Spontaneous oscillations and waves during chemical vapor deposition of InN

Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. The high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO₃ oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.