High resolution space quartz-flexure accelerometer based on capacitive sensing and electrostatic control technology

A high precision surface potential imaging torsion pendulum facility to investigate physical mechanism of patch effect

The physical mechanism of the patch effect is still an open question. Thus, a high-precision surface potential mapping facility based on a specially designed electrostatically-controlled torsion pendulum is proposed in this paper. The facility not only features high sensitivity and a two-dimensional mapping function but also adapts to various measurement requirements for centimeter-sized samples. The sensitivity of the torsion pendulum reaches about 2.0 × 10^-14 N m/Hz^1/2 in a frequency range of 1-8 mHz. The temporal variation of the surface potential can be detected at a level of 30 μV/Hz^1/2 with a probe whose surface area is 7 mm². The potential spatial distribution resolution comes to 0.1 mm² at a level of 40 μV with 1 h integration time.

Static and dynamic analyses of free-hinged-hinged-hinged-free beam in non-homogeneous gravitational field: application to gravity gradiometry

The first analytical evaluation of a free-hinged-hinged-hinged-free beam proposed for use as the primary sensing element of a new gravity gradiometer is presented. Results of the evaluation obtained in quadratures are applied to the beam's structure, including locating the hinges that form the beam's boundary conditions allowing only free rotations around its nodal axes. These are deliberately chosen to minimize the beam's symmetric free ends deflections under the uniform body loading of gravity while simultaneously permitting the beam's maximum possible mirror-symmetric free ends deflections owing to a gravity gradient distributed along its length. The flexible triple-hinged beam deformation from its nominal unloaded geometry is naturally elastically coupled throughout, including free ends, allowing synchronized mechanical displacement measurements at any deflection point. Some methods of manufacturing such sensing elements and their respective error mechanisms are also discussed and presented for the first time.

A torque type full tensor gravity gradiometer based on a flexure-strip suspension

Full tensor gravity gradiometers based on accelerometer pair combination are widely employed in earth resource explorations using gravity gradient measurements. However, the extremely high requirements of accelerometer dynamic range and the scale factor consistency of accelerometer pairs are the two main limitations to further improve their performances. In order to overcome these two extreme challenges, the torque type gravity gradiometer based on the Etövös torsion balance pendulum is re-considered. In this paper, an improved torque type full tensor gravity gradiometer with a flexure-strip suspension is proposed, which balances the mechanical sensitivity and the response time. The proposed gradiometer can be used to measure the full tensor gravity gradient by observing angle variations at three azimuths. The principle and feasibility of the torque type full tensor gravity gradiometer based on a flexure-strip suspension are introduced, and the main noise sources including mechanical thermal noise, position sensing noise, and readout noise are analyzed. A prototype gravity gradiometer with a designed resolution of 2 E/Hz^1/2 at 0.1 Hz is constructed (1 E = 10^-9/s²), and the experimental results indicate that its resolution comes to 3 E/Hz^1/2 at 0.1 Hz, which is mainly limited by the seismic noise. This type of gravity gradiometer can be further improved due to its high potential resolution and independence of matching combination requirement, which allows it to be applied in next generation gravity resource exploration.

High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect

A high-precision acceleration measurement system based on an ultra-sensitive tunnel magneto-resistance (TMR) sensor is presented in this paper. A “force–magnetic–electric” coupling structure that converts an input acceleration into a change in magnetic field around the TMR sensor is designed. In such a structure, a micro-cantilever is integrated with a magnetic field source on its tip. Under an acceleration, the mechanical displacement of the cantilever causes a change in the spatial magnetic field sensed by the TMR sensor. The TMR sensor is constructed with a Wheatstone bridge structure to achieve an enhanced sensitivity. Meanwhile, a low-noise differential circuit is developed for the proposed system to further improve the precision of the measured acceleration. The experimental results show that the micro-system achieves a measurement resolution of 19 μg/√Hz at 1 Hz, a scale factor of 191 mV/g within a range of ± 2 g, and a bias instability of 38 μg (Allan variance). The noise sources of the proposed system are thoroughly investigated, which shows that low-frequency 1/f noise is the dominant noise source. We propose to use a high-frequency modulation technique to suppress the 1/f noise effectively. Measurement results show that the 1/f noise is suppressed about 8.6-fold at 1 Hz and the proposed system resolution can be improved to 2.2 μg/√Hz theoretically with this high-frequency modulation technique.

