Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors.
PHYSICAL REVIEW. E, STATISTICAL, NONLINEAR, AND SOFT MATTER PHYSICS 2004;
69:026406. [PMID:
14995565 DOI:
10.1103/physreve.69.026406]
[Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/08/2003] [Revised: 12/05/2003] [Indexed: 05/24/2023]
Abstract
Ion-energy-distribution functions (IEDFs) are numerically investigated in capacitively coupled (cc) radio frequency (rf) Ar/CF(4)/N(2) discharges by a one-dimensional particle-in-cell/Monte Carlo model. The simulation considers electron-neutral collisions, various kinds of collisions of ions (Ar+, CF+3, N+2, F-, and CF-3) with neutral, positive-negative ion, and electron-ion recombination. The influence of pressure, applied voltage amplitude, and applied frequency on the Ar+, CF+3, and N+2 IEDFs is presented. The dependence on the frequency regime is investigated by simulations of the Ar/CF(4)/N(2) mixture in single (13.56 MHz) and dual frequency (2+27 MHz or 1+27 MHz) cc reactors. A comparison of the simulation results with analytical calculations in a collisionless rf sheath is discussed. The results show that the IEDFs shift toward the low energies with increasing pressure or decreasing applied voltage amplitude. The Ar+ and N+2 IEDFs exhibit secondary maxima due to the charge transfer collisions. The CF+3 IEDF has a peak at high energies in consistency with the average sheath potential drop. The IEDFs in the dual frequency regime are broad and bimodal.
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