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For: He X, Tang Z, Liang S, Liu M, Guan W. Confocal scanning photoluminescence for mapping electron and photon beam-induced microscopic changes in SiN x during nanopore fabrication. Nanotechnology 2020;31:395202. [PMID: 32526718 DOI: 10.1088/1361-6528/ab9bd4] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
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