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Zhang L, Du W, Kim JH, Yu CC, Dagdeviren C. An Emerging Era: Conformable Ultrasound Electronics. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2307664. [PMID: 37792426 DOI: 10.1002/adma.202307664] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2023] [Revised: 09/19/2023] [Indexed: 10/05/2023]
Abstract
Conformable electronics are regarded as the next generation of personal healthcare monitoring and remote diagnosis devices. In recent years, piezoelectric-based conformable ultrasound electronics (cUSE) have been intensively studied due to their unique capabilities, including nonradiative monitoring, soft tissue imaging, deep signal decoding, wireless power transfer, portability, and compatibility. This review provides a comprehensive understanding of cUSE for use in biomedical and healthcare monitoring systems and a summary of their recent advancements. Following an introduction to the fundamentals of piezoelectrics and ultrasound transducers, the critical parameters for transducer design are discussed. Next, five types of cUSE with their advantages and limitations are highlighted, and the fabrication of cUSE using advanced technologies is discussed. In addition, the working function, acoustic performance, and accomplishments in various applications are thoroughly summarized. It is noted that application considerations must be given to the tradeoffs between material selection, manufacturing processes, acoustic performance, mechanical integrity, and the entire integrated system. Finally, current challenges and directions for the development of cUSE are highlighted, and research flow is provided as the roadmap for future research. In conclusion, these advances in the fields of piezoelectric materials, ultrasound transducers, and conformable electronics spark an emerging era of biomedicine and personal healthcare.
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Affiliation(s)
- Lin Zhang
- Media Lab, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Wenya Du
- Media Lab, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Jin-Hoon Kim
- Media Lab, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Chia-Chen Yu
- Media Lab, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Canan Dagdeviren
- Media Lab, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
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Fan D, Niu H, Liu K, Sun X, Wang H, Shi K, Mo W, Jian Z, Wen L, Shen M, Zhao T, Fei C, Chen Y. Nb and Mn Co-Modified Na0.5Bi4.5Ti4O15 Bismuth-Layered Ceramics for High-Frequency Transducer Applications. MICROMACHINES 2022; 13:mi13081246. [PMID: 36014168 PMCID: PMC9415184 DOI: 10.3390/mi13081246] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/21/2022] [Revised: 07/28/2022] [Accepted: 07/30/2022] [Indexed: 11/16/2022]
Abstract
Lead-free environmentally friendly piezoelectrical materials with enhanced piezoelectric properties are of great significance for high-resolution ultrasound imaging applications. In this paper, Na0.5Bi4.5Ti3.86Mn0.06Nb0.08O15+y (NBT-Nb-Mn) bismuth-layer-structured ceramics were prepared by solid-phase synthesis. The crystallographic structure, micromorphology, and piezoelectrical and electromechanical properties of NBT-Nb-Mn ceramics were examined, showing their enhanced piezoelectricity (d33 = 33 pC/N) and relatively high electromechanical coupling coefficient (kt = 0.4). The purpose of this article is to describe the development of single element ultrasonic transducers based on these piezoelectric ceramics. The as-prepared high-frequency tightly focused transducer (ƒ-number = 1.13) had an electromechanical coupling coefficient of 0.48. The center frequency was determined to be 37.4 MHz and the −6 dB bandwidth to be 47.2%. According to the B-mode imaging experiment of 25 μm tungsten wires, lateral resolution of the transducer was calculated as 56 μm. Additionally, the experimental results were highly correlated to the results simulated by COMSOL software. By scanning a coin, the imaging effect of the transducer was further evaluated, demonstrating the application advantages of the prepared transducer in the field of high-sensitivity ultrasound imaging.
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Affiliation(s)
- Dongming Fan
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
| | - Huiyan Niu
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
| | - Kun Liu
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
| | - Xinhao Sun
- School of Microelectronics, Xidian University, Xi’an 740071, China; (X.S.); (K.S.); (C.F.)
| | - Husheng Wang
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
| | - Kefei Shi
- School of Microelectronics, Xidian University, Xi’an 740071, China; (X.S.); (K.S.); (C.F.)
| | - Wen Mo
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
| | - Zhishui Jian
- Guangdong JC Technological Innovation Electronics Co., Ltd., Zhaoqing 526000, China; (Z.J.); (L.W.)
| | - Li Wen
- Guangdong JC Technological Innovation Electronics Co., Ltd., Zhaoqing 526000, China; (Z.J.); (L.W.)
| | - Meng Shen
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
- Correspondence: (M.S.); (T.Z.); (Y.C.)
| | - Tianlong Zhao
- School of Microelectronics, Xidian University, Xi’an 740071, China; (X.S.); (K.S.); (C.F.)
