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For: Blank P, Wittmaack K. Implications in the use of sputtering for layer removal: the system Au on Si. ACTA ACUST UNITED AC 1979. [DOI: 10.1080/01422447908226479] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
Number Cited by Other Article(s)
1
Kelly R. The mechanisms of sputtering part I. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578408216469] [Citation(s) in RCA: 57] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
2
Newcombe R, Christodoulides CE, Carter G, Tognetti P. Ion bombardment enhanced mixing op silver layers on silicon. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/01422448008225599] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
3
Surface Compositional Changes by Particle Bombardment. ACTA ACUST UNITED AC 1984. [DOI: 10.1007/978-3-642-82253-7_7] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register]
4
Wittmaack K. Impact-energy dependence of atomic mixing and selective sputtering of light impurities in cesium-bombarded silicon. ACTA ACUST UNITED AC 1983. [DOI: 10.1016/0167-5087(83)90799-8] [Citation(s) in RCA: 26] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
5
Roush M, Goktepe O, Andreadis T, Davarya F. Simulation of recoil mixing in solids produced by energetic atom beams. ACTA ACUST UNITED AC 1982. [DOI: 10.1016/0029-554x(82)90591-2] [Citation(s) in RCA: 32] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
6
SIMS analysis of low temperature ohmic contacts to GaAs. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0378-5963(81)90031-3] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
7
Ion bombardment induced interface mixing in the AgSi system. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0029-554x(81)90677-7] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
8
Williams P, Baker JE. Implantation and ion beam mixing in thin film analysis. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0029-554x(81)90667-4] [Citation(s) in RCA: 72] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
9
Malherbe JB, Hofmann S. Low energy nitrogen implantation profiles in cobalt using AES. SURF INTERFACE ANAL 1980. [DOI: 10.1002/sia.740020507] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
10
Reuter W, Wittmaack K. An AES-SIMS study of silicon oxidation induced by ion or electron bombardment. ACTA ACUST UNITED AC 1980. [DOI: 10.1016/0378-5963(80)90063-x] [Citation(s) in RCA: 76] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
11
Wittmaack K, Blank P. Projectile-energy dependence of compositional changes produced in sputtering of a dilute Si(Fe, W) alloy. ACTA ACUST UNITED AC 1980. [DOI: 10.1016/0029-554x(80)91035-6] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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