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Gassenq A, Cleyet-Merle E, Sahib H, Baguenard B, Belarouci A, Orobtchouk R, Lerouge F, Guy S, Pereira A. Rare-earth doped micro-emitters made by lift-off processing in pulsed laser deposited layers on Si substrate. OPTICS EXPRESS 2021; 29:7321-7326. [PMID: 33726235 DOI: 10.1364/oe.416450] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/09/2020] [Accepted: 02/15/2021] [Indexed: 06/12/2023]
Abstract
Rare earth emitters are promising in integrated optics but require complex integration on silicon. In this work, we have fabricated an Y2O3:Eu3+ micro-emitter on SiO2 on Si substrate without etching. Since pulsed laser deposition produces a high quality layer at room temperature, material can be locally deposited on top of substrates by lift-off processing. After annealing, microstructures exhibit good crystallographic quality with controlled dimensions for light confinement and narrow emission. This works allows envisioning rare-earth doped micro-photonic structures directly integrated on silicon without etching, which opens the way to integration of new functional materials on silicon platform.
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Aubret A, Houel J, Pereira A, Baronnier J, Lhuillier E, Dubertret B, Dujardin C, Kulzer F, Pillonnet A. Nondestructive Encapsulation of CdSe/CdS Quantum Dots in an Inorganic Matrix by Pulsed Laser Deposition. ACS APPLIED MATERIALS & INTERFACES 2016; 8:22361-22368. [PMID: 27503143 DOI: 10.1021/acsami.6b07367] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
We report the successful encapsulation of colloidal quantum dots in an inorganic matrix by pulsed laser deposition. Our technique is nondestructive and thus permits the incorporation of CdSe/CdS core/shell colloidal quantum dots in an amorphous yttrium oxide matrix (Y2O3) under full preservation of the advantageous optical properties of the nanocrystals. We find that controlling the kinetic energy of the matrix precursors by means of the oxygen pressure in the deposition chamber facilitates the survival of the encapsulated species, whose well-conserved optical properties such as emission intensity, luminescence spectrum, fluorescence lifetime, and efficiency as single-photon emitters we document in detail. Our method can be extended to different types of nanoemitters (e.g., nanorods, dots-in-rods, nanoplatelets) as well as to other matrices (oxides, semiconductors, metals), opening up new vistas for the realization of fully inorganic multilayered active devices based on colloidal nano-objects.
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Affiliation(s)
- Antoine Aubret
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
| | - Julien Houel
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
| | - Antonio Pereira
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
| | - Justine Baronnier
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
| | - Emmanuel Lhuillier
- LPEM, ESPCI-ParisTech, PSL Research University, CNRS, UPMC Paris VI, Sorbonnes Universités , 10 rue Vauquelin, 75005 Paris, France
| | - Benoit Dubertret
- LPEM, ESPCI-ParisTech, PSL Research University, CNRS, UPMC Paris VI, Sorbonnes Universités , 10 rue Vauquelin, 75005 Paris, France
| | - Christophe Dujardin
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
| | - Florian Kulzer
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
| | - Anne Pillonnet
- Institut Lumière Matière, CNRS UMR5306, Université de Lyon, Université Lyon 1 , 69622 Villeurbanne Cedex, France
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