Coupling of morphology to surface transport in ion-beam-irradiated surfaces: normal incidence and rotating targets

Surface nanopatterning by ion beam irradiation: compositional effects

Surface nanopatterning induced by ion beam irradiation (IBI) has emerged as an effective nanostructuring technique since it induces patterns on large areas of a wide variety of materials, in short time, and at low cost. Nowadays, two main subfields can be distinguished within IBI nanopatterning depending on the irrelevant or relevant role played by the surface composition. In this review, we give an up-dated account of the progress reached when surface composition plays a relevant role, with a main focus on IBI surface patterning with simultaneous co-deposition of foreign atoms. In addition, we also review the advances in IBI of compound surfaces as well as IBI systems where the ion employed is not a noble gas species. In particular, for the IBI with concurrent metal co-deposition, we detail the chronological evolution of these studies because it helps us to clarify some contradictory early reports. We describe the main patterns obtained with this technique as a function of the foreign atom deposition pathway, also focusing in those systematic studies that have contributed to identify the main mechanisms leading to the surface pattern formation and development. Likewise, we explain the main theoretical models aimed at describing these nanopattern formation processes. Finally, we address two main special features of the patterns induced by this technique, namely, the enhanced pattern ordering and the possibility to produce both morphological and chemical patterns.

Model discovery for studies of surface morphological modifications based on Kuramoto-Sivashinsky dynamics

A wide range of observations in studies of surfaces exposed to ion beams can be explained and analyzed successfully by continuum models of the Kuramoto-Sivashinsky type. Despite certain progress in the theoretical understanding of the model parameters on the basis of atomistic models, much of the applications are based on phenomenological determination of several unknown quantities. In this work a numerical tool is discussed and investigated, which allows us to determine model coefficients and complex model structures from experimental findings. The method resembles known approaches in machine learning and data-driven reconstruction techniques. To keep the discussion on a fundamental level, numerical simulations are conducted by employing a scaled test model. The reconstruction technique is demonstrated for this model system and shows a high accuracy in recovering input parameters for situations without beam noise. As an application to an unknown system to be explored, the algorithm is then applied to a system with lognormal distributed ion bombardment. The impact of the beam fluctuations in the proposed model are discussed. Perspectives of the numerical algorithm for an analysis of experimental data are addressed.

Spatially Engraving Morphological Structure on a Polymeric Surface by Ion Beam Milling

Polymer surface patterning and modification at the micro/nano scale has been discovered with great impact in applications such as microfluidics and biomedical technologies. We propose a highly efficient fabricating strategy, to achieve a functional polymer surface, which has control over the surface roughness. The key development in this fabrication method is the polymer positive diffusion effect (PDE) for an ion-bombarded polymeric hybrid surface through focused ion beam (FIB) technology. The PDE is theoretically explored by introducing a positive diffusion term into the classic theory. The conductivity-induced PDE constant is discussed as functions of substrates conductivity, ion energy and flux. The theoretical results agree well with the experiential results on the conductivity-induced PDE, and thus yield good control over roughness and patterning milling depth on the fabricated surface. Moreover, we demonstrate a controllable surface wettability in hydrophobic and superhydrophobic surfaces (contact angles (CA) range from 108.3° to 150.8°) with different CA hysteresis values ranging from 31.4° to 8.3°.

Nanoscale patterns formed by ion bombardment of rotating binary materials

We explore the effects of sample rotation during ion sputtering of binary materials, as well as its effects during surfactant sputtering. We find that the rate with which the surface roughens or smooths depends on the period of rotation t(0) in the early time regime, in contrast to the behavior of elemental materials. In addition, the characteristic length scale l of the patterns that emerge can be tuned merely by changing the value of t(0). Finally, we demonstrate that l can even exhibit a jump discontinuity as t(0) is varied.

