Correlation lengths, porosity and water adsorption in TiO₂ thin films prepared by glancing angle deposition

Conformal TiO2 Aerogel-Like Films by Plasma Deposition: from Omniphobic Antireflective Coatings to Perovskite Solar Cell Photoelectrodes

The ability to control the porosity of thin oxide films is a key factor determining their properties. Despite the abundance of dry processes for synthesizing oxide porous layers, a high porosity range is typically achieved by spin-coating-based wet chemical methods. Besides, special techniques such as supercritical drying are required to replace the pore liquid with air while maintaining the porous network. In this study, we propose a new method for the fabrication of ultraporous titanium dioxide thin films at room or mild temperatures (T ≤ 120 °C) by a sequential process involving plasma deposition and etching. These films are conformal to the substrate topography even for high-aspect-ratio substrates and show percolated porosity values above 85% that are comparable to those of advanced aerogels. The films deposited at room temperature are amorphous. However, they become partly crystalline at slightly higher temperatures, presenting a distribution of anatase clusters embedded in the sponge-like open porous structure. Surprisingly, the porous structure remains after annealing the films at 450 °C in air, which increases the fraction of embedded anatase nanocrystals. The films are antireflective, omniphobic, and photoactive, becoming superhydrophilic when subjected to ultraviolet light irradiation. The supported, percolated, and nanoporous structure can be used as an electron-conducting electrode in perovskite solar cells. The properties of the cells depend on the aerogel-like film thickness, which reaches efficiencies close to those of commercial mesoporous anatase electrodes. This generic solvent-free synthesis is scalable and applicable to ultrahigh porous conformal oxides of different compositions, with potential applications in photonics, optoelectronics, energy storage, and controlled wetting.

Titania Enhanced Photocatalysis and Dye Giant Absorption in Nanoporous 1D Bragg Microcavities

Light trapping effects are known to boost the photocatalytic degradation of organic molecules in 3D photonic structures of anatase titania (a-TiO₂) with an inverse opal configuration. In the present work, we show that photocatalytic activity can also be enhanced in a-TiO₂ thin films if they are incorporated within a nanoporous 1D optical resonant microcavity. We have designed and manufactured multilayer systems that, presenting a high open porosity to enable a straightforward diffusion of photodegradable molecules, provide light confinement effects at wavelengths around the absorption edge of photoactive a-TiO₂. In brief, we have observed that a nanoporous 1D Bragg microcavity prepared by electron beam evaporation at oblique angles comprising a central defect layer of nanoporous a-TiO₂ boosts the photocatalytic degradation of nitrobenzene and methyl orange dye solutions. The multilayer structure of the microcavity was designed to ensure the appearance of optical resonances at the a-TiO₂ layer location and wavelengths around the absorption onset of this semiconductor. In this porous 1D Bragg microcavity, the diffusion constraints of molecules through the capping layers covering the a-TiO₂ are effectively compensated by an increase in the photocatalytic activity due to the light confinement phenomena. We also report that the absorption coefficient of methyl orange dye solution infiltrated within the pore structure of the microcavity is exalted at the wavelengths of the corresponding optical resonances. This effect gives rise to a small but non-negligible visible light photodegradation of dye molecules. The possibilities of tailoring the design of 1D photonic systems to boost the photocatalytic activity of a-TiO₂ are discussed.

Nanostructured Titanium Dioxide Surfaces for Electrochemical Biosensing

TiO2 electrochemical biosensors represent an option for biomolecules recognition associated with diseases, food or environmental contaminants, drug interactions and related topics. The relevance of TiO2 biosensors is due to the high selectivity and sensitivity that can be achieved. The development of electrochemical biosensors based on nanostructured TiO2 surfaces requires knowing the signal extracted from them and its relationship with the properties of the transducer, such as the crystalline phase, the roughness and the morphology of the TiO2 nanostructures. Using relevant literature published in the last decade, an overview of TiO2 based biosensors is here provided. First, the principal fabrication methods of nanostructured TiO2 surfaces are presented and their properties are briefly described. Secondly, the different detection techniques and representative examples of their applications are provided. Finally, the functionalization strategies with biomolecules are discussed. This work could contribute as a reference for the design of electrochemical biosensors based on nanostructured TiO2 surfaces, considering the detection technique and the experimental electrochemical conditions needed for a specific analyte.

