1
|
Sun L, Shao T, Shi Z, Huang J, Ye X, Jiang X, Wu W, Yang L, Zheng W. Ultraviolet Laser Damage Dependence on Contamination Concentration in Fused Silica Optics during Reactive Ion Etching Process. MATERIALS 2018; 11:ma11040577. [PMID: 29642571 PMCID: PMC5951461 DOI: 10.3390/ma11040577] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/16/2018] [Revised: 04/04/2018] [Accepted: 04/05/2018] [Indexed: 12/04/2022]
Abstract
The reactive ion etching (RIE) process of fused silica is often accompanied by surface contamination, which seriously degrades the ultraviolet laser damage performance of the optics. In this study, we find that the contamination behavior on the fused silica surface is very sensitive to the RIE process which can be significantly optimized by changing the plasma generating conditions such as discharge mode, etchant gas and electrode material. Additionally, an optimized RIE process is proposed to thoroughly remove polishing-introduced contamination and efficiently prevent the introduction of other contamination during the etching process. The research demonstrates the feasibility of improving the damage performance of fused silica optics by using the RIE technique.
Collapse
Affiliation(s)
- Laixi Sun
- Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Ting Shao
- Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Zhaohua Shi
- Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Jin Huang
- Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Xin Ye
- Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Xiaodong Jiang
- Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Weidong Wu
- IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China.
| | - Liming Yang
- Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
| | - Wanguo Zheng
- IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China.
| |
Collapse
|
2
|
Du Y, Wu X, Zhu M, Le Z. Theoretical and experimental research on laser-induced damage of cylindrical subwavelength grating. OPTICS EXPRESS 2015; 23:24296-24307. [PMID: 26406635 DOI: 10.1364/oe.23.024296] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We designed and fabricated two-dimensional cylindrical subwavelength gratings (SWGs) on fused silica for use in 1064 nm laser system. The transmittance and laser-induced damage threshold (LIDT) under the irradiation of 1064 nm pulses were performed, and a lower LIDT compared to blank fused silica was obtained. To understand damage mechanism quantitatively, macro-temperature on the SWGs integrated fused silica and micro-Electric field, micro-thermal-stress distribution on SWGs during the laser irradiation process were investigated by Finite Element Analysis, and the comparison between theoretical and experimental research indicated the presence of absorption centers and the non-uniform thermal mechanical distribution of SWGs contributed to the LIDT reduction on SWGs integrated fused silica.
Collapse
|
3
|
Smith AV, Do BT. Bulk and surface laser damage of silica by picosecond and nanosecond pulses at 1064 nm. APPLIED OPTICS 2008; 47:4812-4832. [PMID: 18784787 DOI: 10.1364/ao.47.004812] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
We measured bulk and surface dielectric breakdown thresholds of pure silica for 14 ps and 8 ns pulses of 1064 nm light. The thresholds are sharp and reproducible. For the 8 ns pulses the bulk threshold irradiance is 4.75 +/- 0.25 kW/microm2. The threshold is approximately three times higher for 14 ps pulses. For 8 ns pulses the input surface damage threshold can be made equal to the bulk threshold by applying an alumina or silica surface polish.
Collapse
Affiliation(s)
- Arlee V Smith
- Department 1128, Sandia National Laboratories, Albuquerque, New Mexico 87185-1423, USA.
| | | |
Collapse
|
4
|
Kudryashov SI, Zvorykin VD. Microscale nanosecond laser-induced optical breakdown in water. PHYSICAL REVIEW. E, STATISTICAL, NONLINEAR, AND SOFT MATTER PHYSICS 2008; 78:036404. [PMID: 18851166 DOI: 10.1103/physreve.78.036404] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/29/2007] [Revised: 07/01/2008] [Indexed: 05/26/2023]
Abstract
Microscale optical breakdown induced in bulk pure water by high-power nanosecond KrF laser pulses was studied using optical transmission and contact broadband photoacoustic techniques. The breakdown has been identified as a sharp transmission drop coinciding with the appearance of unipolar compressive acoustic pulses, both indicating a thresholdlike rise of local intrinsic absorption in the micrometer-scale laser focal volume. The acoustic pulses, which are much broader than the exciting laser pulse and show a strongly reduced far-field diffraction effect, result from breakdown-induced millimeter-sized steam bubbles. The acoustic pulse amplitudes exhibit a sub-linear ( proportional, variantI(3/4)) pressure dependence on the laser intensity I characteristic of subcritical electron-ion plasma and demonstrating the avalanche enhancement of two-photon ionization above the breakdown threshold until the appearance of the critical plasma. In the critical plasma regime, where the transmission and the acoustic signals slowly vary as a function of laser intensity, the main acoustic pulse is preceded by nanosecond and sub- micros prepulses, where the first one represents a GPa-level plasma-driven shock wave and the second one adjacent to the main pulse appears due to weak submillimeter-long heating of water surrounding the hot plasma by its bremsstrahlung radiation, indicating significant dissociation of water molecules in the plasma.
