Cleanroom strategies for micro- and nano-fabricating flexible implantable neural electronics

Fabrication of a photo-crosslinkable fluoropolymer-passivated flexible neural probe and acute recording and stimulation performances in vivo

Herein, we fabricated fluorine-containing, polymer-based, flexible neural probes with fluorinated ethylene propylene (FEP) films as the substrates and photo-crosslinkable fluoropolymers as the passivation material. For fabrication, metal-free Au layer formation on the FEP film, the simultaneous photo-adhesion and photo-patterning technique, and the pulsed-laser scanning probe shaping technique were combined, followed by Au electrode surface modification. The resultant probes achieved a charge injection limit equal to 5.18 mC cm-2 by implementing iridium oxide-modified nanoporous Au (IrOx/NPG) structures. We performed simultaneous in vivo micro-stimulations of the Schaffer collateral fibres and recorded the evoked field excitatory postsynaptic potentials (fEPSPs) in the stratum radiatum layer of the hippocampal Cornu Ammonis 1 region using a single probe. Inducing the fEPSP at very low charge per pulse settings (3.2-3.6 nC/pulse) indicates the efficient charge injection capability of the IrOx/NPG electrode, thereby enabling safe, prolonged, and thrifty micro-stimulations. Furthermore, the single probe-induced and recorded long-term potentiation persisted for periods longer than 60 min following theta-burst stimulation. The materials used in this study are all biocompatible and chemically robust. The fabricated neural probes can be applied in chronic clinical trials in vivo.

A fully-flexible and thermally adjustable implantable neural probe with a U-turn polyester microchannel

This work presents a fully flexible implantable neural probe fabricated with Polydimethylsiloxane (PDMS) and including a thermally-tunable stiffness microchannel filled with Polyester. The probe includes an optimized microfluidics mixer for drug delivery. Polyester, which is solid at room temperature and has a low melting point close to body temperature, is used to decrease the stiffness of the probe after insertion, after getting in contact with tissues. We designed a U-turn microchannel inside the PDMS neural probe and filled it up with melted polyester. The microchannel has a cross-section of 30 μm × 5 μm and a length of 14.7 mm. The following probe dimensions were chosen after extensive simulation: thickness = 20 μm, width = 300 μm, and length = 7 mm. These values yield a buckling force above 1 mN, which is sufficient for proper insertion into the brain tissues. Simulation results show that the microfluidics mixer with a cross-section of 90 μm × 5 μm and a length of 7 mm has optimum performance for the desired flow rate and quantity of drug to deliver. The pressure drop inside the microfluidic channel is less than 0.43 kPa, which is appropriate for PDMS-PDMS bonding, whereas the Reynolds number is near 1.91k in the laminar regime. No leakage or bubble occurred during the experimental validation, which suggests an appropriate pressure and a laminar flow in the channel.