Form Birefringence in Resonant Transducers for the Selective Monitoring of VOCs under Ambient Conditions

In this work, we have developed a new kind of nanocolumnar birefringent Bragg microcavity (BBM) that, tailored by oblique angle deposition, behaves as a selective transducer of volatile organic compounds (VOCs). Unlike the atomic lattice origin of birefringence in anisotropic single crystals, in the BBM, it stems from an anisotropic self-organization at the nanoscale of the voids and structural elements of the layers. The optical adsorption isotherms recorded upon exposure of these nanostructured systems to water vapor and VOCs have revealed a rich yet unexplored phenomenology linked to their optical activity that provides both capacity for vapor identification and partial pressure determination. This photonic response has been reproduced with a theoretical model accounting for the evolution of the form birefringence of the individual layers upon vapor condensation in nanopores and internanocolumnar voids. BBMs that repel water vapor but are accessible to VOCs have been also developed through grafting of their internal surfaces with perfluorooctyltriethoxysilane molecules. These nanostructured photonic systems are proposed for the development of transducers that, operating under environmental conditions, may respond specifically to VOCs without any influence by the degree of humidity of the medium.

Fabrication of TiO2-based broadband single-layer anti-reflection coating by collimated glancing angle deposition technique

Single-sided TiO2 thin films were prepared using a modified glancing angle deposition (GLAD) technique. An additional flux collimation plate was introduced into the GLAD arrangement to enhance the degree of collimation of depositing vapour flux. Enhancement in the ballistic growth of film on the substrate was observed with increasing distance from the vapour source. The substrate position near to the vapour source (i.e. bottom region) showed a high refractive index (RI, ∼1.336 @ 550 nm wavelength) and lower average film transmittance (∼94.5% in 400-900 nm wavelength range) compared to the others. In contrast, the TiO2 coating deposited at a distant position from the source (i.e. top region) showed a remarkably low RI (∼1.190 @ 550 nm wavelength) and excellent anti-reflection over a broad spectral region with a maximum average transmittance (∼95.3% in 400-900 nm wavelength) compared to the other substrate positions. The reduction in film RI was correlated qualitatively with the morphological alterations in the coating for different substrate positions. With a further increase in distance from the vapour source, an ultimate reduction in the RI of TiO2 to ∼1.101 was observed, which was ∼50% lower than the bulk TiO2 value (∼2.221 @ 550 nm wavelength). The present study reports the lowest RI of TiO2 together with fabrication of a TiO2-based broadband single-layer anti-reflection coating.

Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects

Nanostructuration and 2D patterning of thin films are common strategies to fabricate biomimetic surfaces and components for microfluidic, microelectronic or photonic applications. This work presents the fundamentals of a surface nanotechnology procedure for laterally tailoring the nanostructure and crystalline structure of thin films that are plasma deposited onto acoustically excited piezoelectric substrates. Using magnetron sputtering as plasma technique and TiO₂ as case example, it is demonstrated that the deposited films depict a sub-millimetre 2D pattern that, characterized by large lateral differences in nanostructure, density (up to 50%), thickness, and physical properties between porous and dense zones, reproduces the wave features distribution of the generated acoustic waves (AW). Simulation modelling of the AW propagation and deposition experiments carried out without plasma and under alternative experimental conditions reveal that patterning is not driven by the collision of ad-species with mechanically excited lattice atoms of the substrate, but emerges from their interaction with plasma sheath ions locally accelerated by the AW-induced electrical polarization field developed at the substrate surface and growing film. The possibilities of the AW activation as a general approach for the tailored control of nanostructure, pattern size, and properties of thin films are demonstrated through the systematic variation of deposition conditions and the adjustment of AW operating parameters.

Aggregation of Silica Nanoparticles in Sol-Gel Processes to Create Optical Coatings with Controllable Ultralow Refractive Indices