Collapse
Affiliation(s)
- Sergey I Kudryashov
- P.N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow 119991, Russia
| | | |
Collapse
|
5
|
Simultaneous bombardment of wide bandgap materials with UV excimer irradiation and keV electrons. ACTA ACUST UNITED AC 2005. [DOI: 10.1007/bfb0048386] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
|
6
|
Demos SG, Staggs M, De Yoreo JJ, Radousky HB. Imaging of laser-induced reactions of individual defect nanoclusters. OPTICS LETTERS 2001; 26:1975-1977. [PMID: 18059750 DOI: 10.1364/ol.26.001975] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
The response of individual defect nanoclusters located in the bulk of a dielectric material following exposure to 355-nm, 3-ns high-power laser irradiation is investigated by use of microscopic fluorescence imaging. Experiments were carried out on KH(2)PO(4) crystals. We provide direct imaging of the reaction to an external stimulus of individual defect clusters and demonstrate a novel method of studying the dynamic behavior of bulk defects.
Collapse
|
7
|
Demos SG, Staggs M, Yan M, Radousky HB, De Yoreo JJ. Microscopic fluorescence imaging of bulk defect clusters in KH(2)PO(4) crystals. OPTICS LETTERS 1999; 24:268-270. [PMID: 18071476 DOI: 10.1364/ol.24.000268] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
A microscopic fluorescence imaging system is used to detect optically active centers located inside a transparent dielectric crystal. Defect centers in the bulk of KH(2)PO(4) crystals are imaged based on their near-infrared emission following photoexcitation. The spatial resolution of the system is 1mum in the image plane and 25mum in depth. The experimental results indicate the presence of a large number of optically active defect clusters in different KH(2)PO(4) crystals, whereas the concentration of these clusters depends on the crystal sector and growth method.
Collapse
|
8
|
Stuart BC, Feit MD, Herman S, Rubenchik AM, Shore BW, Perry MD. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 53:1749-1761. [PMID: 9983633 DOI: 10.1103/physrevb.53.1749] [Citation(s) in RCA: 1087] [Impact Index Per Article: 38.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
|
9
|
Daguzan P, Martin P, Guizard S, Petite G. Electron relaxation in the conduction band of wide-band-gap oxides. PHYSICAL REVIEW. B, CONDENSED MATTER 1995; 52:17099-17105. [PMID: 9981135 DOI: 10.1103/physrevb.52.17099] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
|
10
|
Stuart BC, Feit MD, Rubenchik AM, Shore BW, Perry MD. Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses. PHYSICAL REVIEW LETTERS 1995; 74:2248-2251. [PMID: 10057880 DOI: 10.1103/physrevlett.74.2248] [Citation(s) in RCA: 89] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/12/2023]
|
11
|
Daguzan P, Guizard S, Krastev K, Martin P, Petite G, Antonetti A. Direct observation of multiple photon absorption by free electrons in a wide band-gap insulator under strong laser irradiation. PHYSICAL REVIEW LETTERS 1994; 73:2352-2355. [PMID: 10057038 DOI: 10.1103/physrevlett.73.2352] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
|
12
|
Ondris-Crawford RJ, Crawford GP, Doane JW, Zumer S, Vilfan M, Vilfan I. Surface molecular anchoring in microconfined liquid crystals near the nematic-smectic-A transition. PHYSICAL REVIEW. E, STATISTICAL PHYSICS, PLASMAS, FLUIDS, AND RELATED INTERDISCIPLINARY TOPICS 1993; 48:1998-2005. [PMID: 9960812 DOI: 10.1103/physreve.48.1998] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
|
13
|
Dickinson JT, Jensen LC, Webb RL, Dawes ML, Langford SC. Mechanisms of Excimer Laser Ablation of Wide Band-Gap Materials: the Role of Defects in Single Crystal MgO. ACTA ACUST UNITED AC 1992. [DOI: 10.1557/proc-285-131] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
Abstract
ABSTRACTLaser ablation has important applications in surface modification, materials analysis, and thin film deposition. We have been examining the details of processes that lead to the emission and formation of particles (atomic/molecular ground state neutrals, excited neutrals, tions, electrons) when wide band gap materials are irradiated with pulsed UV laser light. Etching and deposition of wide bandgap materials is of particular interest due to their excellent insulating and optical properties. Our studies bear directly on achieving control of emission intensities and particle characteristics for use in film deposition and materials analysis. In model wide bandgap materials such as single crystal alkali halides and MgO (nominally transparent materials), exposure to repeated pulses of 248 nm excimer laser radiation of a few J/cm2 results in substantial interaction including extensive biaxial deformation and cleavage. Significant surface heating also occurs, consistent with strong free-carrier/laser interactions. We present strong evidence that achieving intense emission of atomic, molecular, and ionic particles actually depends on point defect production by laser-induced deformation and fracture. Defect production via dislocation motion yields orders of magnitude increases in laser vaporization of these wide bandgap materials, including cluster ion formation. The dependence of the laser-material interaction on dislocation density and mobility, as well as point defect density, suggests several novel strategies for the enhancing the ablative response or preventing laser damage.
Collapse
|
14
|
Kelly PJ, Jones SC, Shen XA, Simpson L, Braunlich PF, Casper RT. Measurement of the three-photon-absorption cross section and intrinsic optical breakdown of KI at 532 nm. PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 42:11370-11372. [PMID: 9995431 DOI: 10.1103/physrevb.42.11370] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
|
15
|
Devine RA, Arndt J. Defect pair creation through ultraviolet radiation in dense, amorphous SiO2. PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 42:2617-2620. [PMID: 9995732 DOI: 10.1103/physrevb.42.2617] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
|