- Correspondence: (M.S.); (T.Z.); (Y.C.)
| | - Chunlong Fei
- School of Microelectronics, Xidian University, Xi’an 740071, China; (X.S.); (K.S.); (C.F.)
| | - Yong Chen
- Key Laboratory of Ferro & Piezoelectric Materials and Devices of Hubei Province, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory of Green Preparation and Application for Functional Materials, Ministry of Education, School of Physics and Electronic Science, Hubei University, Wuhan 430062, China; (D.F.); (H.N.); (K.L.); (H.W.); (W.M.)
- Correspondence: (M.S.); (T.Z.); (Y.C.)
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Kmet B, Kuščer D, Dutta S, Uršič H, Matavž A, Levassort F, Bobnar V, Malič B, Benčan A. Screen Printed Copper and Tantalum Modified Potassium Sodium Niobate Thick Films on Platinized Alumina Substrates. MATERIALS 2021; 14:ma14237137. [PMID: 34885292 PMCID: PMC8658548 DOI: 10.3390/ma14237137] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/26/2021] [Revised: 11/17/2021] [Accepted: 11/19/2021] [Indexed: 11/16/2022]
Abstract
We show how sintering in different atmospheres affects the structural, microstructural, and functional properties of ~30 μm thick films of K0.5Na0.5NbO3 (KNN) modified with 0.38 mol% K5.4Cu1.3Ta10O29 and 1 mol% CuO. The films were screen printed on platinized alumina substrates and sintered at 1100 °C in oxygen or in air with or without the packing powder (PP). The films have a preferential crystallographic orientation of the monoclinic perovskite phase in the [100] and [-101] directions. Sintering in the presence of PP contributes to obtaining phase-pure films, which is not the case for the films sintered without any PP notwithstanding the sintering atmosphere. The latter group is characterized by a slightly finer grain size, from 0.1 μm to ~2 μm, and lower porosity, ~6% compared with ~13%. Using piezoresponse force microscopy (PFM) and electron backscatter diffraction (EBSD) analysis of oxygen-sintered films, we found that the perovskite grains are composed of multiple domains which are preferentially oriented. Thick films sintered in oxygen exhibit a piezoelectric d33 coefficient of 64 pm/V and an effective thickness coupling coefficient kt of 43%, as well as very low mechanical losses of less than 0.5%, making them promising candidates for lead-free piezoelectric energy harvesting applications.
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Affiliation(s)
- Brigita Kmet
- Electronic Ceramics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (B.K.); (D.K.); (S.D.); (H.U.); (B.M.)
- Condensed Matter Physics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (A.M.); (V.B.)
| | - Danjela Kuščer
- Electronic Ceramics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (B.K.); (D.K.); (S.D.); (H.U.); (B.M.)
- Condensed Matter Physics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (A.M.); (V.B.)
| | - Soma Dutta
- Electronic Ceramics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (B.K.); (D.K.); (S.D.); (H.U.); (B.M.)
- Materials Science Division National Aerospace Laboratories, Bangalore 560017, India
| | - Hana Uršič
- Electronic Ceramics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (B.K.); (D.K.); (S.D.); (H.U.); (B.M.)
- Condensed Matter Physics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (A.M.); (V.B.)
| | - Aleksander Matavž
- Jožef Stefan International Postgraduate School, 1000 Ljubljana, Slovenia
| | - Franck Levassort
- GREMAN UMR 7347, Université de Tours, CNRS, INSA-CVL, 37200 Tours, France;
| | - Vid Bobnar
- Condensed Matter Physics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (A.M.); (V.B.)
- Jožef Stefan International Postgraduate School, 1000 Ljubljana, Slovenia
| | - Barbara Malič
- Electronic Ceramics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (B.K.); (D.K.); (S.D.); (H.U.); (B.M.)
- Condensed Matter Physics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (A.M.); (V.B.)
| | - Andreja Benčan
- Electronic Ceramics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (B.K.); (D.K.); (S.D.); (H.U.); (B.M.)
- Condensed Matter Physics Department, Jožef Stefan Institute, 1000 Ljubljana, Slovenia; (A.M.); (V.B.)
