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Jmerik V, Nechaev D, Semenov A, Evropeitsev E, Shubina T, Toropov A, Yagovkina M, Alekseev P, Borodin B, Orekhova K, Kozlovsky V, Zverev M, Gamov N, Wang T, Wang X, Pristovsek M, Amano H, Ivanov S. 2D-GaN/AlN Multiple Quantum Disks/Quantum Well Heterostructures for High-Power Electron-Beam Pumped UVC Emitters. Nanomaterials (Basel) 2023; 13:1077. [PMID: 36985973 PMCID: PMC10059987 DOI: 10.3390/nano13061077] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/21/2023] [Revised: 03/14/2023] [Accepted: 03/14/2023] [Indexed: 06/18/2023]
Abstract
This article describes GaN/AlN heterostructures for ultraviolet-C (UVC) emitters with multiple (up to 400 periods) two-dimensional (2D)-quantum disk/quantum well structures with the same GaN nominal thicknesses of 1.5 and 16 ML-thick AlN barrier layers, which were grown by plasma-assisted molecular-beam epitaxy in a wide range of gallium and activated nitrogen flux ratios (Ga/N2*) on c-sapphire substrates. An increase in the Ga/N2* ratio from 1.1 to 2.2 made it possible to change the 2D-topography of the structures due to a transition from the mixed spiral and 2D-nucleation growth to a purely spiral growth. As a result, the emission energy (wavelength) could be varied from 5.21 eV (238 nm) to 4.68 eV (265 nm) owing to the correspondingly increased carrier localization energy. Using electron-beam pumping with a maximum pulse current of 2 A at an electron energy of 12.5 keV, a maximum output optical power of 50 W was achieved for the 265 nm structure, while the structure emitting at 238 nm demonstrated a power of 10 W.
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Affiliation(s)
- Valentin Jmerik
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Dmitrii Nechaev
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Alexey Semenov
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | | | - Tatiana Shubina
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Alexey Toropov
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Maria Yagovkina
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Prokhor Alekseev
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Bogdan Borodin
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | - Kseniya Orekhova
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
| | | | - Mikhail Zverev
- Lebedev Physical Institute, Leninsky Avenue 53, Moscow 119991, Russia
| | - Nikita Gamov
- Lebedev Physical Institute, Leninsky Avenue 53, Moscow 119991, Russia
| | - Tao Wang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nanooptoelectronics, School of Physics, Peking University, Beijing 100871, China
| | - Xinqiang Wang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nanooptoelectronics, School of Physics, Peking University, Beijing 100871, China
| | - Markus Pristovsek
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Chikusa-Ku, Furo-Cho, Nagoya 464-8601, Japan
| | - Hiroshi Amano
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Chikusa-Ku, Furo-Cho, Nagoya 464-8601, Japan
| | - Sergey Ivanov
- Ioffe Institute, 26 Politekhnicheskaya, Saint Petersburg 194021, Russia
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Li J, Gao N, Cai D, Lin W, Huang K, Li S, Kang J. Multiple fields manipulation on nitride material structures in ultraviolet light-emitting diodes. Light Sci Appl 2021; 10:129. [PMID: 34150202 PMCID: PMC8206881 DOI: 10.1038/s41377-021-00563-0] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/10/2020] [Revised: 04/25/2021] [Accepted: 05/24/2021] [Indexed: 05/22/2023]
Abstract
As demonstrated during the COVID-19 pandemic, advanced deep ultraviolet (DUV) light sources (200-280 nm), such as AlGaN-based light-emitting diodes (LEDs) show excellence in preventing virus transmission, which further reveals their wide applications from biological, environmental, industrial to medical. However, the relatively low external quantum efficiencies (mostly lower than 10%) strongly restrict their wider or even potential applications, which have been known related to the intrinsic properties of high Al-content AlGaN semiconductor materials and especially their quantum structures. Here, we review recent progress in the development of novel concepts and techniques in AlGaN-based LEDs and summarize the multiple physical fields as a toolkit for effectively controlling and tailoring the crucial properties of nitride quantum structures. In addition, we describe the key challenges for further increasing the efficiency of DUV LEDs and provide an outlook for future developments.
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Affiliation(s)
- Jinchai Li
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
| | - Na Gao
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
| | - Duanjun Cai
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
| | - Wei Lin
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
| | - Kai Huang
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
| | - Shuping Li
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
| | - Junyong Kang
- Engineering Research Center of Micro-nano Optoelectronic Materials and Devices, Ministry of Education, Fujian Key Laboratory of Semiconductor Materials and Applications, CI center for OSED, College of Physical Science and Technology, Xiamen University, 361005 Xiamen, China
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Stanchu HV, Kuchuk AV, Barchuk M, Mazur YI, Kladko VP, Wang ZM, Rafaja D, Salamo GJ. Asymmetrical reciprocal space mapping using X-ray diffraction: a technique for structural characterization of GaN/AlN superlattices. CrystEngComm 2017. [DOI: 10.1039/c7ce00584a] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Kuchuk AV, Kryvyi S, Lytvyn PM, Li S, Kladko VP, Ware ME, Mazur YI, Safryuk NV, Stanchu HV, Belyaev AE, Salamo GJ. The Peculiarities of Strain Relaxation in GaN/AlN Superlattices Grown on Vicinal GaN (0001) Substrate: Comparative XRD and AFM Study. Nanoscale Res Lett 2016; 11:252. [PMID: 27184965 PMCID: PMC4870488 DOI: 10.1186/s11671-016-1478-6] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/29/2015] [Accepted: 05/10/2016] [Indexed: 05/28/2023]
Abstract
Superlattices (SLs) consisting of symmetric layers of GaN and AlN have been investigated. Detailed X-ray diffraction and reflectivity measurements demonstrate that the relaxation of built-up strain in the films generally increases with an increasing number of repetitions; however, an apparent relaxation for subcritical thickness SLs is explained through the accumulation of Nagai tilt at each interface of the SL. Additional atomic force microscopy measurements reveal surface pit densities which appear to correlate with the amount of residual strain in the films along with the appearance of cracks for SLs which have exceeded the critical thickness for plastic relaxation. These results indicate a total SL thickness beyond which growth may be limited for the formation of high-quality coherent crystal structures; however, they may indicate a growth window for the reduction of threading dislocations by controlled relaxation of the epilayers.
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Affiliation(s)
- Andrian V Kuchuk
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine.
- Institute for Nanoscience and Engineering, University of Arkansas, West Dickson 731, Fayetteville, AR, 72701, USA.
| | - Serhii Kryvyi
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine
| | - Petro M Lytvyn
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine
| | - Shibin Li
- Institute for Nanoscience and Engineering, University of Arkansas, West Dickson 731, Fayetteville, AR, 72701, USA
- State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, 610054, Chengdu, China
| | - Vasyl P Kladko
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine
| | - Morgan E Ware
- Institute for Nanoscience and Engineering, University of Arkansas, West Dickson 731, Fayetteville, AR, 72701, USA
| | - Yuriy I Mazur
- Institute for Nanoscience and Engineering, University of Arkansas, West Dickson 731, Fayetteville, AR, 72701, USA
| | - Nadiia V Safryuk
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine
| | - Hryhorii V Stanchu
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine
| | - Alexander E Belyaev
- V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Pr. Nauky 41, 03680, Kiev, Ukraine
| | - Gregory J Salamo
- Institute for Nanoscience and Engineering, University of Arkansas, West Dickson 731, Fayetteville, AR, 72701, USA
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