Coverage dependence of sticking coefficient of O2 on Ag(110)

Silver Tarnishing Mechanism Revealed by Molecular Dynamics Simulations

The mechanism of silver-oxygen and silver-sulfur reactions is revealed by means of molecular dynamics simulations, performed with reactive force fields purposely built and extensively tested against quantum-chemical results. Different reaction mechanisms and rates for Ag-O and Ag-S emerge. This study solves the long-lasting question why silver exposed to the environment is strongly vulnerable to sulfur corrosion (tarnishing) but hardly reacts with O₂ , despite the thermodynamic prediction that both oxide and sulfide should form. The reliability of the simulation results is confirmed by the agreement with a multitude of experimental results from the literature.

Low temperature dry etching of chromium towards control at sub-5 nm dimensions

Patterned chromium and its compounds are crucial materials for nanoscale patterning and chromium based devices. Here we investigate how temperature can be used to control chromium etching using chlorine/oxygen gas mixtures. Oxygen/chlorine ratios between 0% and 100% and temperatures between -100 °C and +40 °C are studied. Spectroscopic ellipsometry is used to precisely measure rates, chlorination, and the thickness dependence of n and k. Working in the extremes of oxygen content (very high or very low) and lower temperatures, we find rates can be controlled to nanometers per minute. Activation energies are measured and show that etch mechanisms are both temperature and oxygen level dependent. Furthermore, we find that etching temperature can manipulate the surface chemistry. One surprising consequence is that at low oxygen levels, Etching rates increase with decreasing temperature. Preliminary feature-profile studies show the extremes of temperature and oxygen provide advantages over commonly used room temperature processing conditions. One example is with higher ion energies at -100 °C, where etching products deposit.

Molecular dynamics simulation of O2 adsorption on Ag(110) from first principles electronic structure calculations

State of the art simulations show that the physisorption state could be important for O₂/Ag(110) adsorption.