- Correspondence: ; Tel.: +386-1-477-3256
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Peng C, Wu H, Kim S, Dai X, Jiang X. Recent Advances in Transducers for Intravascular Ultrasound (IVUS) Imaging. SENSORS (BASEL, SWITZERLAND) 2021; 21:3540. [PMID: 34069613 PMCID: PMC8160965 DOI: 10.3390/s21103540] [Citation(s) in RCA: 19] [Impact Index Per Article: 6.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/29/2021] [Revised: 05/11/2021] [Accepted: 05/17/2021] [Indexed: 12/16/2022]
Abstract
As a well-known medical imaging methodology, intravascular ultrasound (IVUS) imaging plays a critical role in diagnosis, treatment guidance and post-treatment assessment of coronary artery diseases. By cannulating a miniature ultrasound transducer mounted catheter into an artery, the vessel lumen opening, vessel wall morphology and other associated blood and vessel properties can be precisely assessed in IVUS imaging. Ultrasound transducer, as the key component of an IVUS system, is critical in determining the IVUS imaging performance. In recent years, a wide range of achievements in ultrasound transducers have been reported for IVUS imaging applications. Herein, a comprehensive review is given on recent advances in ultrasound transducers for IVUS imaging. Firstly, a fundamental understanding of IVUS imaging principle, evaluation parameters and IVUS catheter are summarized. Secondly, three different types of ultrasound transducers (piezoelectric ultrasound transducer, piezoelectric micromachined ultrasound transducer and capacitive micromachined ultrasound transducer) for IVUS imaging are presented. Particularly, the recent advances in piezoelectric ultrasound transducer for IVUS imaging are extensively examined according to their different working mechanisms, configurations and materials adopted. Thirdly, IVUS-based multimodality intravascular imaging of atherosclerotic plaque is discussed. Finally, summary and perspectives on the future studies are highlighted for IVUS imaging applications.
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Affiliation(s)
- Chang Peng
- Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, USA; (C.P.); (H.W.)
| | - Huaiyu Wu
- Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, USA; (C.P.); (H.W.)
| | | | - Xuming Dai
- Department of Cardiology, New York-Presbyterian Queens Hospital, Flushing, NY 11355, USA;
| | - Xiaoning Jiang
- Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, USA; (C.P.); (H.W.)
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Quan Y, Fei C, Ren W, Wang L, Niu G, Zhao J, Zhuang J, Zhang J, Zheng K, Lin P, Sun X, Chen Q, Ye ZG, Karaki T. Lead-Free KNN-Based Textured Ceramics for High-Frequency Ultrasonic Transducer Application. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2021; 68:1979-1987. [PMID: 33242305 DOI: 10.1109/tuffc.2020.3039120] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Environment-friendly lead-free piezoelectric materials with excellent piezoelectric properties are needed for high-frequency ultrasonic transducer applications. Recently, lead-free 0.915(K0.45Na0.5Li0.05)NbO3-0.075BaZrO 3-0.01(Bi0.5Na0.5)TiO3 (KNLN-BZ-BNT) textured piezo- electric ceramics have high piezoelectric response, superior thermal stability, and excellent fatigue resistance, which are promising for devices applications. In this work, the KNLN-BZ-BNT textured ceramics were prepared by the tape-casting method. Microstructural morphology, phase transition, and electrical properties of KNLN-BZ-BNT textured ceramics were investigated. High-frequency needle-type ultrasonic transducers were designed and fabricated with these textured ceramics. The tightly focused transducers have a center frequency higher than 80 MHz and a -6-dB fractional bandwidth of 52%. Such transducers were built for an f -number close to 1, and the desired focal depth was achieved by press-focusing technology associated with a set of customer design fixture. Its lateral resolution was better than [Formula: see text] by scanning a 15- [Formula: see text] tungsten wire target. These promising results demonstrate that the lead-free KNLN-BZ-BNT textured ceramic is a good candidate for high-frequency ultrasonic transducer applications.
