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For: Blank P, Wittmaack K. The influence of implanted xenon on the sputtering yield of silicon. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337577508233004] [Citation(s) in RCA: 20] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
Number Cited by Other Article(s)
1
Roush ML, Andreadis TD, Goktepe OF. Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578108225473] [Citation(s) in RCA: 74] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
2
Sielanko J, Sowa M. The influence of radiation damage on the sputtering yield of silicon. ACTA ACUST UNITED AC 1983. [DOI: 10.1016/0167-5087(83)90842-6] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
3
Kirschner J, Etzkorn H. Sputtering of amorphous silicon films by 0.5 to 5 keV Ar+ ions. ACTA ACUST UNITED AC 1979. [DOI: 10.1016/0378-5963(79)90024-2] [Citation(s) in RCA: 51] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
4
Wach W, Wittmaack K. Comparison of xenon retention in ion implanted silicon dioxide and oxygen-doped silicon. ACTA ACUST UNITED AC 1978. [DOI: 10.1016/0029-554x(78)90870-4] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
5
Wittmaack K, Blank P, Wach W. High fluence retention of noble gases implanted in silicon. ACTA ACUST UNITED AC 1978. [DOI: 10.1080/00337577808237907] [Citation(s) in RCA: 39] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
6
Transmission sputtering yields of gold at 6.8 MeV. ACTA ACUST UNITED AC 1976. [DOI: 10.1007/bf00897068] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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