Dynamics of GDOES-induced surface roughening in metal interfaces

The roughness induced during glow-discharge optical-emission spectroscopy (GDOES) measurements has been reported to cause a loss of resolution during GDOES depth-profiling analysis. In this paper, we undertake for the first time a study of the dynamics of the surface morphology of chromium and titanium thin films (designed in mono and multilayer structures) under the impinging of GDOES incoming ions. We performed this study under the theoretical framework of the dynamic scaling theory, by analysing surface morphology changes, as measured ex-situ by AFM, with irradiation time. For single metal layers it was found that, after an initial surface smoothening, the surface undergoes a rapid steep roughening for both systems, with quite similar quantitative dynamics. Once this roughening ends a second temporal scaling regime arises, operating for long length scales with dynamics depending on the sputtering rate of the material. For the chromium layer, with a very high sputtering rate of 5.5 μm min(-1), this regime is consistent with the KPZ model, whereas for the titanium layer an EW scaling regime is indicated. These different scaling regimes are consistent with the development of larger surface slopes for the Cr system. In the multilayer systems, the initial roughness induced on the top Cr layer by GDOES has similar dynamics to that for single-layer Cr. However, a clear decrease in the roughness was observed once the underlying Ti layer, with a lower sputtering rate, was reached. This decrease in the induced roughness is maintained while the Ti layer is eroded. Therefore, choice of appropriate material (i.e. sputtering yield values) combinations and of their depth of location can enable tuning of GDOES-induced roughness and achieve substantial control over the depth profiling process.

Ion beam sputtered surface dynamics investigated with two-time correlation functions: a model study

Ion beam sputtering is a widely used technique to obtain patterned surfaces. Despite the wide use of this approach on different materials to create surface nanostructures, the theoretical model to explain the time evolution of the erosion process is still debated. We show, with the help of simulations, that two-time correlation functions can serve to assess the validity of different models. These functions can be measured experimentally with the x-ray photon correlation spectroscopy technique.

Independence of interrupted coarsening on initial system order: ion-beam nanopatterning of amorphous versus crystalline silicon targets

Interrupted coarsening (IC) has recently been identified as an important feature for the dynamics of the typical length-scale in pattern-forming systems on surfaces. In practice, it can be beneficial to improve pattern ordering since it combines a certain degree of defect suppression with a limited increase in the typical pattern wavelength. However, little is known about its robustness with respect to changes in the preparation of the initial system for cases with potential applications. Working in the context of nano-scale pattern formation by ion-beam sputtering (IBS), we prove that IC properties do not depend on sample preparation. Specifically, interface dynamics under IBS is quantitatively compared on virgin amorphous and crystalline silicon surfaces, using 1 keV Ar(+) ions at normal incidence where nanodot pattern formation is triggered by concurrent co-deposition of Fe atoms during processing. Atomic force microscopy shows that dot patterns with similar spatial order and dynamics are obtained in both cases, underscoring the key dynamical role of the amorphous surface layer produced by irradiation. Both systems have been quantitatively described by an effective interface equation. We employ a new procedure based on the linear growth of the initial surface correlations to accurately estimate the equation coefficients. Such a method improves the predictive power of the interface equation with respect to previous studies and leads to a better description of the experimental pattern and its dynamical features.

Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment

Nanopatterning of solid surfaces by low-energy ion bombardment has received considerable interest in recent years. This interest was partially motivated by promising applications of nanopatterned substrates in the production of functional surfaces. Especially nanoscale ripple patterns on Si surfaces have attracted attention both from a fundamental and an application related point of view. This paper summarizes the theoretical basics of ion-induced pattern formation and compares the predictions of various continuum models to experimental observations with special emphasis on the morphology development of Si surfaces during sub-keV ion sputtering.

Spontaneous pattern formation induced by ion bombardment of binary compounds

A theory is developed that explains the genesis of the strikingly regular hexagonal arrays of nanoscale mounds that can form when a flat surface of a binary compound is subjected to normal-incidence ion bombardment. We find that the species with the higher sputter yield is concentrated at the peaks of the nanodots and that hysteretic switching between the flat and the hexagonally ordered state can occur as the sample temperature is varied. Surface ripples are predicted to emerge for a certain range of the parameters.

Observation and modeling of interrupted pattern coarsening: surface nanostructuring by ion erosion

We report the experimental observation of interrupted coarsening for surface self-organized nanostructuring by ion erosion. Analysis of the target surface by atomic force microscopy allows us to describe quantitatively this intriguing type of pattern dynamics through a continuum equation put forward in different contexts across a wide range of length scales. The ensuing predictions can thus be consistently extended to other experimental conditions in our system. Our results illustrate the occurrence of nonequilibrium systems in which pattern formation, coarsening, and kinetic roughening appear, each of these behaviors being associated with its own spatiotemporal range.