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Deng X, Xu T, Huang G, Li Q, Luo L, Zhao Y, Wu Z, Ou-Yang J, Yang X, Xie M, Zhu B. Design and Fabrication of a Novel Dual-Frequency Confocal Ultrasound Transducer for Microvessels Super-Harmonic Imaging. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2021; 68:1272-1277. [PMID: 33006928 DOI: 10.1109/tuffc.2020.3028505] [Citation(s) in RCA: 15] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Recently, super-harmonic ultrasound imaging technology has caused much attention due to its capability of distinguishing microvessels from the tissues surrounding them. However, the fabrication of a dual-frequency confocal transducer is still a challenge. In this work, 270- [Formula: see text] PMN-PT single crystal 1-3 composite and 28- [Formula: see text] PVDF thick film, acting as transmission layer and receiving layer, respectively, are integrated in a novel co-focusing structure. To realize delicate wave propagation control, microwave transmission line theory is introduced to design such structure. Two acoustic filter layers, 13- [Formula: see text] copper layer and 39- [Formula: see text] Epoxy 301 layer, are indispensable and should be added between two piezoelectric layers. Therefore, an acoustic issue can be overcome via an electrical method and the successful achievement of a dual-frequency (5 MHz/30 MHz) ultrasound transducer with a confocal distance of 8 mm can be realized. The super-harmonic ultrasound imaging experiment is conducted using this kind of device. The 3-D image of 110- [Formula: see text]-diameter phantom tube injected with microbubbles can be obtained. These promising results demonstrate that this novel dual-frequency (5 MHz/30 MHz) confocal ultrasound transducer is potentially usable for microvascular medical imaging application in the future.
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Wang J, Zheng Z, Chan J, Yeow JTW. Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging. MICROSYSTEMS & NANOENGINEERING 2020; 6:73. [PMID: 34567683 PMCID: PMC8433336 DOI: 10.1038/s41378-020-0181-z] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/02/2020] [Revised: 04/28/2020] [Accepted: 05/23/2020] [Indexed: 05/27/2023]
Abstract
Intravascular ultrasound (IVUS) is a burgeoning imaging technology that provides vital information for the diagnosis of coronary arterial diseases. A significant constituent that enables the IVUS system to attain high-resolution images is the ultrasound transducer, which acts as both a transmitter that sends acoustic waves and a detector that receives the returning signals. Being the most mature form of ultrasound transducer available in the market, piezoelectric transducers have dominated the field of biomedical imaging. However, there are some drawbacks associated with using the traditional piezoelectric ultrasound transducers such as difficulties in the fabrication of high-density arrays, which would aid in the acceleration of the imaging speed and alleviate motion artifact. The advent of microelectromechanical system (MEMS) technology has brought about the development of micromachined ultrasound transducers that would help to address this issue. Apart from the advantage of being able to be fabricated into arrays with lesser complications, the image quality of IVUS can be further enhanced with the easy integration of micromachined ultrasound transducers with complementary metal-oxide-semiconductor (CMOS). This would aid in the mitigation of parasitic capacitance, thereby improving the signal-to-noise. Currently, there are two commonly investigated micromachined ultrasound transducers, piezoelectric micromachined ultrasound transducers (PMUTs) and capacitive micromachined ultrasound transducers (CMUTs). Currently, PMUTs face a significant challenge where the fabricated PMUTs do not function as per their design. Thus, CMUTs with different array configurations have been developed for IVUS. In this paper, the different ultrasound transducers, including conventional-piezoelectric transducers, PMUTs and CMUTs, are reviewed, and a summary of the recent progress of CMUTs for IVUS is presented.
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Affiliation(s)
- Jiaqi Wang
- Department of Systems Design Engineering, Faculty of Engineering, University of Waterloo, Waterloo, ON N2L 3G1 Canada
| | - Zhou Zheng
- Department of Systems Design Engineering, Faculty of Engineering, University of Waterloo, Waterloo, ON N2L 3G1 Canada
| | - Jasmine Chan
- Department of Systems Design Engineering, Faculty of Engineering, University of Waterloo, Waterloo, ON N2L 3G1 Canada
| | - John T. W. Yeow
- Department of Systems Design Engineering, Faculty of Engineering, University of Waterloo, Waterloo, ON N2L 3G1 Canada
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PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array. MICROMACHINES 2020; 11:mi11050524. [PMID: 32455674 PMCID: PMC7281135 DOI: 10.3390/mi11050524] [Citation(s) in RCA: 12] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/27/2019] [Revised: 05/16/2020] [Accepted: 05/20/2020] [Indexed: 12/25/2022]
Abstract
Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d33 = 1500 pC/N), high electromechanical coefficient (kt = 0.81), and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such a piezoelectric composite. The array element was measured to have a central frequency of 20 MHz and a fractional bandwidth of approximately 77% at -6 dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite-based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H-based 20 MHz phased arrays. The focusing and steering capabilities of the obtained phased array were demonstrated theoretically and experimentally. These promising results indicate that the PIN-PMN-PT single crystal 1-3 composite-based high frequency phased array is a good candidate for ultrasound imaging applications.
