Tsai EHR, Xia Y, Fukuto M, Loo YL, Li R. Grazing-incidence X-ray diffraction tomography for characterizing organic thin films.
J Appl Crystallogr 2021;
54:1327-1339. [PMID:
34667445 PMCID:
PMC8493617 DOI:
10.1107/s1600576721007184]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/24/2021] [Accepted: 07/12/2021] [Indexed: 11/10/2022] Open
Abstract
Characterization of thin films is of paramount importance for evaluating material processing outcomes/efficiency as well as establishing structure-property/performance relationships. This article introduces grazing-incidence diffraction tomography (GID tomography), a technique that combines grazing-incidence X-ray scattering and computed tomography to quantitatively determine the dimension and orientation of crystalline domains in thin films without restrictions on the beam coherence, substrate type or film thickness. This computational method extends the capability of synchrotron beamlines by utilizing standard X-ray scattering experiment setups.
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