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For: Liddle JA, Hoskins BD, Vladár AE, Villarrubia JS. Electron beam-based metrology after CMOS. APL Mater 2018. [PMID: 30984475 DOI: 10.1063/l.5038249] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
Number Cited by Other Article(s)
1
Orji NG, Badaroglu M, Barnes BM, Beitia C, Bunday BD, Celano U, Kline RJ, Neisser M, Obeng Y, Vladar AE. Metrology for the next generation of semiconductor devices. NATURE ELECTRONICS 2018;1:10.1038/s41928-018-0150-9. [PMID: 31276101 PMCID: PMC6605074 DOI: 10.1038/s41928-018-0150-9] [Citation(s) in RCA: 116] [Impact Index Per Article: 16.6] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/15/2018] [Accepted: 08/21/2018] [Indexed: 05/02/2023]
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