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Venet M, Santa-Rosa W, M’Peko JC, Amorín H, Algueró M, Moreno R. Controlling colloidal processing of (K,Na)NbO3-based materials in aqueous medium. Ann Ital Chir 2019. [DOI: 10.1016/j.jeurceramsoc.2019.02.026] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/03/2023]
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Zhang Q, Pang X, Zhang Z, Su M, Hong J, Zheng H, Qiu W, Lam KH. Miniature Transducer Using PNN-PZT-based Ceramic for Intravascular Ultrasound. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2019; 66:1102-1109. [PMID: 30908214 DOI: 10.1109/tuffc.2019.2906652] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
In this work, the development and performance evaluation of a high-frequency miniature ultrasonic transducer based on a Pb(Ni1/3Nb2/3)O3-Pb(Zr0.3Ti0.7)O3 (PNN-PZT-based) ceramic for intravascular imaging application are reported. The fabricated PNN-PZT-based ceramic possesses ultrahigh relative clamped dielectric permittivity (.S/.0 = 3409) and high electromechanical coupling capability (kt = 0.60). A 42-MHz high-frequency side-looking ultrasonic transducer probe using the PNN-PZT-based ceramic with a miniature aperture of 0.33 mm × 0.33 mm was designed and fabricated, which exhibited a wide -6 dB bandwidth of 79% and an insertion loss of -19.6 dB. High spatial resolution, including the axial resolution of 36 μm and lateral resolution of 141 μm, was determined by imaging a 13-μm tungsten wire phantom. Ex vivo intravascular ultrasound (IVUS) imaging of a porcine coronary artery was performed to show the imaging capability of the miniature transducer. The results demonstrated the great potential of PNN-PZT-based ceramic for high-resolution miniature transducers application.
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Chen R, Jiang L, Zhang T, Matsuoka T, Yamazaki M, Qian X, Lu G, Safari A, Zhu J, Shung KK, Ma T, Zhou Q. Eco-Friendly Highly Sensitive Transducers Based on a New KNN-NTK-FM Lead-Free Piezoelectric Ceramic for High-Frequency Biomedical Ultrasonic Imaging Applications. IEEE Trans Biomed Eng 2018; 66:1580-1587. [PMID: 30452346 DOI: 10.1109/tbme.2018.2876063] [Citation(s) in RCA: 25] [Impact Index Per Article: 4.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Abstract
High-frequency ultrasonic imaging with improved spatial resolution has gained increasing attention in the field of biomedical imaging. Sensitivity of transducers plays a pivotal role in determining ultrasonic image quality. Conventional ultrasonic transducers are mostly made from lead-based piezoelectric materials that may be harmful to the human body and the environment. In this study, a new (K,Na)NbO3-KTiNbO5-BaZrO3-Fe2O3-MgO (KNN-NTK-FM) lead-free piezoelectric ceramic was utilized in developing eco-friendly transducers for high-frequency biomedical ultrasonic imaging applications. A needle transducer with a small active aperture size of 0.45 × 0.55 mm2 was designed and evaluated. The fabricated transducer exhibits great performance with a high center frequency (52.6 MHz), a good electromechanical coupling (keff ∼ 0.45), a large bandwidth (64.4% at -6 dB), and a very low two-way insertion loss (10.1 dB). Such high sensitivity is superior to those transducers based on other lead-free piezoelectric materials and can even be comparable to the lead-based ones. Imaging performance of the KNN-NTK-FM needle transducer was analyzed by imaging a wire phantom and an agar tissue-mimicking phantom. Imaging capabilities of the transducer were further demonstrated by ex vivo imaging studies on a porcine eyeball and a rabbit aorta. The results suggest that the KNN-NTK-FM piezoceramic has many attractive properties over other lead-free piezoelectric materials in developing eco-friendly highly sensitive transducers for high-frequency biomedical ultrasonic imaging applications.
