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Dresselhaus JL, Zakharova M, Ivanov N, Fleckenstein H, Prasciolu M, Yefanov O, Li C, Zhang W, Middendorf P, Egorov D, De Gennaro Aquino I, Chapman HN, Bajt S. X-ray focusing below 3 nm with aberration-corrected multilayer Laue lenses. OPTICS EXPRESS 2024; 32:16004-16015. [PMID: 38859238 DOI: 10.1364/oe.518964] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/15/2024] [Accepted: 04/02/2024] [Indexed: 06/12/2024]
Abstract
Multilayer Laue lenses are volume diffractive optical elements for hard X-rays with the potential to focus beams to sizes as small as 1 nm. This ability is limited by the precision of the manufacturing process, whereby systematic errors that arise during fabrication contribute to wavefront aberrations even after calibration of the deposition process based on wavefront metrology. Such aberrations can be compensated by using a phase plate. However, current high numerical aperture lenses for nanometer resolution exhibit errors that exceed those that can be corrected by a single phase plate. To address this, we accumulate a large wavefront correction by propagation through a linear array of 3D-printed phase correcting elements. With such a compound refractive corrector, we report on a point spread function with a full-width at half maximum area of 2.9 × 2.8 nm2 at a photon energy of 17.5 keV.
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Soltau J, Osterhoff M, Salditt T. Coherent Diffractive Imaging with Diffractive Optics. PHYSICAL REVIEW LETTERS 2022; 128:223901. [PMID: 35714250 DOI: 10.1103/physrevlett.128.223901] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/10/2021] [Revised: 03/14/2022] [Accepted: 04/15/2022] [Indexed: 06/15/2023]
Abstract
We present a novel approach to x-ray microscopy based on a multilayer zone plate which is positioned behind a sample similar to an objective lens. However, unlike transmission x-ray microscopy, we do not content ourselves with a sharp intensity image; instead, we incorporate the multilayer zone plate transfer function directly in an iterative phase retrieval scheme to exploit the large diffraction angles of the small layers. The presence of multiple diffraction orders, which is conventionally a nuisance, now comes as an advantage for the reconstruction and photon efficiency. In a first experiment, we achieve sub-10-nm resolution and a quantitative phase contrast.
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Affiliation(s)
- Jakob Soltau
- Institut für Röntgenphysik, Georg-August-Universität Göttingen, Friedrich-Hund-Platz 1, Göttingen 37077, Germany
| | - Markus Osterhoff
- Institut für Röntgenphysik, Georg-August-Universität Göttingen, Friedrich-Hund-Platz 1, Göttingen 37077, Germany
- Campus-Institut Data Science, Friedrich-Hund-Platz 1, Göttingen 37077, Germany
| | - Tim Salditt
- Institut für Röntgenphysik, Georg-August-Universität Göttingen, Friedrich-Hund-Platz 1, Göttingen 37077, Germany
- Campus-Institut Data Science, Friedrich-Hund-Platz 1, Göttingen 37077, Germany
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Yamada J, Inoue T, Nakamura N, Kameshima T, Yamauchi K, Matsuyama S, Yabashi M. X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors. SENSORS 2020; 20:s20247356. [PMID: 33371522 PMCID: PMC7767480 DOI: 10.3390/s20247356] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/29/2020] [Revised: 12/11/2020] [Accepted: 12/17/2020] [Indexed: 11/16/2022]
Abstract
X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value.
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Affiliation(s)
- Jumpei Yamada
- RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan; (T.K.); (M.Y.)
- Division of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan; (T.I.); (N.N.); (K.Y.); (S.M.)
- Correspondence:
| | - Takato Inoue
- Division of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan; (T.I.); (N.N.); (K.Y.); (S.M.)
| | - Nami Nakamura
- Division of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan; (T.I.); (N.N.); (K.Y.); (S.M.)
| | - Takashi Kameshima
- RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan; (T.K.); (M.Y.)
- Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan
| | - Kazuto Yamauchi
- Division of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan; (T.I.); (N.N.); (K.Y.); (S.M.)
| | - Satoshi Matsuyama
- Division of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan; (T.I.); (N.N.); (K.Y.); (S.M.)
- Department of Materials Physics, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
| | - Makina Yabashi
- RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan; (T.K.); (M.Y.)
- Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan
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Karge L, Gilles R, Busch S. Calibrating SANS data for instrument geometry and pixel sensitivity effects: access to an extended Q range. J Appl Crystallogr 2017; 50:1382-1394. [PMID: 29021734 PMCID: PMC5627681 DOI: 10.1107/s1600576717011463] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/03/2017] [Accepted: 08/03/2017] [Indexed: 11/10/2022] Open
Abstract
An improved data-reduction procedure is proposed and demonstrated for small-angle neutron scattering (SANS) measurements. Its main feature is the correction of geometry- and wavelength-dependent intensity variations on the detector in a separate step from the different pixel sensitivities: the geometric and wavelength effects can be corrected analytically, while pixel sensitivities have to be calibrated to a reference measurement. The geometric effects are treated for position-sensitive 3He proportional counter tubes, where they are anisotropic owing to the cylindrical geometry of the gas tubes. For the calibration of pixel sensitivities, a procedure is developed that is valid for isotropic and anisotropic signals. The proposed procedure can save a significant amount of beamtime which has hitherto been used for calibration measurements.
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Affiliation(s)
- Lukas Karge
- Heinz Maier-Leibnitz Zentrum (MLZ), Technische Universität München, Lichtenbergstrasse 1, 85747 Garching bei München, Germany
| | - Ralph Gilles
- Heinz Maier-Leibnitz Zentrum (MLZ), Technische Universität München, Lichtenbergstrasse 1, 85747 Garching bei München, Germany
| | - Sebastian Busch
- German Engineering Materials Science Centre (GEMS) at Heinz Maier-Leibnitz Zentrum (MLZ), Helmholtz-Zentrum Geesthacht, Lichtenbergstrasse 1, 85747 Garching bei München, Germany
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Hagemann J, Salditt T. Divide and update: towards single-shot object and probe retrieval for near-field holography. OPTICS EXPRESS 2017; 25:20953-20968. [PMID: 29041506 DOI: 10.1364/oe.25.020953] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/26/2017] [Accepted: 07/28/2017] [Indexed: 06/07/2023]
Abstract
We present a phase reconstruction scheme for X-ray near-field holographic imaging based on a separability constraint for probe and object. In order to achieve this, we have devised an algorithm which requires only two measurements - with and without an object in the beam. This scheme is advantageous if the standard flat-field correction fails and a full ptychographic dataset can not be acquired, since either object or probe are dynamic. The scheme is validated by numerical simulations and by a proof-of-concept experiment using highly focused undulator radiation of the beamline ID16a of the European Synchrotron Radiation Facility (ESRF).
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Hagemann J, Salditt T. Reconstructing mode mixtures in the optical near-field. OPTICS EXPRESS 2017; 25:13973-13989. [PMID: 28788984 DOI: 10.1364/oe.25.013973] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/02/2017] [Accepted: 05/23/2017] [Indexed: 06/07/2023]
Abstract
We propose a reconstruction scheme for hard x-ray inline holography, a variant of propagation imaging, which is compatible with imaging conditions of partial (spatial) coherence. This is a relevant extension of current full-field phase contrast imaging, which requires full coherence. By the ability to reconstruct the coherent modes of the illumination (probe), as demonstrated here, the requirements of coherence filtering could be relaxed in many experimentally relevant settings. The proposed scheme is built on the mixed-state approach introduced in [Nature494, 68 (2013)], combined with multi-plane detection of extended wavefields [Opt. Commun.199, 65 (2001), Opt. Express22, 16571 (2014)]. Notably, the diversity necessary for the reconstruction is generated by acquiring measurements at different defocus positions of the detector. We show that we can recover the coherent mode structure and occupancy numbers of the partial coherent probe. Practically relevant quantities as the transversal coherence length can be computed from the reconstruction in a straightforward way.
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