Acoustic resonance effects and cavitation in SAW aerosol generation

The interaction of surface acoustic waves (SAWs) with liquids enables the production of aerosols with adjustable droplet sizes in the micrometer range expelled from a very compact source. Understanding the nonlinear acousto-hydrodynamics of SAWs with a regulated micro-scale liquid film is essential for acousto-microfluidics platforms, particularly aerosol generators. In this study, we demonstrate the presence of micro-cavitation in a MHz-frequency SAW aerosol generation platform, which is touted as a leap in aerosol technology with versatile application fields including biomolecule inhalation therapy, micro-chromatography and spectroscopy, olfactory displays, and material deposition. Using analysis methods with high temporal and spatial resolution, we demonstrate that SAWs stabilize spatially arranged liquid micro-domes atop the generator's surface. Our experiments show that these liquid domes become acoustic resonators with highly fluctuating pressure amplitudes that can even nucleate cavitation bubbles, as supported by analytical modeling. The observed fragmentation of liquid domes indicates the participation of three droplet generation mechanisms, including cavitation and capillary-wave instabilities. During aerosol generation, the cavitation bubbles contribute to the ejection of droplets from the liquid domes and also explain observed microstructural damage patterns on the chip surface eventually caused by cavitation-based erosion.

Onset of Visible Capillary Waves from High-Frequency Acoustic Excitation

Remarkably, the interface of a fluid droplet will produce visible capillary waves when exposed to acoustic waves. For example, a small (∼1 μL) sessile droplet will oscillate at a low ∼10² Hz frequency when weakly driven by acoustic waves at ∼10⁶ Hz frequency and beyond. We measured such a droplet's interfacial response to 6.6 MHz ultrasound to gain insight into the energy transfer mechanism that spans these vastly different time scales, using high-speed microscopic digital transmission holography, a unique method to capture three-dimensional surface dynamics at nanometer space and microsecond time resolutions. We show that low-frequency capillary waves are driven into existence via a feedback mechanism between the acoustic radiation pressure and the evolving shape of the fluid interface. The acoustic pressure is distributed in the standing wave cavity of the droplet, and as the shape of the fluid interface changes in response to the distributed pressure present on the interface, the standing wave field also changes shape, feeding back to produce changes in the acoustic radiation pressure distribution in the cavity. A physical model explicitly based upon this proposed mechanism is provided, and simulations using it were verified against direct observations of both the microscale droplet interface dynamics from holography and internal pressure distributions using microparticle image velocimetry. The pressure-interface feedback model accurately predicts the vibration amplitude threshold at which capillary waves appear, the subsequent amplitude and frequency of the capillary waves, and the distribution of the standing wave pressure field within the sessile droplet responsible for the capillary waves.

Revisiting the Electroacoustic Phenomenon in the Presence of Surface Acoustic Waves

Recently, one has been observing abundant studies on the application of surface acoustic waves (SAWs) in solid substrates for manipulating liquids and particulates in micron-to-nanometer thick films and channels and in porous media. At these length scales, contributions of SAWs to the electrical double layer (EDL) of ions and of the latter to particulates and flow may become appreciable. However, the nature of the interplay between SAWs and EDLs is unknown. We demonstrate the contribution of a SAW to the near-equilibrium electrical and ion-concentration fields in an EDL near inert and piezoelectric substrates. In particular, we concentrate on the leakage of transient and steady components of electrical potential through the excited EDL. Far from the solid, the leakage may be interpreted by different models of the EDL to give information about the EDL characteristic relaxation time, ζ-potential, and the Stern layer therein. In addition, the analysis given here may explain observed SAW-induced electrochemical effects on piezoelectric substrates.

Powerful Acoustogeometric Streaming from Dynamic Geometric Nonlinearity

Past forms of acoustic streaming, named after their progenitors Eckart (1948), Schlichting (1932), and Rayleigh (1884), serve to describe fluid and particle transport phenomena from the macro to micro-scale. Governed by the fluid viscosity, traditional acoustic streaming arises from second-order nonlinear coupling between the fluid's density and particle velocity, with the first-order acoustic wave time averaging to zero. We describe a form of acoustogeometric streaming that has a nonzero first-order contribution. Experimentally discovered in nanochannels of a height commensurate with the viscous penetration depth of the fluid in the channel, it arises from nonlinear interactions between the surrounding channel deformation and the leading order acoustic pressure field, generating flow pressures three orders of magnitude greater than any known acoustically mediated mechanism. It enables the propulsion of fluids against significant Laplace pressure, sufficient to produce 6  mm/s flow in a 130-150 nm tall nanoslit. We find quantitative agreement between theory and experiment across a variety of fluids and conditions, and identify the maximum flow rate with a channel height 1.59 times the viscous penetration depth.

