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Anang FEB, Refino AD, Harm G, Li D, Xu J, Cain M, Brand U, Li Z, Görke M, Garnweitner G, Peiner E. Thermo-Convective Solution Growth of Vertically Aligned Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting. MICROMACHINES 2024; 15:1179. [PMID: 39459053 PMCID: PMC11509914 DOI: 10.3390/mi15101179] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2024] [Revised: 08/26/2024] [Accepted: 09/17/2024] [Indexed: 10/28/2024]
Abstract
The search for a synthesis method to create longer ZnO NWAs with high-quality vertical alignment, and the investigation of their electrical properties, have become increasingly important. In this study, a hydrothermal method for growing vertically aligned arrays of ZnO nanowires (NWs) using localized heating was utilized. To produce longer NWs, the temperature environment of the growth system was optimized with a novel reaction container that provided improved thermal insulation. At a process temperature above ~90 °C, ZnO NWs reached a length of ~26.8 µm within 24 h, corresponding to a growth rate of 1.1 µm/h, nearly double the rate of 0.6 µm/h observed in traditional chemical bath growth using a glass reactor. The densely grown NWs (~1.9/µm2), with a diameter of ~0.65 µm, exhibited a preferred hexagonal c-axis orientation and were vertically aligned to the (100) silicon (Si) substrate. These NW structures have multiple applications, e.g., in piezotronic strain sensors, gas sensing, and piezoelectric energy harvesting. As proof of concept, a piezoelectric nanogenerator (PENG) was fabricated by embedding the NWs in an S1818 polymer matrix over a 15 mm × 15 mm area. Under repeated impulse-type compressive forces of 0.9 N, a maximum peak output voltage of ~95.9 mV was recorded, which is higher by a factor of four to five than the peak output voltage of 21.6 mV previously obtained with NWs measuring ~1.8 µm in length.
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Affiliation(s)
- Frank Eric Boye Anang
- Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany; (A.D.R.); (G.H.); (D.L.); (J.X.); (E.P.)
- Scientific Metrology Department, Ghana Standards Authority (GSA), Accra P.O. Box MB 245, Ghana
| | - Andam Deatama Refino
- Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany; (A.D.R.); (G.H.); (D.L.); (J.X.); (E.P.)
| | - Gunilla Harm
- Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany; (A.D.R.); (G.H.); (D.L.); (J.X.); (E.P.)
| | - Defang Li
- Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany; (A.D.R.); (G.H.); (D.L.); (J.X.); (E.P.)
| | - Jiushuai Xu
- Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany; (A.D.R.); (G.H.); (D.L.); (J.X.); (E.P.)
| | - Markys Cain
- Electrosciences Ltd., Farnham GU9 9QT, Surrey, UK;
| | - Uwe Brand
- Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany; (U.B.); (Z.L.)
| | - Zhi Li
- Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany; (U.B.); (Z.L.)
| | - Marion Görke
- Institute for Particle Technology, Technische Universität Braunschweig, 38104 Braunschweig, Germany; (M.G.); (G.G.)
| | - Georg Garnweitner
- Institute for Particle Technology, Technische Universität Braunschweig, 38104 Braunschweig, Germany; (M.G.); (G.G.)
- Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
| | - Erwin Peiner
- Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany; (A.D.R.); (G.H.); (D.L.); (J.X.); (E.P.)
- Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
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Anang FEB, Wei X, Xu J, Cain M, Li Z, Brand U, Peiner E. Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting. MICROMACHINES 2024; 15:261. [PMID: 38398989 PMCID: PMC10892005 DOI: 10.3390/mi15020261] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/26/2024] [Revised: 02/06/2024] [Accepted: 02/07/2024] [Indexed: 02/25/2024]
Abstract
In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of -6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm3, independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm2 NW array area in the range of 20 to 90 nN.
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Affiliation(s)
- Frank Eric Boye Anang
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
- Scientific Metrology Department, Ghana Standards Authority, Accra P.O. Box MB 245, Ghana
| | - Xuanwei Wei
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
| | - Jiushuai Xu
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
| | - Markys Cain
- Electrosciences Ltd., Farnham, Surrey GU9 9QT, UK;
| | - Zhi Li
- Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany; (Z.L.); (U.B.)
| | - Uwe Brand
- Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany; (Z.L.); (U.B.)
| | - Erwin Peiner
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
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Chhetri TP, Kerr L, Masmali N, Jaeger H, Eid KF. Oxygen sensing with individual ZnO:Sb micro-wires: effects of temperature and light exposure on the sensitivity and stability. ROYAL SOCIETY OPEN SCIENCE 2022; 9:211243. [PMID: 35070344 PMCID: PMC8728165 DOI: 10.1098/rsos.211243] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/28/2021] [Accepted: 11/16/2021] [Indexed: 06/02/2023]
Abstract
Nanostructured ZnO has been widely investigated as a gas sensing material. Antimony is an important dopant for ZnO that catalyses its surface reactivity and thus strengthens its gas sensing capability. However, there are not enough studies on the gas sensing of antimony-doped ZnO single wires. We fabricated and characterized ZnO/ZnO:Sb core-shell micro-wires and demonstrated that individual wires are sensitive to oxygen gas flow. Temperature and light illumination strongly affect the oxygen gas sensitivity and stability of these individual wires. It was found that these micro- and nano-wire oxygen sensors at 200°C give the highest response to oxygen, yet a vanishingly small effect of light and temperature variations. The underlying physics and the interplay between these effects are discussed in terms of surface-adsorbed oxygen, oxygen vacancies and hydrogen doping.
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Affiliation(s)
| | - Lei Kerr
- Department of Chemical, Paper and Biomedical Engineering, Miami University, Oxford, OH 45056, USA
| | - Nada Masmali
- Department of Physics, Miami University, Oxford, OH 45056, USA
| | - Herbert Jaeger
- Department of Physics, Miami University, Oxford, OH 45056, USA
| | - Khalid F. Eid
- Department of Physics, Miami University, Oxford, OH 45056, USA
- Department of Physics, Birzeit University, Birzeit, Palestine
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