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Tsuda Y, Yoshigoe A, Ogawa S, Sakamoto T, Yamamoto Y, Yamamoto Y, Takakuwa Y. Roles of excess minority carrier recombination and chemisorbed O 2 species at SiO 2/Si interfaces in Si dry oxidation: Comparison between p-Si(001) and n-Si(001) surfaces. J Chem Phys 2022; 157:234705. [PMID: 36550047 DOI: 10.1063/5.0109558] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/23/2022] Open
Abstract
This study provides experimental evidence for the following: (1) Excess minority carrier recombination at SiO2/Si interfaces is associated with O2 dissociative adsorption; (2) the x-ray induced enhancement of SiO2 growth is not caused by the band flattening resulting from the surface photovoltaic effect but by the electron-hole pair creation resulting from core level photoexcitation for the spillover of bulk Si electronic states toward the SiO2 layer; and (3) a metastable chemisorbed O2 species plays a decisive role in combining two types of the single- and double-step oxidation reaction loops. Based on experimental results, the unified Si oxidation reaction model mediated by point defect generation [S. Ogawa et al., Jpn. J. Appl. Phys., Part 1 59, SM0801 (2020)] is extended from the viewpoints of (a) the excess minority carrier recombination at the oxidation-induced vacancy site and (b) the trapping-mediated adsorption through the chemisorbed O2 species at the SiO2/Si interface.
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Affiliation(s)
- Yasutaka Tsuda
- Materials Sciences Research Center, Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo 679-5148, Japan
| | - Akitaka Yoshigoe
- Materials Sciences Research Center, Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo 679-5148, Japan
| | - Shuichi Ogawa
- International Center for Synchrotron Radiation Innovation Smart, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
| | - Tetsuya Sakamoto
- Materials Sciences Research Center, Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo 679-5148, Japan
| | - Yoshiki Yamamoto
- Electrical and Electronics Engineering, Fukui College, National Institute of Technology, Geshi-cho, Sabae 916-8507, Japan
| | - Yukio Yamamoto
- Electrical and Electronics Engineering, Fukui College, National Institute of Technology, Geshi-cho, Sabae 916-8507, Japan
| | - Yuji Takakuwa
- Materials Sciences Research Center, Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo 679-5148, Japan
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Chen W, Xie XN, Xu H, Wee ATS, Loh KP. Atomic Scale Oxidation of Silicon Nanoclusters on Silicon Carbide Surfaces. J Phys Chem B 2003. [DOI: 10.1021/jp035029e] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- W. Chen
- Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore, and Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore
| | - X. N. Xie
- Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore, and Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore
| | - H. Xu
- Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore, and Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore
| | - A. T. S. Wee
- Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore, and Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore
| | - Kian Ping Loh
- Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore, and Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore
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Creation of nanostructures to study the topographical dependency of protein adsorption. Colloids Surf B Biointerfaces 2002. [DOI: 10.1016/s0927-7765(02)00015-2] [Citation(s) in RCA: 78] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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Watanabe K, Kato H, Matsumoto Y. Effective Conversion of CO 2 to Carbonate in Surface Oxidation Processes at Si(100). J Phys Chem B 1998. [DOI: 10.1021/jp982639j] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Kazuya Watanabe
- Institute for Molecular Science, Myodaiji, Okazaki 444-8585, Japan, and Department of Photoscience, School of Advanced Sciences, The Graduate University for Advanced Studies, Hayama, Kanagawa 240-0193, Japan
| | - Hiroyuki Kato
- Institute for Molecular Science, Myodaiji, Okazaki 444-8585, Japan, and Department of Photoscience, School of Advanced Sciences, The Graduate University for Advanced Studies, Hayama, Kanagawa 240-0193, Japan
| | - Yoshiyasu Matsumoto
- Institute for Molecular Science, Myodaiji, Okazaki 444-8585, Japan, and Department of Photoscience, School of Advanced Sciences, The Graduate University for Advanced Studies, Hayama, Kanagawa 240-0193, Japan
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Bloch J, Mihaychuk JG. Electron Photoinjection from Silicon to Ultrathin SiO2 Films via Ambient Oxygen. PHYSICAL REVIEW LETTERS 1996; 77:920-923. [PMID: 10062940 DOI: 10.1103/physrevlett.77.920] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Yan C, Jensen JA, Kummel AC. Scanning tunneling microscopy of the effect of incident energy upon chemisorption sites for O2/Si(111)‐7×7. J Chem Phys 1996. [DOI: 10.1063/1.471887] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Zotov AV, Kulakov MA, Bullemer B, Eisele I. Scanning tunneling microscopy study of Si growth on a Si(111) sqrt(3) x sqrt(3) -B surface. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 53:12902-12906. [PMID: 9982963 DOI: 10.1103/physrevb.53.12902] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Shi H, Cloutier P, Gamache J, Sanche L. Dynamics of low-energy-electron stimulated desorption of metastable particles from N2 condensed on Xe and Kr films. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 53:13830-13838. [PMID: 9983138 DOI: 10.1103/physrevb.53.13830] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Dujardin G, Mayne A, Comtet G, Hellner L, Jamet M, Millet P. New model of the initial stages of Si(111)-(7 x 7) oxidation. PHYSICAL REVIEW LETTERS 1996; 76:3782-3785. [PMID: 10061108 DOI: 10.1103/physrevlett.76.3782] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Martel R, Avouris P, Lyo IW. Molecularly Adsorbed Oxygen Species on Si(111)-(7 7): STM-Induced Dissociative Attachment Studies. Science 1996. [DOI: 10.1126/science.272.5260.385] [Citation(s) in RCA: 137] [Impact Index Per Article: 4.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/02/2022]
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Taguchi Y, Daté M, Takagi N, Aruga T, Nishijima M. Adsorbed states of NH3 and C6H6 on the Si(111)( sqrt 3 x sqrt 3 )R30 degrees-B surface: Thermal-desorption and electron-energy-loss-spectroscopy studies. PHYSICAL REVIEW. B, CONDENSED MATTER 1994; 50:17440-17449. [PMID: 9976148 DOI: 10.1103/physrevb.50.17440] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Hoshino T, Tsuda M, Oikawa S, Ohdomari I. Mechanisms of the adsorption of oxygen molecules and the subsequent oxidation of the reconstructed dimers on Si(001) surfaces. PHYSICAL REVIEW. B, CONDENSED MATTER 1994; 50:14999-15008. [PMID: 9975848 DOI: 10.1103/physrevb.50.14999] [Citation(s) in RCA: 25] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Dujardin G, Comtet G, Hellner L, Hirayama T, Rose M, Philippe L, Besnard-Ramage MJ. Site specific and state selective photofragmentation of molecular oxygen on Si(111)-(7 x 7). PHYSICAL REVIEW LETTERS 1994; 73:1727-1730. [PMID: 10056868 DOI: 10.1103/physrevlett.73.1727] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Rowntree P, Sambe H, Parenteau L, Sanche L. Formation of anionic excitations in the rare-gas solids and their coupling to dissociative states of adsorbed molecules. PHYSICAL REVIEW. B, CONDENSED MATTER 1993; 47:4537-4554. [PMID: 10006602 DOI: 10.1103/physrevb.47.4537] [Citation(s) in RCA: 63] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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