Controlled positive and negative surface charge injection and erasure in a GaAs/AlGaAs based microdevice by scanning probe microscopy

Stability of Charge Distributions in Electret Films on the nm-Scale

Electret materials find use in various applications, such as microphones or filter media. In recent years, electrets have been used also increasingly on the micrometer scale, for example, in MEMS or for nano-xerography. However, for these applications, it becomes more important to prepare defined charge structures with sub-micrometer features. On the macroscopic level, the technique of isothermal potential decay at elevated temperatures has been developed to study aging effects and charge retention capabilities in electret materials. Here, we extend this technique to the nm-level by means of AFM-based methods, such as contact charging by AFM and the Kelvin probe force microscopy. Defined charge distributions in polyetherimide (PEI) ULTEM 1000 thin-film electrets have been studied for the first time with a high lateral resolution on the nanometer scale. We found a linear correlation between externally applied contact charging potential on the AFM-tip and the resulting relative surface potential on the PEI film. Charge decay at elevated temperatures is independent from the length scale. The same time dependence as for macroscopic, homogenously charged films could be established. We observe a potential decay only at an elevated temperature of 120 °C and no significant lateral charge transport. Thus, we propose a thermally enhanced charge carrier release from surface traps and a subsequent charge migration to the back electrode as the dominant mechanism. This finding is in-line with the observation that potential decay can be reduced also on the nm-level by pre-annealing the film slightly below the glass transition temperature. In contrast to many polymeric or inorganic electrets, no lateral charge migration is observed. Therefore, the charge patterns are preserved for PEI ULTEM 1000 thin-film electrets, which makes it a good candidate as electret for applications in MEMS or similar applications.

Charge distribution from SKPM images

Inferring the surface charge distribution from experimental Kelvin probe microscopy measurements is usually a hard task. Although several approximations have been proposed in order to estimate the effect of these charges, the real inverse problem has not been addressed so far. In this paper, we propose a fast and intuitive method based on Fast Fourier Transform algorithms that allows the surface charge distribution to be obtained directly from the experimental Kelvin voltage measurements. With this method, quantitative physical information such as the total charge and charge position is accessible even in complex charge distributions such as highly insulating polymer surfaces. Moreover, one of the strongest points is that sub-tip resolution is achieved, and therefore the usually unknown charge size can be estimated.

Localized charge imaging with scanning Kelvin probe microscopy

In this work, we propose an intuitive and easily implementable approach to model and interpret scanning Kelvin probe microscopy images of insulating samples with localized charges. The method, based on the image charges method, has been validated by a systematic comparison of its predictions with experimental measurements performed on charge domains of different sizes, injected in polymethyl methacrylate discontinuous films. The agreement between predictions and experimental lateral profiles, as well as with spectroscopy tip-sample distance curves, supports its consistency. The proposed procedure allows obtaining quantitative information such as total charge and the size of a charge domain and allows estimating the most adequate measurement parameters.