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Zhang Z, Chen R, Wang B, Zhang T, Su M, Liu R, Yang J, Cao X, Li Y, Zheng H, Shung KK, Humayun MS, Zhou Q, Qiu W. Development of a KNN Ceramic-Based Lead-Free Linear Array Ultrasonic Transducer. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2018; 65:2113-2120. [PMID: 30183624 DOI: 10.1109/tuffc.2018.2868413] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
High-frequency array transducers can provide higher imaging resolution than traditional transducers, thus resolving smaller features and producing finer images. Commercially available ultrasonic transducers are mostly made with lead-based piezoelectric materials, which are harmful to the environment and public health. This paper presents the development of the 64-elements high-frequency (18.3 MHz) lead-free linear array ultrasonic transducer based on (K0.44Na0.52Li0.04)(Nb0.86Ta0.1Sb0.04)O3 (KNLNTS) piezoceramic. Array elements were spaced at a 75- pitch, and interconnected via a custom flexible circuit. The two matching layers and a light backing material were used to improve the performance of the array. The developed KNLNTS ceramic-based lead-free linear array exhibited a center frequency of 18.3 MHz, an average -6-dB bandwidth of 42%, an average two-way insertion loss of 41.8 dB, and a crosstalk between the adjacent elements of less than -53 dB near the center frequency. An image of a tungsten wire phantom was acquired using a Verasonics Vantage research ultrasound system. Results from imaging tests demonstrated a good imaging capability with a spatial resolution of axially and laterally, indicating that the lead-free linear array ultrasonic transducer based on KNLNTS ceramics is a promising alternative to lead-based transducers for ultrasound medical imaging.
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Sano KH, Karasawa R, Yanagitani T. ScAlN Thick-Film Ultrasonic Transducer in 40-80 MHz. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2018; 65:2097-2102. [PMID: 30418872 DOI: 10.1109/tuffc.2018.2865791] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
A medical ultrasound diagnostic system and an ultrasonic microscope are generally used in the frequency range of 1-20 MHz and 100 MHz-2 GHz, respectively. Ultrasonic transducers in the frequency range of 20-100 MHz are, therefore, not well developed because of less application into ultrasonic imaging or suitable piezoelectric materials with this frequency range. Polyvinylidene difluoride (PVDF) is usually used for ultrasonic transducers in the 10-50-MHz ranges. However, their electromechanical coupling coefficient of 4% is not enough for the practical uses. In order to excite the ultrasonic wave in the 20-100 MHz range, a 125-25- -thick piezoelectric film is required when the longitudinal velocity of the material is assumed to be 5000 m/s. However, it is difficult to grow such a thick piezoelectric film without a crack being caused by the internal stress during the dry deposition technique. We achieved a stress-free film growth by employing the unique hot target sputtering technique without heating the substrate. High-efficient 81- ( .5%) and 43-MHz ( %) ultrasonic generation by using the 43- and 90- extremely thick ScAlN (Sc: 39%) films were demonstrated, respectively. We discussed the advantage of ScAlN thick-film transducers by comparing them with the conventional PVDF transducer for the water medium.
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Zhang J, Ren W, Liu Y, Wu X, Fei C, Quan Y, Zhou Q. Fabrication and Characterization of High-Frequency Ultrasound Transducers Based on Lead-Free BNT-BT Tape-Casting Thick Film. SENSORS (BASEL, SWITZERLAND) 2018; 18:E3166. [PMID: 30235869 PMCID: PMC6165567 DOI: 10.3390/s18093166] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/01/2018] [Revised: 09/11/2018] [Accepted: 09/12/2018] [Indexed: 12/04/2022]
Abstract
A lead-free 0.94(Na0.5Bi0.5) TiO₃-0.06 BaTiO₃ (BNT-BT) thick film, with a thickness of 60 μm, has been fabricated using a tape-casting method. The longitudinal piezoelectric constant, clamped dielectric permittivity constant, remnant polarization and coercive field of the BNT-BT thick film were measured to be 150 pC/N, 1928, 13.6 μC/cm², and 33.6 kV/cm, respectively. The electromechanical coupling coefficient kt was calculated to be 0.55 according to the measured electrical impedance spectrum. A high-frequency plane ultrasound transducer was successfully fabricated using a BNT-BT thick film. The performance of the transducer was characterized and evaluated by the pulse-echo testing and wire phantom imaging operations. The BNT-BT thick film transducer exhibits a center frequency of 34 MHz, a -6 dB bandwidth of 26%, an axial resolution of 77 μm and a lateral resolution of 484 μm. The results suggest that lead-free BNT-BT thick film fabricated by tape-casting method is a promising lead-free candidate for high-frequency ultrasonic transducer applications.
