Firdous T, Potter DK. Assembling Magnetic Nanoparticles on Nanomechanical Resonators for Torque Magnetometry.
Int J Mol Sci 2020;
21:ijms21030984. [PMID:
32024227 PMCID:
PMC7037736 DOI:
10.3390/ijms21030984]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/19/2019] [Revised: 01/19/2020] [Accepted: 01/22/2020] [Indexed: 01/09/2023] Open
Abstract
We report a highly compliant process for patterning nanoparticle arrays on micro- and nanomechanical devices. The distinctive step involves the single layer self-assembled nanoparticles on top of released nanomechanical devices. We demonstrate the process by fabricating sizable arrays of nanomechanical devices on silicon-on-insulator substrates, acting as nanomechanical torque magnetometers. Later, the nanoparticles were self-assembled in geometrical shapes on top of the devices by a unique combination of top-down and bottom-up methods. The self-assembled array of nanoparticles successfully showed a magnetic torque signal by magnetic actuation of the magnetometer. This patterning process can be generalized for any shape and for a wide range of nanoparticles on the nanomechanical resonators.
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