accepted: 05/28/2013] [Indexed: 11/17/2022]
Abstract
Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.
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Nakayama T, Kubo O, Shingaya Y, Higuchi S, Hasegawa T, Jiang CS, Okuda T, Kuwahara Y, Takami K, Aono M. Development and application of multiple-probe scanning probe microscopes. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2012; 24:1675-92. [PMID: 22378596 DOI: 10.1002/adma.201200257] [Citation(s) in RCA: 28] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/18/2012] [Indexed: 05/22/2023]
Abstract
In the research of advanced materials based on nanoscience and nanotechnology, it is often desirable to measure nanoscale local electrical conductivity at a designated position of a given sample. For this purpose, multiple-probe scanning probe microscopes (MP-SPMs), in which two, three or four scanning tunneling microscope (STM) or atomic force microscope (AFM) probes are operated independently, have been developed. Each probe in an MP-SPM is used not only for observing high-resolution STM or AFM images but also for forming an electrical contact enabling nanoscale local electrical conductivity measurement. The world's first double-probe STM (DP-STM) developed by the authors, which was subsequently modified to a triple-probe STM (TP-STM), has been used to measure the conductivities of one-dimensional metal nanowires and carbon nanotubes and also two-dimensional molecular films. A quadruple-probe STM (QP-STM) has also been developed and used to measure the conductivity of two-dimensional molecular films without the ambiguity of contact resistance between the probe and sample. Moreover, a quadruple-probe AFM (QP-AFM) with four conductive tuning-fork-type self-detection force sensing probes has been developed to measure the conductivity of a nanostructure on an insulating substrate. A general-purpose computer software to control four probes at the same time has also been developed and used in the operation of the QP-AFM. These developments and applications of MP-SPMs are reviewed in this paper.
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Affiliation(s)
- Tomonobu Nakayama
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
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Higuchi S, Kubo O, Kuramochi H, Aono M, Nakayama T. A quadruple-scanning-probe force microscope for electrical property measurements of microscopic materials. NANOTECHNOLOGY 2011; 22:285205. [PMID: 21659691 DOI: 10.1088/0957-4484/22/28/285205] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
Four-terminal electrical measurement is realized on a microscopic structure in air, without a lithographic process, using a home-built quadruple-scanning-probe force microscope (QSPFM). The QSPFM has four probes whose positions are individually controlled by obtaining images of a sample in the manner of atomic force microscopy (AFM), and uses the probes as contacting electrodes for electrical measurements. A specially arranged tuning fork probe (TFP) is used as a self-detection force sensor to operate each probe in a frequency modulation AFM mode, resulting in simultaneous imaging of the same microscopic feature on an insulator using the four TFPs. Four-terminal electrical measurement is then demonstrated in air by placing each probe electrode in contact with a graphene flake exfoliated on a silicon dioxide film, and the sheet resistance of the flake is measured by the van der Pauw method. The present work shows that the QSPFM has the potential to measure the intrinsic electrical properties of a wide range of microscopic materials in situ without electrode fabrication.
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Affiliation(s)
- Seiji Higuchi
- International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan.
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