Vibration control of cantilever beam using poling tuned piezoelectric actuator

Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams

In micron or nano smart sensing systems, piezoelectric cantilever beams are distributed as major components in microsensors, actuators, and energy harvesters. This paper investigates the performance of four cantilever beam devices with "electric-force" conversion based on the inverse piezoelectric effect of lithium niobate (LiNbO3, LN) single-crystal materials. A new compact piezoelectric smart device model is proposed, designed as a single mass block connected by four beams, where devices exhibit smaller lateral errors (0.39-0.41%). The relationship between the displacement characteristics of cantilever beams and driving voltage was researched by applying excitation signals. The results show that the device has the maximum displacement at a first-order intrinsic frequency (fosc = 11.338 kHz), while the displacement shows a good linear relationship (R2 = 0.998) with driving voltage. The square wave signals of the same amplitude have greater "electrical-force" conversion efficiency. The output displacement can reach 12 nm, which is much higher than the output displacement with sinusoidal excitation. In addition, the relative displacement deviation of devices can be maintained within ±1% under multiple cycles of electrical signal loading. The small size, high reliability, and ultra-stability of Si-LN ferroelectric single-crystal cantilever beam devices with lower vibration amplitudes are promising for nanopositioning techniques in microscopy, diagnostics, and high-precision manufacturing applications.

Development of a Novel Piezoelectric Actuator Based on Stick-Slip Principle by Using Asymmetric Constraint

In this work, a novel piezoelectric actuator based on the stick-slip principle is proposed. The actuator is constrained by an asymmetric constraint approach; the driving foot produces lateral and longitudinal coupling displacements when the piezo stack is extended. The lateral displacement is used to drive the slider and the longitudinal displacement is used to compress the slider. The stator part of the proposed actuator is illustrated and designed by simulation. The operating principle of the proposed actuator is described in detail. The feasibility of the proposed actuator is verified by theoretical analysis and finite element simulation. A prototype is fabricated and some experiments are carried out to study the proposed actuator's performance. The experimental results show that the maximum output speed of the actuator is 3680 μm/s when the locking force is 1 N under the voltage of 100 V and frequency of 780 Hz. The maximum output force is 3.1 N when the locking force is 3 N. The displacement resolution of the prototype is measured as 60 nm under the voltage of 15.8 V, frequency of 780 Hz and locking force of 1 N.