Jiang K, Sun X, Ben J, Shi Z, Jia Y, Wu Y, Kai C, Wang Y, Li D. Suppressing the compositional non-uniformity of AlGaN grown on a HVPE-AlN template with large macro-steps.
CrystEngComm 2019. [DOI:
10.1039/c9ce00608g]
[Citation(s) in RCA: 10] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
The compositional non-uniformity in AlGaN grown on HVPE-AlN with large macro-steps was effectively suppressed by metallization pretreatment using mixed metal–organic flows.
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