Retrieving the Size of Deep-Subwavelength Objects via Tunable Optical Spin-Orbit Coupling

Transversal optical singularity induced precision measurement of step-nanostructures

Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre-Gaussian modes are characterized by a phase factor eilθ, and contain a phase singularity in the middle of its beam. In the case of a transversal optical singularity (TOS), it occurs perpendicular to the propagation, and its phase integral is 2π in nature. Since it emerges within a nano-size range, one expects that TOSs could be sensitive in the light-matter interaction process and could provide a great possibility for accurate determination of certain parameters of nanostructure. Here, we propose to use TOSs generated by a three-wave interference to illuminate a step nanostructure. After interaction with the nanostructure, the TOS is scattered into the far field. The scattering direction can have a relation with the physical parameters of the nanostructure. We show that by monitoring the spatial coordinates of the scattered TOS, its propagation direction can be determined, and as consequence, certain physical parameters of the step nanostructure can be retrieved with high precision.

Retrieving the subwavelength cross-section of dielectric nanowires with asymmetric excitation of Bloch surface waves

Optical microscopy with a diffraction limit cannot distinguish nanowires with sectional dimensions close to or smaller than the optical resolution. Here, we propose a scheme to retrieve the subwavelength cross-section of nanowires based on the asymmetric excitation of Bloch surface waves (BSWs). Leakage radiation microscopy is used to observe the propagation of BSWs at the surface and to collect far-field scattering patterns in the substrate. A model of linear dipoles induced by tilted incident light is built to explain the directional imbalance of BSWs. It shows the potential capability in precisely resolving the subwavelength cross-section of nanowires from far-field scattering without the need for complex algorithms. Through comparing the nanowire widths measured by this method and those measured by scanning electron microscopy (SEM), the transverse resolutions of the widths of two series of nanowires with heights 55 nm and 80 nm are about 4.38 nm and 6.83 nm. All results in this work demonstrate that the new non-resonant far-field optical technology has potential application in metrology measurements with high precision by taking care of the inverse process of light-matter interaction.