Characteristics of silicon nitride after O2 plasma surface treatment for pH-ISFET applications

Investigation of the Atomic Layer Deposition of the Titanium Dioxide (TiO2) Film as pH Sensor Using a Switched Capacitor Amplifier

The electrical and chemical properties of the titanium dioxide (TiO2) coated spirals grown by the atomic layer deposition (ALD) technique in two different temperatures of 150 °C and 300 °C are studied. The thickness of the TiO2 layers studied are 20, 40, and 80 nm. A switched capacitor amplifier is used to investigate the pH response and the capacitance of the samples. It is found that the performance of the TiO2 samples depends on either the thickness or the deposition temperature due to the differences in the physical properties of the oxide layer such as surface roughness and film density. The high temperature samples are more crystalline, whereas the low temperature samples are more amorphous. Since there is a low pass filter effect in the electrolyte–sample interface, the TiO2 coated samples show the better response to the pH change for the high temperature samples as the sensor surface area for binding the hydrogen ions is larger and the charge transfer resistance is smaller. Furthermore, more roughness on the surface can be obtained by increasing the thickness, which reduces the charge transfer resistance. In this study, the 80 nm sample deposited at 300 °C gives the best pH response of 40 mV/pH.

100th Anniversary of Macromolecular Science Viewpoint: Polymeric Materials by In Situ Liquid-Phase Transmission Electron Microscopy

A century ago, Hermann Staudinger proposed the macromolecular theory of polymers, and now, as we enter the second century of polymer science, we face a different set of opportunities and challenges for the development of functional soft matter. Indeed, many fundamental questions remain open, relating to physical structures and mechanisms of phase transformations at the molecular and nanoscale. In this Viewpoint, we describe efforts to develop a dynamic, in situ microscopy tool suited to the study of polymeric materials at the nanoscale that allows for direct observation of discrete structures and processes in solution, as a complement to light, neutron, and X-ray scattering methods. Liquid-phase transmission electron microscopy (LPTEM) is a nascent in situ imaging technique for characterizing and examining solvated nanomaterials in real time. Though still under development, LPTEM has been shown to be capable of several modes of imaging: (1) imaging static solvated materials analogous to cryo-TEM, (2) videography of nanomaterials in motion, (3) observing solutions or nanomaterials undergoing physical and chemical transformations, including synthesis, assembly, and phase transitions, and (4) observing electron beam-induced chemical-materials processes. Herein, we describe opportunities and limitations of LPTEM for polymer science. We review the basic experimental platform of LPTEM and describe the origin of electron beam effects that go hand in hand with the imaging process. These electron beam effects cause perturbation and damage to the sample and solvent that can manifest as artefacts in images and videos. We describe sample-specific experimental guidelines and outline approaches to mitigate, characterize, and quantify beam damaging effects. Altogether, we seek to provide an overview of this nascent field in the context of its potential to contribute to the advancement of polymer science.

Capacitance Electrochemical pH Sensor Based on Different Hafnium Dioxide (HfO2) Thicknesses

Over the past years, to achieve better sensing performance, hafnium dioxide (HfO2) has been studied as an ion-sensitive layer. In this work, thin layers of hafnium dioxide (HfO2) were used as pH-sensitive membranes and were deposited by atomic layer deposition (ALD) process onto an electrolytic-insulating-semiconductor structure Al/Si/SiO2/HfO2 for the realization of a pH sensor. The thicknesses of the layer of the HfO2 studied in this work was 15, 19.5 and 39.9 nm. HfO2 thickness was controlled by ALD during the fabrication process. The sensitivity toward H+ was clearly higher when compared to other interfering ions such as potassium K+, lithium Li+, and sodium Na+ ions. Mott−Schottky and electrochemical impedance spectroscopy (EIS) analyses were used to characterise and to investigate the pH sensitivity. This was recorded by Mott–Schottky at 54.5, 51.1 and 49.2 mV/pH and by EIS at 5.86 p[H−1], 10.63 p[H−1], 12.72 p[H−1] for 15, 19.5 and 30 nm thickness of HfO2 ions sensitive layer, respectively. The developed pH sensor was highly sensitive and selective for H+ ions for the three thicknesses, 15, 19.5 and 39.9 nm, of HfO2-sensitive layer when compared to the other previously mentioned interferences. However, the pH sensor performances were better with 15 nm HfO2 thickness for the Mott–Schottky technique, whilst for EIS analyses, the pH sensors were more sensitive at 39.9 nm HfO2 thickness.

Effects of UV-Ozone Treatment on Sensing Behaviours of EGFETs with Al₂O₃ Sensing Film

The effects of UV-ozone (UVO) treatment on the sensing behaviours of extended-gate field-effect transistors (EGFETs) that use Al₂O₃ as the sensing film have been investigated. The Al₂O₃ sensing films are UVO-treated with various duration times and the corresponding EGFET sensing behaviours, such as sensitivity, hysteresis, and long-term stability, are electrically evaluated under various measurement conditions. Physical analysis is also performed to characterize the surface conditions of the UVO-treated sensing films using X-ray photoelectron spectroscopy and atomic force microscopy. It is found that UVO treatment effectively reduces the buried sites in the Al₂O₃ sensing film and subsequently results in reduced hysteresis and improved long-term stability of EGFET. Meanwhile, the observed slightly smoother Al₂O₃ film surface post UVO treatment corresponds to decreased surface sites and slightly reduced pH sensitivity of the Al₂O₃ film. The sensitivity degradation is found to be monotonically correlated with the UVO treatment time. A treatment time of 10 min is found to yield an excellent performance trade-off: clearly improved long-term stability and reduced hysteresis at the cost of negligible sensitivity reduction. These results suggest that UVO treatment is a simple and facile method to improve the overall sensing performance of the EGFETs with an Al₂O₃ sensing film.

An Integrated ISFET Sensor Array

A monolithically integrated ISFET sensor array and interface circuit are described. A new high-density, low-power source-drain follower was developed for the sensor array. ISFETs were formed by depositing Au/Ti extended-gate electrodes on standard MOSFETs, then thin silicon nitride layers using catalytic chemical vapor deposition and/or SU-8 protective layers were formed on the extended-gate electrodes. Applications for the array include: (1) pH detection by statistical distribution observing time and space fluctuations; (2) DNA detection using thiol-modified or silane-coupled oligonucleotides; (3) bio-image sensing by converting photons to electrons using Photosystem I of Thermosynechococcus elongatus, and sensing the converted electric charges by ISFETs.

Enzymatic detection of glucose using fluoride-selective electrodes with polymeric membranes

The feasibility of using polymeric membrane fluoride-selective electrodes based on zirconium(IV) 5,10,15,20-tetraphenylporphyrin as a detector in a flow-injection analysis (FIA) system for glucose determination was examined. The optimization of enzymatic reactions, FIA system configuration and enzyme-immobilization process was performed. It was shown that the resulting flow-injection system exhibits good working parameters, such as reproducibility, linear range of glucose concentration (3 x 10(-3)-10(-1) M), sampling rate (60 samples per minute) and lifetime (over 1 month). The performance of the polymeric membrane electrode was similar to that of a crystalline LaF(3) electrode. The results of glucose determination in synthetic samples with the proposed system show good agreement with real glucose concentrations.