Optical coatings with controllable ultralow refractive indices are of profound significance in optical areas. However, it remains a challenge to fabricate such coatings using a simple method. Here we develop an effective and simple approach to create ultra-low-index coatings. This approach was based on a modified sol-gel process, with a key process that involved the aggregation of silica nanoparticles via the addition of a polymer surfactant (e.g., polyvinylpyrrolydone) in sols before coating. The approach involves three steps: the synthesis of silica sols under ammonia catalysis in ethanol (Stöber method), the addition of polyvinylpyrrolydone in the silica sols to induce the aggregation of the silica nanoparticles, and the formation of ultra-low-index coatings by depositing the aggregated silica sols on substrates. Through varying the aggregation extent, this approach produced coatings with controllable refractive indices ranging from 1.17 to 1.07. To the best of our knowledge, the minimum index value of 1.07 from our coating is among the lowest refractive indices ever reported. The ultra-low-index coatings demonstrated excellent optical properties, with which perfect quarter-wavelength antireflection coatings (maximum transmittance ∼100%) and broadband antireflection coatings (transmittance >98% from 400 to 1100 nm) can be prepared. One advantage of the antireflection coatings is that their transmission is less dependent on the refractive index and the thickness of the stacking layer, which make it promising in large-scale production. Moreover, the coatings can be made hydrophobic (water contact angle 136°) by exposing the coatings to a hexamethyldisilazane atmosphere, exhibiting high environmental stability in a humid environment. The aggregation of silica nanoparticles in sol-gel processes provides a scalable alternative to the current approaches for creating ultra-low-index coatings.

Glancing-angle-deposited silica films for ultraviolet wave plates

Birefringent silica films are formed by glancing-angle deposition to fabricate quarter- and half-wave plates at a wavelength of 351 nm. A multilayer design is implemented to achieve low-loss transmittance with a high 351-nm laser-induced damage threshold.

Nanoplasmonic response of porous Au-TiO2 thin films prepared by oblique angle deposition

In this work, a versatile method is proposed to increase the sensitivity of optical sensors based on the localized surface plasmon resonance (LSPR) phenomenon. It combines a physical deposition method with the oblique angle deposition technique, allowing the preparation of plasmonic thin films with tailored porosity. Thin films of Au-TiO₂ were deposited by reactive magnetron sputtering in a 3D nanostructure (zigzag growth), at different incidence angles (0° ≤ α ≤ 80°), followed by in-air thermal annealing at 400 °C to induce the growth of the Au nanoparticles. The roughness and surface porosity suffered a gradual increment by increasing the incidence angle. The resulting porous zigzag nanostructures that were obtained also decreased the principal refractive indexes (RIs) of the matrix and favoured the diffusion of Au through grain boundaries, originating broader nanoparticle size distributions. The transmittance minimum of the LSPR band appeared at around 600 nm, leading to a red-shift to about 626 nm for the highest incidence angle α = 80°, due to the presence of larger (scattering) nanoparticles. It is demonstrated that zigzag nanostructures can enhance adsorption sites for LSPR sensing by tailoring the porosity of the thin films. Atmosphere controlled transmittance-LSPR measurements showed that the RI sensitivity of the films is improved for higher incidence angles.

Vacuum template synthesis of multifunctional nanotubes with tailored nanostructured walls

A three-step vacuum procedure for the fabrication of vertical TiO₂ and ZnO nanotubes with three dimensional walls is presented. The method combines physical vapor deposition of small-molecules, plasma enhanced chemical vapor deposition of inorganic functional thin films and layers and a post-annealing process in vacuum in order to remove the organic template. As a result, an ample variety of inorganic nanotubes are made with tunable length, hole dimensions and shapes and tailored wall composition, microstructure, porosity and structure. The fabrication of multishell nanotubes combining different semiconducting oxides and metal nanoparticles is as well explored. This method provides a feasible and reproducible route for the fabrication of high density arrays of vertically alligned nanotubes on processable substrates. The emptying mechanism and microstructure of the nanotubes have been elucidated through SEM, STEM, HAADF-STEM tomography and energy dispersive X-ray spectroscopy. In this article, as a proof of concept, it is presented the straightforward integration of ZnO nanotubes as photoanode in a photovoltaic cell and as a photonic oxygen gas sensor.

Optofluidic Modulation of Self-Associated Nanostructural Units Forming Planar Bragg Microcavities

Bragg microcavities (BMs) formed by the successive stacking of nanocolumnar porous SiO2 and TiO2 layers with slanted, zigzag, chiral, and vertical configurations are prepared by physical vapor deposition at oblique angles while azimuthally varying the substrate orientation during the multilayer growth. The slanted and zigzag BMs act as wavelength-selective optical retarders when they are illuminated with linearly polarized light, while no polarization dependence is observed for the chiral and vertical cavities. This distinct optical behavior is attributed to a self-nanostructuration mechanism involving a fence-bundling association of nanocolumns as observed by focused ion beam scanning electron microscopy in the slanted and zigzag microcavities. The outstanding retarder response of the optically active BMs can be effectively modulated by dynamic infiltration of nano- and mesopores with liquids of different refraction indices acting as a switch of the polarization behavior. The unprecedented polarization and tunable optofluidic properties of these nanostructured photonic systems have been successfully simulated with a simple model that assumes a certain birefringence for the individual stacked layers and accounts for the light interference phenomena developed in the BMs. The possibilities of this type of self-arranged nanostructured and optically active BMs for liquid sensing and monitoring applications are discussed.