Coalescence of Droplets in a Microwell Driven by Surface Acoustic Waves

Microwell arrays are amongst the most commonly used platforms for biochemical assays. However, the coalescence of droplets that constitute the dispersed phase of suspensions housed within microwells has not received much attention to date. Herein, we study the coalescence of droplets in a two-phase system in a microwell driven by surface acoustic waves (SAWs). The microwell structure, together with symmetric exposure to SAW irradiation, coupled from beneath the microwell via a piezoelectric substrate, gives rise to the formation of a pair of counter-rotating vortices that enable droplet transport, trapping, and coalescence. We elucidate the physics of the coalescence phenomenon using a scaling analysis of the relevant forces, namely, the acoustic streaming-induced drag force, the capillary and viscous forces associated with the drainage of the thin continuous phase film between the droplets and the van der Waals attraction force. We confirm that droplet-droplet interface contact is established through the formation of a liquid bridge, whose neck radius grows linearly in time in the preceding viscous regime and proportionally with the square root of time in the subsequent inertial regime. Further, we investigate the influence of the input SAW power and droplet size on the film drainage time and demarcate the coalescence and non-coalescence regimes to derive a criterion for the onset of coalescence. The distinct deformation patterns observed for a pair of contacting droplets in both the regimes are elucidated and the possibility for driving concurrent coalescence of multiple droplets is demonstrated. We expect the study will find relevance in the demulsification of immiscible phases and the mixing of samples/reagents within microwells for a variety of biochemical applications.

In situ generation of plasma-activated aerosols via surface acoustic wave nebulization for portable spray-based surface bacterial inactivation

The presence of reactive species in plasma-activated water is known to induce oxidative stresses in bacterial species, which can result in their inactivation. By integrating a microfludic chipscale nebulizer driven by surface acoustic waves (SAWs) with a low-temperature atmospheric plasma source, we demonstrate an efficient technique for in situ production and application of plasma-activated aerosols for surface disinfection. Unlike bulk conventional systems wherein the water is separately batch-treated within a container, we show in this work the first demonstration of continuous plasma-treatment of water as it is transported through a paper strip from a reservoir onto the chipscale SAW device. The significantly larger surface area to volume ratio of the water within the paper strip leads to a significant reduction in the duration of the plasma-treatment, while maintaining the concentration of the reactive species. The subsequent nebulization of the plasma-activated water by the SAW then allows the generation of plasma-activated aerosols, which can be directly sprayed onto the contaminated surface, therefore eliminating the storage of the plasma-activated water and hence circumventing the typical limitation in conventional systems wherein the concentration of the reactive species diminishes over time during storage, resulting in a reduction in the efficacy of bacterial inactivation. In particular, we show up to 96% reduction in Escherichia coli colonies through direct spraying with the plasma-activated aerosols. This novel, low-cost, portable and energy-efficient hybrid system necessitates only minimal maintenance as it only requires the supply of tap water and battery power for operation, and is thus suitable for decontamination in home environments.

On-Chip Generation of Vortical Flows for Microfluidic Centrifugation

Microcentrifugation constitutes an important part of the microfluidic toolkit in a similar way that centrifugation is crucial to many macroscopic procedures, given that micromixing, sample preconcentration, particle separation, component fractionation, and cell agglomeration are essential operations in small scale processes. Yet, the dominance of capillary and viscous effects, which typically tend to retard flow, over inertial and gravitational forces, which are often useful for actuating flows and hence centrifugation, at microscopic scales makes it difficult to generate rotational flows at these dimensions, let alone with sufficient vorticity to support efficient mixing, separation, concentration, or aggregation. Herein, the various technologies-both passive and active-that have been developed to date for vortex generation in microfluidic devices are reviewed. Various advantages or limitations associated with each are outlined, in addition to highlighting the challenges that need to be overcome for their incorporation into integrated microfluidic devices.