The Dead Time Characterization Method of Quartz Flexure Accelerometers Using Monotonicity Number

Dead time estimation is important in the design process of quartz flexure accelerometers. However, to the authors’ knowledge, the dead time existing in quartz flexure accelerometers is not well investigated in conventional identification studies. In this paper, the dead time, together with the open-loop transfer function of quartz flexure accelerometers, is identified from step excitation experiments using two steps. Firstly, a monotonicity number was proposed to estimate the dead time. Analysis showed that the monotonicity number was robust enough to measurement noise and sensitive to step excitation. Secondly, parameters of the open-loop transfer function were identified using the least mean squares algorithm. A simulation example was applied to demonstrate the validity of the proposed method. The verified method was used to test a quartz flexure accelerometer. The experimental result shows that the dead time was 500 μs.

Modeling and Analysis of a Novel Ultrasensitive Differential Resonant Graphene Micro-Accelerometer with Wide Measurement Range

A novel, ultrahigh-sensitivity wide-range resonant micro-accelerometer using two differential double-clamped monolayer graphene beams is designed and investigated by steady-state simulation via COMSOL Multiphysics software in this paper. Along with stiffness-enhanced optimized folded support beams, two symmetrical 3-GPa prestressed graphene nano-beams serve as resonant sensitive elements with a size of 10 μm × 1 μm (length × width) to increase the acceleration sensitivity while extending the measurement range. The simulation results show that the accelerometer with cascade-connected graphene and proof-mass assembly exhibits the ultrahigh sensitivity of 21,224 Hz/g and quality factor of 9773 in the range of 0⁻1000 g. This is remarkably superior to previously reported studies characterized by attaching proof mass to the graphene components directly. The proposed accelerometer shows great potential as an alternative to quartz and silicon-based resonant sensors in high-impact and highly sensitive inertial measurement applications.

A Subnano-g Electrostatic Force-Rebalanced Flexure Accelerometer for Gravity Gradient Instruments

A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and is centered between two fixed capacitor plates. This novel design enables the proof mass to move exactly along the sensitive direction and exhibits a high rejection ratio at its cross-axis directions. Benefiting from large proof mass, high vacuum packaging, and air-tight sealing, the thermal Brownian noise of the accelerometer is lowered down to less than 0.2 ng / Hz with a quality factor of 15 and a natural resonant frequency of about 7.4 Hz . The accelerometer's designed measurement range is about ±1 mg. Based on the correlation analysis between a commercial triaxial seismometer and our accelerometer, the demonstrated self-noise of our accelerometers is reduced to lower than 0.3 ng / Hz over the frequency ranging from 0.2 to 2 Hz, which meets the requirement of the rotating accelerometer gravity gradiometer.

A New Scale Factor Adjustment Method for Magnetic Force Feedback Accelerometer

A new and simple method to adjust the scale factor of a magnetic force feedback accelerometer is presented, which could be used in developing a rotating accelerometer gravity gradient instrument (GGI). Adjusting and matching the acceleration-to-current transfer function of the four accelerometers automatically is one of the basic and necessary technologies for rejecting the common mode accelerations in the development of GGI. In order to adjust the scale factor of the magnetic force rebalance accelerometer, an external current is injected and combined with the normal feedback current; they are then applied together to the torque coil of the magnetic actuator. The injected current could be varied proportionally according to the external adjustment needs, and the change in the acceleration-to-current transfer function then realized dynamically. The new adjustment method has the advantages of no extra assembly and ease of operation. Changes in the scale factors range from 33% smaller to 100% larger are verified experimentally by adjusting the different external coefficients. The static noise of the used accelerometer is compared under conditions with and without the injecting current, and the experimental results find no change at the current noise level, which further confirms the validity of the presented method.

Research and Development of Electrostatic Accelerometers for Space Science Missions at HUST

High-precision electrostatic accelerometers have achieved remarkable success in satellite Earth gravity field recovery missions. Ultralow-noise inertial sensors play important roles in space gravitational wave detection missions such as the Laser Interferometer Space Antenna (LISA) mission, and key technologies have been verified in the LISA Pathfinder mission. Meanwhile, at Huazhong University of Science and Technology (HUST, China), a space accelerometer and inertial sensor based on capacitive sensors and the electrostatic control technique have also been studied and developed independently for more than 16 years. In this paper, we review the operational principle, application, and requirements of the electrostatic accelerometer and inertial sensor in different space missions. The development and progress of a space electrostatic accelerometer at HUST, including ground investigation and space verification are presented.