Ripening and recrystallization of NaCl nanocrystals in humid conditions

This study shows that Ostwald ripening, a universal mechanism responsible for the increase of crystal size during precipitation, can be meditated by ion diffusion through condensed monolayers of water that connect separated nanocrystals.

Single-step fabrication process of 1-D photonic crystals coupled to nanocolumnar TiO2 layers to improve DSC efficiency

The present work proposes the use of a TiO₂ electrode coupled to a one-dimensional photonic crystal (1DPC), all formed by the sequential deposition of nanocolumnar thin films by physical vapor oblique angle deposition (PV-OAD), to enhance the optical and electrical performance of DSCs while transparency is preserved. We demonstrate that this approach allows building an architecture combining a non-dispersive 3 µm of TiO₂ electrode and 1 µm TiO₂-SiO₂ 1DPC, both columnar, in a single-step process. The incorporation of the photonic structure is responsible for a rise of 30% in photovoltaic efficiency, as compared with a transparent cell with a single TiO₂ electrode. Detailed analysis of the spectral dependence of the photocurrent demonstrates that the 1DPC improves light harvesting efficiency by both back reflection and optical cavity modes confinement within the TiO₂ films, thus increasing the overall performance of the cell.

Ultraviolet Pretreatment of Titanium Dioxide and Tin-Doped Indium Oxide Surfaces as a Promoter of the Adsorption of Organic Molecules in Dry Deposition Processes: Light Patterning of Organic Nanowires

In this article we present the preactivation of TiO2 and ITO by UV irradiation under ambient conditions as a tool to enhance the incorporation of organic molecules on these oxides by evaporation at low pressures. The deposition of π-stacked molecules on TiO2 and ITO at controlled substrate temperature and in the presence of Ar is thoroughly followed by SEM, UV-vis, XRD, RBS, and photoluminescence spectroscopy, and the effect is exploited for the patterning formation of small-molecule organic nanowires (ONWs). X-ray photoelectron spectroscopy (XPS) in situ experiments and molecular dynamics simulations add critical information to fully elucidate the mechanism behind the increase in the number of adsorption centers for the organic molecules. Finally, the formation of hybrid organic/inorganic semiconductors is also explored as a result of the controlled vacuum sublimation of organic molecules on the open thin film microstructure of mesoporous TiO2.

Anisotropic In-Plane Conductivity and Dichroic Gold Plasmon Resonance in Plasma-Assisted ITO Thin Films e-Beam-Evaporated at Oblique Angles

ITO thin films have been prepared by electron beam evaporation at oblique angles (OA), directly and while assisting their growth with a downstream plasma. The films microstructure, characterized by scanning electron microscopy, atomic force microscopy, and glancing incidence small-angle X-ray scattering, consisted of tilted and separated nanostructures. In the plasma assisted films, the tilting angle decreased and the nanocolumns became associated in the form of bundles along the direction perpendicular to the flux of evaporated material. The annealed films presented different in-depth and sheet resistivity as confirmed by scanning conductivity measurements taken for the individual nanocolumns. In addition, for the plasma-assisted thin films, two different sheet resistance values were determined by measuring along the nanocolumn bundles or the perpendicular to it. This in-plane anisotropy induces the electrochemical deposition of elongated gold nanostructures. The obtained Au-ITO composite thin films were characterized by anisotropic plasmon resonance absorption and a dichroic behavior when examined with linearly polarized light.