High Frequency Sonoprocessing: A New Field of Cavitation-Free Acoustic Materials Synthesis, Processing, and Manipulation

Ultrasound constitutes a powerful means for materials processing. Similarly, a new field has emerged demonstrating the possibility for harnessing sound energy sources at considerably higher frequencies (10 MHz to 1 GHz) compared to conventional ultrasound (⩽3 MHz) for synthesizing and manipulating a variety of bulk, nanoscale, and biological materials. At these frequencies and the typical acoustic intensities employed, cavitation-which underpins most sonochemical or, more broadly, ultrasound-mediated processes-is largely absent, suggesting that altogether fundamentally different mechanisms are at play. Examples include the crystallization of novel morphologies or highly oriented structures; exfoliation of 2D quantum dots and nanosheets; polymer nanoparticle synthesis and encapsulation; and the possibility for manipulating the bandgap of 2D semiconducting materials or the lipid structure that makes up the cell membrane, the latter resulting in the ability to enhance intracellular molecular uptake. These fascinating examples reveal how the highly nonlinear electromechanical coupling associated with such high-frequency surface vibration gives rise to a variety of static and dynamic charge generation and transfer effects, in addition to molecular ordering, polarization, and assembly-remarkably, given the vast dimensional separation between the acoustic wavelength and characteristic molecular length scales, or between the MHz-order excitation frequencies and typical THz-order molecular vibration frequencies.

Micro/nano acoustofluidics: materials, phenomena, design, devices, and applications

Acoustic actuation of fluids at small scales may finally enable a comprehensive lab-on-a-chip revolution in microfluidics, overcoming long-standing difficulties in fluid and particle manipulation on-chip. In this comprehensive review, we examine the fundamentals of piezoelectricity, piezoelectric materials, and transducers; revisit the basics of acoustofluidics; and give the reader a detailed look at recent technological advances and current scientific discussions in the discipline. Recent achievements are placed in the context of classic reports for the actuation of fluid and particles via acoustic waves, both within sessile drops and closed channels. Other aspects of micro/nano acoustofluidics are examined: atomization, translation, mixing, jetting, and particle manipulation in the context of sessile drops and fluid mixing and pumping, particle manipulation, and formation of droplets in the context of closed channels, plus the most recent results at the nanoscale. These achievements will enable applications across the disciplines of chemistry, biology, medicine, energy, manufacturing, and we suspect a number of others yet unimagined. Basic design concepts and illustrative applications are highlighted in each section, with an emphasis on lab-on-a-chip applications.

Acoustomicrofluidic application of quasi-shear surface waves

The paper analyzes the possibility of using predominantly boundary polarized surface acoustic waves for actuating fluidic effects in microchannels fabricated inside containers made of PDMS. The aim is to remove a shortcoming peculiar to conventionally utilized predominantly vertically polarized waves. Such waves strongly attenuate while they propagate under container side walls because of the leakage into them. Due to a specific feature of PDMS - extremely small shear elastic modulus - losses of boundary polarized modes should be far smaller. The amplitude of vertical mechanical displacements can be increased right inside the channel owing to the scattering of acoustic fields. As an example, the predominantly vertically polarized surface wave on 128YX LiNbO₃ is compared with the quasi-shear leaky wave on 64YX LiNbO₃. Our computations predict that, given the electric power supplied to the launching transducer, the quasi-shear wave will drive the fluid more efficiently than the surface wave on 128YX LiNbO₃ when the container wall thickness is larger than 25-30 wavelengths, if there are no additional scatterers inside the channel. In the presence of a scatterer, such as a thin gold strip, the quasi-shear wave can be more efficient when the wall thickness exceeds 10-15 wavelengths.

Enhanced drainage and thinning of liquid films between bubbles and solids that support surface waves

We study the thinning and drainage of the intermediate liquid film between a bubble and a solid surface at close proximity in the presence of a surface acoustic wave (SAW) in the solid. Specifically, we employ the diffraction of light to observe a long air bubble confined in a solid rectangular channel filled with silicone oil. This setup, constituting a two-dimensional physical model of thin film drainage, allows us to analyze the influence of a SAW on the rate of thinning of the micron-thick liquid film separating the bubble and the solid substrate. The viscous penetration of the SAW into the liquid imposes a convective drift of mass, redistributing the fluid in the film against capillary resistance and producing a net drift of liquid out of the film. The rate of drainage of liquid from the film increases by one to several orders of magnitude in comparison to the rate of drainage due to the Laplace pressure of the bubble alone. The experimental findings agree well with a newly developed theory describing the SAW-enhanced drainage as a competition between the capillary flow and SAW-induced streaming.