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Affiliation(s)
- Junshan Zhang
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
- School of Equipment Engineering, Engineering University of People's Armed Police, Xi'an 710086, Shaanxi, China.
| | - Wei Ren
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
| | - Yantao Liu
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
| | - Xiaoqing Wu
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
| | - Chunlong Fei
- School of Microelectronics, Xidian University, Xi'an 740071, Shaanxi, China.
- Department of Ophthalmology and Biomedical Engineering, National Institutes of Health (NIH) Transducer Resource Center, University of Southern California, Los Angeles, CA 90089, USA.
| | - Yi Quan
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
| | - Qifa Zhou
- Department of Ophthalmology and Biomedical Engineering, National Institutes of Health (NIH) Transducer Resource Center, University of Southern California, Los Angeles, CA 90089, USA.
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Zhang T, Ou-Yang J, Yang X, Zhu B. Transferred PMN-PT Thick Film on Conductive Silver Epoxy. MATERIALS 2018; 11:ma11091621. [PMID: 30189636 PMCID: PMC6165122 DOI: 10.3390/ma11091621] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/25/2018] [Revised: 08/25/2018] [Accepted: 09/03/2018] [Indexed: 11/23/2022]
Abstract
Approximately 25 μm Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN-PT) thick film was synthesized based on a sol-gel/composite route. The obtained PMN-PT thick film was successfully transferred from the Silicon substrate to the conductive silver epoxy using a novel wet chemical method. The mechanism of this damage free transfer was explored and analyzed. Compared with the film on Silicon substrate, the transferred one exhibited superior dielectric, ferroelectric and piezoelectric properties. These promising results indicate that transferred PMN-PT thick film possesses the capability for piezoelectric device application, especially for ultrasound transducer fabrication. Most importantly, this chemical route opens a new path for transfer of thick film.
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Affiliation(s)
- Tao Zhang
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Jun Ou-Yang
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Xiaofei Yang
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Benpeng Zhu
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
- State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China.
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Quan Y, Ren W, Niu G, Wang L, Zhao J, Zhang N, Liu M, Ye ZG, Liu L, Karaki T. Large Piezoelectric Strain with Superior Thermal Stability and Excellent Fatigue Resistance of Lead-Free Potassium Sodium Niobate-Based Grain Orientation-Controlled Ceramics. ACS APPLIED MATERIALS & INTERFACES 2018; 10:10220-10226. [PMID: 29510619 DOI: 10.1021/acsami.8b01554] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Environment-friendly lead-free piezoelectric materials with high piezoelectric response and high stability in a wide temperature range are urgently needed for various applications. In this work, grain orientation-controlled (with a 90% ⟨001⟩c-oriented texture) (K,Na)NbO3-based ceramics with a large piezoelectric response ( d33*) = 505 pm V-1 and a high Curie temperature ( TC) of 247 °C have been developed. Such a high d33* value varies by less than 5% from 30 to 180 °C, showing a superior thermal stability. Furthermore, the high piezoelectricity exhibits an excellent fatigue resistance with the d33* value decreasing within only by 6% at a field of 20 kV cm-1 up to 107 cycles. These exceptional properties can be attributed to the vertical morphotropic phase boundary and the highly ⟨001⟩c-oriented textured ceramic microstructure. These results open a pathway to promote lead-free piezoelectric ceramics as a viable alternative to lead-based piezoceramics for various practical applications, such as actuators, transducers, sensors, and acoustic devices, in a wide temperature range.