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In order to achieve a large dynamic range with an ultrahigh resolution, the capacitive detection system employs two periodic-sensing-array transducers. Each of them can provide numbers for the signal period in the entire operating range. The suspended proof-mass is encapsulated between two glass caps, which results in a three dimensional structure. The measured resonant frequency and quality factor (Q) are 13.2 Hz and 47, respectively. The calibration response of a ±0.7 g input acceleration is presented, and the accelerometer system presents a sensitivity of 122 V/g and a noise floor of 30 ng/√Hz (at 1 Hz, and 1 atm). The bias stability for a period of 10 h is 30 μg. The device has endured a shock up to ±2.6 g, and the full scale output appears to be approximately ±1.4 g presently. This work presents a new opportunity for highly sensitive MEMS fabrication to enable future high-precision measurement applications, such as for gravity measurements.

High-Temperature Piezoelectric Crystals for Acoustic Wave Sensor Applications

In this review paper, nine different types of high-temperature piezoelectric crystals and their sensor applications are overviewed. The important materials' properties of these piezoelectric crystals including dielectric constant, elastic coefficients, piezoelectric coefficients, electromechanical coupling coefficients, and mechanical quality factor are discussed in detail. The determination methods of these physical properties are also presented. Moreover, the growth methods, structures, and properties of these piezoelectric crystals are summarized and compared. Of particular interest are langasite and oxyborate crystals, which exhibit no phase transitions prior to their melting points ∼ 1500 °C and possess high electrical resistivity, piezoelectric coefficients, and mechanical quality factor at ultrahigh temperature ( ∼ 1000 °C). Finally, some research results on surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors developed using this high-temperature piezoelectric crystals are discussed.

Measurement method of magnetic field for the wire suspended micro-pendulum accelerometer

Force producer is one of the core components of a Wire Suspended Micro-Pendulum Accelerometer; and the stability of permanent magnet in the force producer determines the consistency of the acceleration sensor’s scale factor. For an assembled accelerometer; direct measurement of magnetic field strength is not a feasible option; as the magnetometer probe cannot be laid inside the micro-space of the sensor. This paper proposed an indirect measurement method of the remnant magnetization of Micro-Pendulum Accelerometer. The measurement is based on the working principle of the accelerometer; using the current output at several different scenarios to resolve the remnant magnetization of the permanent magnet. Iterative Least Squares algorithm was used for the adjustment of the data due to nonlinearity of this problem. The calculated remnant magnetization was 1.035 T. Compared to the true value; the error was less than 0.001 T. The proposed method provides an effective theoretical guidance for measuring the magnetic field of the Wire Suspended Micro-Pendulum Accelerometer; correcting the scale factor and temperature influence coefficients; etc.

Low frequency noise elimination technique for 24-bit Σ-Δ data acquisition systems

Low frequency 1/f noise is one of the key limiting factors of high precision measurement instruments. In this paper, digital correlated double sampling is implemented to reduce the offset and low frequency 1/f noise of a data acquisition system with 24-bit sigma delta (Σ-Δ) analog to digital converter (ADC). The input voltage is modulated by cross-coupled switches, which are synchronized to the sampling clock, and converted into digital signal by ADC. By using a proper switch frequency, the unwanted parasitic signal frequencies generated by the switches are avoided. The noise elimination processing is made through the principle of digital correlated double sampling, which is equivalent to a time shifted subtraction for the sampled voltage. The low frequency 1/f noise spectrum density of the data acquisition system is reduced to be flat down to the measurement frequency lower limit, which is about 0.0001 Hz in this paper. The noise spectrum density is eliminated by more than 60 dB at 0.0001 Hz, with a residual noise floor of (9 ± 2) nV/Hz(1/2) which is limited by the intrinsic white noise floor of the ADC above its corner frequency.

Implementation of the scale factor balance on two pairs of quartz-flexure capacitive accelerometers by trimming bias voltage

Gravity gradient measurement makes use of the difference between the outputs of pairs of linear accelerometers, which results in cancelling out the common mode accelerations caused by mounting platform and external environment. One of the key technologies is to match the acceleration-to-voltage or acceleration-to-current transfer functions of the pairs of the accelerometers to an extremely high degree of accuracy. The differential signals then make the gravity gradients observable. By using two pairs of the quartz-flexure accelerometers with a capacitive sensing and electrostatic closed-loop control, the electrostatic control bias voltages were trimming remotely and automatically in real time. Each pair of accelerometers was matched individually and then all four accelerometers were finally re-balanced. The experimental results show that the consistency of five digits is achieved at a noise level of ~5×10(-8) g/√Hz (1 g ≈ 9.8 m/s(2)) and the scale factors ranging from 0.25 to 0.32 V/mg. Further improvement to the achieved level of matching is limited by the intrinsic noise of the accelerometers used.