Acoustially-mediated microfluidic nanofiltration through graphene films

We exploit the possibility of enhancing the molecular transport of liquids through graphene films using amplitude modulated surface acoustic waves (SAWs) to demonstrate effective and efficient nanoparticle filtration. The use of the SAW, which is an extremely efficient means for driving microfluidic transport, overcomes the need for the large mechanical pumps required to circumvent the large pressure drops encountered in conventional membranes for nanoparticle filtration. 100% filtration efficiency was obtained for micron-dimension particulates, decreasing to only 95% for the filtration of particles of tens of nanometers in dimension, which is comparable to that achieved with other methods. To circumvent clogging of the film, which is typical with all membrane filters, a backwash operation to flush the nanoparticles is incorporated simply by reversing the SAW-induced flow such that 98% recovery of the initial filtration rate is recovered. Given these efficiencies, together with the low cost and compact size of the chipscale SAW devices, we envisage the possibility of scaling out the process by operating a large number of devices in parallel to achieve typical industrial-scale throughputs with potential benefits in terms of substantially lower capital, operating and maintenance costs.

Influence of a Propagating Megahertz Surface Acoustic Wave on the Pattern Deposition of Solute Mass off an Evaporating Solution

We study the influence of a megahertz Rayleigh surface acoustic wave (SAW), propagating in a solid substrate, on the pattern deposition of a solute mass off an evaporating solution. An experimental procedure, where a film of a solution undergoes a controlled evaporation in a chamber, shows that the SAW alters the state of the pattern deposition. Increasing the power of the SAW supports an increase in the density of the deposited patterns. Beyond threshold conditions, the deposited patterns merge and we observe the deposition of a solid film. A simplified theory suggests that the SAW deforms the geometry of the film, which is predominantly governed by the capillary stress. The deformation of the film taking place alongside with the evaporation of the solution increases the concentration near the pinned three phase contact line at the front of the film, which is closer to the source of the SAW, on the expense of the concentration at the rear. The increased concentration translates to the deposition of solute mass over an increased area near the front of the film, which explains the experimental observation.

Amplitude modulation schemes for enhancing acoustically-driven microcentrifugation and micromixing

The ability to drive microcentrifugation for efficient micromixing and particle concentration and separation on a microfluidic platform is critical for a wide range of lab-on-a-chip applications. In this work, we investigate the use of amplitude modulation to enhance the efficiency of the microcentrifugal recirculation flows in surface acoustic wave microfluidic systems, thus concomitantly reducing the power consumption in these devices for a given performance requirement-a crucial step in the development of miniaturized, integrated circuits for true portable functionality. In particular, we show that it is possible to obtain an increase of up to 60% in the acoustic streaming velocity in a microdroplet with kHz order modulation frequencies due to the intensification in Eckart streaming; the streaming velocity is increasing as the modulation index is increased. Additionally, we show that it is possible to exploit this streaming enhancement to effect improvements in the speed of particle concentration by up to 70% and the efficiency of micromixing by 50%, together with a modest decrease in the droplet temperature.

Computation of the pressure field generated by surface acoustic waves in microchannels

The high-frequency pressure induced by a surface acoustic wave in the fluid filling a microchannel is computed by solving the full scattering problem. The microchannel is fabricated inside a container attached to the top of a piezoelectric substrate where the surface wave propagates. The finite element method is used. The pressure found in this way is compared with the pressure obtained by solving boundary-value problems formulated on the basis of simplifications which have been introduced in earlier papers by other research studies. The considered example shows that the difference between the results can be significant, ranging from several tens of percent up to several times in different points inside the channel.