Asymmetric grazing incidence small angle x-ray scattering and anisotropic domain wall motion in obliquely grown nanocrystalline Co films

Strong asymmetries have been observed in grazing incidence small angle x-ray scattering (GISAXS) in situ patterns obtained from 30 nm-thick nanocrystalline Co films prepared by oblique sputtering (15°-75° off-sample normal). These asymmetries have been qualitatively simulated by a simple model consisting of an ensemble of 8 nm-wide inclined Co nanocolumns. It is found that narrow inclined features appear in the diffuse background resembling those characteristic of faceted systems, which can be used to obtain straightforward non-destructive estimations of buried nanocolumnar grains inclination, even for oblique angles below 45°, when the stronger and broader asymmetric features of the pattern are not yet fully formed. Furthermore, using magneto-optical microscopy, a marked change in the magnetic domain's nucleation and growth process has been observed in the sample prepared at 75°, with the stronger GISAXS asymmetries. Easy axis magnetization reversal starts by a random and homogeneous nucleation of small (∼μm) elongated domains aligned with the nanocolumn's long axis and proceeds through the preferred propagation of head-to-head domain walls (DWs) along the applied field direction. This peculiar magnetic behavior indicates that the strongly anisotropic nanostructuring created by the oblique growth process is equivalent, from a magnetic point of view, to an array of self-assembled buried nanowires. These results show how GISAXS and magneto-optical microscopy can be combined as a powerful tool for correlating the morphology and magnetism of thin nanostructured systems.

Liquids analysis with optofluidic bragg microcavities

Porous Bragg microcavities formed by stacking a series of porous nanocolumnar layers with alternate low (SiO2) and high (TiO2) refractive index materials have been prepared by physical vapor deposition at glancing angles (GLAD). By strictly controlling the porosity and refractive index of the individual films, as well as the relative orientation of the nanocolumns from one layer to the next, very porous and nondispersive high optical quality microcavities have been manufactured. These photonic structures have been implemented into responsive devices to characterize liquids, mixtures of liquids, or solutions flowing through them. The large displacements observed in the optical spectral features (Bragg reflector gap and resonant peak) of the photonic structures have been quantitatively correlated by optical modeling with the refractive index of the circulating liquids. Experiments carried out with different glucose and NaCl solutions and mixtures of water plus glycerol illustrate the potentialities of these materials to serve as optofluidic devices to determine the concentration of solutions or the proportion of two phases in a liquid mixture.

Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

Growth regimes of gold thin films deposited by magnetron sputtering at oblique angles and low temperatures are studied from both theoretical and experimental points of view. Thin films were deposited in a broad range of experimental conditions by varying the substrate tilt angle and background pressure, and were analyzed by field emission scanning electron microscopy and grazing-incidence small-angle x-ray scattering techniques. Results indicate that the morphological features of the films strongly depend on the experimental conditions, but can be categorized within four generic microstructures, each of them defined by a different bulk geometrical pattern, pore percolation depth and connectivity. With the help of a growth model, a microstructure phase diagram has been constructed where the main features of the films are depicted as a function of experimentally controllable quantities, finding a good agreement with the experimental results in all the studied cases.

Characterization of mesoporous thin films by specular reflectance porosimetry

The pore size distribution of mesoporous thin films is herein investigated through a reliable and versatile technique coined specular reflectance porosimetry. This method is based on the analysis of the gradual shift of the optical response of a porous slab measured in quasi-normal reflection mode that occurs as the vapor pressure of a volatile liquid varies in a closed chamber. The fitting of the spectra collected at each vapor pressure is employed to calculate the volume of solvent contained in the interstitial sites and thus to obtain adsorption-desorption isotherms from which the pore size distribution and internal and external specific surface areas are extracted. This technique requires only a microscope operating in the visible range attached to a spectrophotometre. Its suitability to analyze films deposited onto arbitrary substrates, one of the main limitations of currently employed ellipsometric porosimetry and quartz balance techniques, is demonstrated. Two standard mesoporous materials, supramolecularly templated mesostructured films and packed nanoparticle layers, are employed to prove the concept proposed herein.

Roughness of glancing angle deposited titanium thin films: an experimental and computational study

The characterization of roughness at the nanoscale by the means of atomic force microscopy (AFM) was performed on high aspect ratio glancing angle deposited titanium thin films. With the use of scanning electron microscopy as well as x-ray photoelectron spectroscopy, it was shown that the AFM measurements gave rise to incorrect roughness values for the films consisting of the highest aspect ratio structures. By correcting for this experimental artefact, the difference between the saturated roughness value of a film grown with conventional physical vapour deposition and films grown with a glancing angle of deposition was shown to behave as a power law function of the deposition angle, with a saturated roughness exponent of κ = 7.1 ± 0.2. This power law scaling was confirmed by three-dimensional molecular dynamics simulations of glancing angle deposition, where the saturated roughness exponent was calculated to κ = 6.7 ± 0.4.