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Affiliation(s)
- Yi Quan
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Wei Ren
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Gang Niu
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Lingyan Wang
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Jinyan Zhao
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Nan Zhang
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Ming Liu
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
| | - Zuo-Guang Ye
- Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research , Xi'an Jiaotong University , Xi'an 710049 , China
- Department of Chemistry and 4D LABS , Simon Fraser University , Burnaby , British Columbia V5A1S6 , Canada
| | - Liqiang Liu
- Department of Intelligent Systems Design Engineering, Faculty of Engineering , Toyama Prefectural University , 5180 Kurokawa , Imizu , Toyama 939-0398 , Japan
| | - Tomoaki Karaki
- Department of Intelligent Systems Design Engineering, Faculty of Engineering , Toyama Prefectural University , 5180 Kurokawa , Imizu , Toyama 939-0398 , Japan
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Zhang Z, Li F, Chen R, Zhang T, Cao X, Zhang S, Shrout TR, Zheng H, Shung KK, Humayun MS, Qiu W, Zhou Q. High-Performance Ultrasound Needle Transducer Based on Modified PMN-PT Ceramic With Ultrahigh Clamped Dielectric Permittivity. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2018; 65:223-230. [PMID: 29389654 DOI: 10.1109/tuffc.2017.2778738] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
A modified Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) polycrystalline ceramic with ultrahigh relative clamped dielectric permittivity ( ) and high piezoelectric properties ( pC/N, ) was used to fabricate high-frequency miniature ultrasound transducers. A 39-MHz high-frequency ultrasound needle transducer with a miniature aperture of 0.4 mm mm was designed and successfully characterized. The fabricated needle transducer had an electromechanical coupling factor of 0.55, large bandwidth of 80% at -6 dB, and low insertion loss of -13 dB. A wire phantom and porcine eyeball imaging study showed good imaging capability of this needle transducer. The transducer performance was found to be superior to that of other needle transducers with miniature apertures, making this modified PMN-PT ceramic-based needle transducer quite promising for minimally invasive procedures in medical applications.
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Wang X, Seetohul V, Chen R, Zhang Z, Qian M, Shi Z, Yang G, Mu P, Wang C, Huang Z, Zhou Q, Zheng H, Cochran S, Qiu W. Development of a Mechanical Scanning Device With High-Frequency Ultrasound Transducer for Ultrasonic Capsule Endoscopy. IEEE TRANSACTIONS ON MEDICAL IMAGING 2017; 36:1922-1929. [PMID: 28475050 DOI: 10.1109/tmi.2017.2699973] [Citation(s) in RCA: 23] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Wireless capsule endoscopy has opened a new era by enabling remote diagnostic assessment of the gastrointestinal tract in a painless procedure. Video capsule endoscopy is currently commercially available worldwide. However, it is limited to visualization of superficial tissue. Ultrasound (US) imaging is a complementary solution as it is capable of acquiring transmural information from the tissue wall. This paper presents a mechanical scanning device incorporating a high-frequency transducer specifically as a proof of concept for US capsule endoscopy (USCE), providing information that may usefully assist future research. A rotary solenoid-coil-based motor was employed to rotate the US transducer with sectional electronic control. A set of gears was used to convert the sectional rotation to circular rotation. A single-element focused US transducer with 39-MHz center frequency was used for high-resolution US imaging, connected to an imaging platform for pulse generation and image processing. Key parameters of US imaging for USCE applications were evaluated. Wire phantom imaging and tissue phantom imaging have been conducted to evaluate the performance of the proposed method. A porcine small intestine specimen was also used for imaging evaluation in vitro. Test results demonstrate that the proposed device and rotation mechanism are able to offer good image resolution ( [Formula: see text]) of the lumen wall, and they, therefore, offer a viable basis for the fabrication of a USCE device.
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New Potassium Sodium Niobate Single Crystal with Thickness-independent High-performance for Photoacoustic Angiography of Atherosclerotic Lesion. Sci Rep 2016; 6:39679. [PMID: 28000778 PMCID: PMC5175147 DOI: 10.1038/srep39679] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/18/2016] [Accepted: 11/25/2016] [Indexed: 11/09/2022] Open
Abstract
The synthesis of (K0.45Na0.55)0.96Li0.04NbO3 (KNLN) single crystals with a <100>-orientation, using a seed-free solid state crystal growth method, is described here. With the thickness of the crystals decreasing down to the order of tens of micrometers, this new lead-free single crystal exhibits thickness-independent electrical behavior, and maintains superior piezoelectric constant (d33 = 670 pC N-1) and electromechanical coupling factor (kt = 0.55). The successful fabrication of a tiny intravascular photoacoustic probe, with a 1 mm outside diameter, is achieved using a single crystal with a thickness of around 60 μm, in combination with a 200 μm core multimode fiber. Wire phantom photoacoustic images show that the axial resolution and lateral resolution of the single crystal based probe are 60 and 220 μm, respectively. In addition, intravascular photoacoustic imaging of the atherosclerotic lesion of a human artery is presented. In the time-domain and frequency-domain images, calcified regions are clearly distinguishable from surrounding tissue. These interesting results demonstrate that KNN-based lead-free piezoelectric single crystals are a promising candidate to substitute for lead-based piezoelectric materials for photoacoustic imaging in the future.
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