Model of heap formation in vibrated gravitational suspensions

In vertically vibrated dense suspensions, several localized structures have been discovered, such as heaps, stable holes, expanding holes, and replicating holes. Because an inclined free fluid surface is difficult to maintain because of gravitational pressure, the mechanism of those structures is not understood intuitively. In this paper, as a candidate for the driving mechanism, we focus on the boundary condition on a solid wall: the slip-nonslip switching boundary condition in synchronization with vertical vibration. By applying the lubrication approximation, we derived the time evolution equation of the fluid thickness from the Oldroyd-B fluid model. In our model we show that the initially flat fluid layer becomes unstable in a subcritical manner, and heaps and convectional flow appear. The obtained results are consistent with those observed experimentally. We also find that heaps climb a slope when the bottom is slightly inclined. We show that viscoelasticity enhances heap formation and climbing of a heap on the slope.

Recent advances in microfluidic actuation and micro-object manipulation via surface acoustic waves

The realization of microscale total analysis systems and lab-on-a-chip technologies requires efficient actuation (mixing, pumping, atomizing, nebulizing, driving, etc.) of fluids on the microscopic scale and dexterous manipulation (separation, sorting, trapping, concentration, merging, patterning, aligning, focusing, etc.) of micro-objects (cells, droplets, particles, nanotubes, etc.) in open (sessile droplets) as well as confined spaces (microchannels/chambers). These capabilities have been recently achieved using powerful acoustofluidic techniques based on high-frequency (10-1000 MHz) surface acoustic waves (SAWs). SAW-based miniaturized microfluidic devices are best known for their non-invasive properties, low costs, and ability to manipulate micro-objects in a label-free manner. The energy-efficient SAWs are also compatible with conventional microfabrication technologies. The present work critically analyses recent reports describing the use of SAWs in microfluidic actuation and micro-object manipulation. Acoustofluidic techniques may be categorized according to the use of travelling SAWs (TSAWs) or standing SAWs (SSAWs). TSAWs are used to actuate fluids and manipulate micro-objects via acoustic streaming flow (ASF) as well as acoustic radiation force (ARF). SSAWs are mainly used for micro-object manipulation and are rarely employed for microfluidic actuation. We have reviewed reports of new technological developments that have not been covered in other recent reviews. In the end, we describe the future prospects of SAW-based acoustofluidic technologies.

Dynamics of liquid films exposed to high-frequency surface vibration

We derive a generalized equation that governs the spreading of liquid films under high-frequency (MHz-order) substrate vibration in the form of propagating surface waves and show that this single relationship is universally sufficient to collectively describe the rich and diverse dynamic phenomena recently observed for the transport of oil films under such substrate excitation, in particular, Rayleigh surface acoustic waves. In contrast to low-frequency (Hz- to kHz-order) vibration-induced wetting phenomena, film spreading at such high frequencies arises from convective drift generated by the viscous periodic flow localized in a region characterized by the viscous penetration depth β(-1)≡(2μ/ρω)(1/2) adjacent to the substrate that is invoked directly by its vibration; μ and ρ are the viscosity and the density of the liquid, respectively, and ω is the excitation frequency. This convective drift is responsible for driving the spreading of thin films of thickness h≪k(l)(-1), which spread self-similarly as t(1/4) along the direction of the drift corresponding to the propagation direction of the surface wave, k(l) being the wave number of the compressional acoustic wave that forms in the liquid due to leakage of the surface wave energy from the substrate into the liquid and t the time. Films of greater thicknesses h∼k(l)(-1)≫β(-1), in contrast, are observed to spread with constant velocity but in a direction that opposes the drift and surface wave propagation due to the attenuation of the acoustic wave in the liquid. The universal equation derived allows for the collective prediction of the spreading of these thin and thick films in opposing directions.

Submicron separation of microspheres via travelling surface acoustic waves

Submicron separation is the segregation of particles having a diameter difference of less than one micrometre. We present an acoustofluidic particle separator with submicron separation resolution to study the continuous, label-free, and contactless separation of polystyrene (PS) particles based on their acoustofluidic parameters such as size, density, compressibility and shape. In this work, the submicron separation of PS microspheres, having a marginal size difference, is achieved inside a polydimethylsiloxane (PDMS) microfluidic channel via travelling surface acoustic waves (TSAWs). The TSAWs of different frequencies (200, 192, 155, and 129 MHz), propagating normal to the fluid flow direction inside the PDMS microchannel, realized continuous separation of particles with a diameter difference as low as 200 nm. A theoretical framework based on the rigid and elastic theories is presented to support the experimental results.