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Ross FM, Gibson JM. High Energy Transmission Electron Diffraction From Surface Monolayers During Silicon Oxidation. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-208-55] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
Abstract
ABSTRACTWe have examined the behaviour of the clean Si (111) 7x7 reconstructed surface during exposure to oxygen over a range of temperature and pressure in a UHV transmission electron microscope (TEM). We present preliminary results of our study, discussing both the etching of the silicon surface by oxygen at elevated temperatures and lower oxygen pressures, and its roughening and oxidation at higher oxygen pressures. We achieve great sensitivity to the structure of the surface monolayers by analysing the diffraction of high energy electrons by these surface layers and can resolve the movement of individual monatomic surface steps. Our most dramatic result to date is a demonstation that surface steps do not move during the growth of native oxide.
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Ogino T, Hibino H, Homma Y, Kobayashi Y, Prabhakaran K, Sumitomo K, Omi H. Fabrication and Integration of Nanostructures on Si Surfaces. Acc Chem Res 1999. [DOI: 10.1021/ar970235o] [Citation(s) in RCA: 44] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Toshio Ogino
- NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
| | - Hiroki Hibino
- NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
| | - Yoshikazu Homma
- NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
| | | | | | - Koji Sumitomo
- NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
| | - Hiroo Omi
- NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
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Aburano RD, Hong H, Roesler JM, Chung K, Lin D, Zschack P, Chen H, Chiang T. Boundary-structure determination of Ag/Si(111) interfaces by x-ray diffraction. PHYSICAL REVIEW. B, CONDENSED MATTER 1995; 52:1839-1847. [PMID: 9981251 DOI: 10.1103/physrevb.52.1839] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Lucas CA, Loretto D, Wong GC. Epitaxial growth mechanisms and structure of CaF2/Si(111). PHYSICAL REVIEW. B, CONDENSED MATTER 1994; 50:14340-14353. [PMID: 9975656 DOI: 10.1103/physrevb.50.14340] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Hibino H, Ogino T. Trace of interface reconstruction in Ge solid-phase epitaxy on Si(111). PHYSICAL REVIEW. B, CONDENSED MATTER 1994; 49:5765-5768. [PMID: 10011548 DOI: 10.1103/physrevb.49.5765] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Hong H, Aburano RD, Lin D, Chen H, Chiang T, Zschack P, Specht ED. X-ray scattering study of Ag/Si(111) buried interface structures. PHYSICAL REVIEW LETTERS 1992; 68:507-510. [PMID: 10045914 DOI: 10.1103/physrevlett.68.507] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Headrick RL, Levi AF, Luftman HS, Kovalchick J, Feldman LC. Electrical conduction in the Si(111):B-( sqrt 3 x sqrt 3 )R30 degrees/a-Si interface reconstruction. PHYSICAL REVIEW. B, CONDENSED MATTER 1991; 43:14711-14714. [PMID: 9997366 DOI: 10.1103/physrevb.43.14711] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Loretto D, Gibson JM, Yalisove SM. Evidence for a dimer reconstruction at a metal-silicon interface. PHYSICAL REVIEW LETTERS 1989; 63:298-301. [PMID: 10041033 DOI: 10.1103/physrevlett.63.298] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Grodzicki M, Wagner M. Cluster molecular-orbital calculations on germanium adsorbed on Si(111) surfaces. PHYSICAL REVIEW. B, CONDENSED MATTER 1989; 40:1110-1120. [PMID: 9991934 DOI: 10.1103/physrevb.40.1110] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Hirose K, Akimoto K, Hirosawa I, Mizuki J, Mizutani T, Matsui J. Microstructure and Schottky-barrier height of the Yb/GaAs interface. PHYSICAL REVIEW. B, CONDENSED MATTER 1989; 39:8037-8039. [PMID: 9947503 DOI: 10.1103/physrevb.39.8037] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Robinson IK. Symmetry of Si(111)77 at an a-Si interface. PHYSICAL REVIEW. B, CONDENSED MATTER 1987; 35:3910-3913. [PMID: 9941914 DOI: 10.1103/physrevb.35.3910] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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Dev BN, Materlik G, Grey F, Johnson RL, Clausnitzer M. Geometrical structures of the Ge/Si(111) interface and the Si(111)(7 x 7) surface. PHYSICAL REVIEW LETTERS 1986; 57:3058-3061. [PMID: 10033943 DOI: 10.1103/physrevlett.57.3058] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Robinson IK, Waskiewicz WK, Tung RT, Bohr J. Ordering at Si(111)/a-Si and Si(111)/SiO2 interfaces. PHYSICAL REVIEW LETTERS 1986; 57:2714-2717. [PMID: 10033842 DOI: 10.1103/physrevlett.57.2714] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Ourmazd A, Taylor DW, Bevk J, Davidson BA, Feldman LC, Mannaerts JP. Observation of (5 x 5) surface reconstruction on pure silicon and its stability against native-oxide formation. PHYSICAL REVIEW LETTERS 1986; 57:1332-1335. [PMID: 10033418 DOI: 10.1103/physrevlett.57.1332] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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