Applicability of LiNbO3, langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies

High-Frequency 0.36BiScO3-0.64PbTiO3 Ultrasonic Transducer for High-Temperature Imaging Application

( 1- x )BiScO₃- x PbTiO₃ (BS-PT) ceramics have excellent piezoelectricity and high Curie temperature at its morphotropic phase boundary (MPB) ( x = 0.64 ), so it is a promising piezoelectric material for fabricating high-temperature ultrasonic transducer (HTUT). Electric properties of 0.36BS-0.64PT ceramics were characterized at different temperatures, and an HTUT with the center frequency of about 15 MHz was designed by PiezoCAD based on the measuring results. The prepared HTUT was tested in a silicone oil bath at different temperatures systematically. The test results show that the HTUT can maintain a stable electrical resonance until 290 °C and get a clear echo response until 250 °C with slight changes of the center frequency. Then, a stepped metal block submerged in silicone oil was imaged by the HTUT until 250 °C. Velocity of silicone oil and axial resolution of the HTUT at different temperatures was calculated. The results verify the capability of 0.36BS-0.64PT-based HTUT for high-temperature ultrasonic imaging applications.

Kyropoulos growth and characterization of monoclinic α-Bi2B8O15 single crystal with a noncentrosymmetric structure

A high-quality crystalline α-Bi2B8O15 crystal is grown by the Kyropoulos method that might have potential for opto-electric applications.

Thin-film chemical expansion of ceria based solid solutions: laser vibrometry study

The chemical expansion of Pr0.1Ce0.9O2–δ (PCO) and CeO2–δ thin films is investigated in the temperature range between 600 °C and 800 °C by laser Doppler vibrometry (LDV). It enables non-contact determination of nanometer scale changes in film thickness at high temperatures. The present study is the first systematic and detailed investigation of chemical expansion of doped and undoped ceria thin films at temperatures above 650 °C. The thin films were deposited on yttria stabilized zirconia substrates (YSZ), operated as an electrochemical oxygen pump, to periodically adjust the oxygen activity in the films, leading to reversible expansion and contraction of the film. This further leads to stresses in the underlying YSZ substrates, accompanied by bending of the overall devices. Film thickness changes and sample bending are found to reach up to 10 and several hundred nanometers, respectively, at excitation frequencies from 0.1 to 10 Hz and applied voltages from 0–0.75 V for PCO and 0–1 V for ceria. At low frequencies, equilibrium conditions are approached. As a consequence maximum thin-film expansion of PCO is expected due to full reduction of the Pr ions. The lower detection limit for displacements is found to be in the subnanometer range. At 800 °C and an excitation frequency of 1 Hz, the LDV shows a remarkable resolution of 0.3 nm which allows, for example, the characterization of materials with small levels of expansion, such as undoped ceria at high oxygen partial pressure. As the correlation between film expansion and sample bending is obtained through this study, a dimensional change of a free body consisting of the same material can be calculated using the high resolution characteristics of this system. A minimum detectable dimensional change of 5 pm is estimated even under challenging high-temperature conditions at 800 °C opening up opportunities to investigate electro-chemo-mechanical phenomena heretofore impossible to investigate. The expansion data are correlated with previous results on the oxygen nonstoichiometry of PCO thin films, and a defect model for bulk ceria solid solutions is adopted to calculate the cation and anion radii changes in the constrained films during chemical expansion. The constrained films exhibit anisotropic volume expansion with displacements perpendicular to the substrate plane nearly double that of bulk samples. The PCO films used here generate high total displacements of several 100 nm’s with high reproducibility. Consequently, PCO films are identified to be a potential core component of high-temperature actuators. They benefit not only from high displacements at temperatures where most piezoelectric materials no longer operate while exhibiting, low voltage operation and low energy consumption.

Langasite as Piezoelectric Substrate for Sensors in Harsh Environments: Investigation of Surface Degradation under High-Temperature Air Atmosphere

Langasite crystals (LGS) are known for their exceptional piezoelectric properties at high temperatures up to 1000 °C and more. In this respect, many studies have been conducted in order to achieve surface acoustic wave (SAW) sensors based on LGS crystals dedicated to high-temperature operations. Operating temperatures of more than 1000 °C and 600 °C for wired and wireless sensors, respectively, have been reached. These outstanding performances have been obtained under an air atmosphere since LGS crystals are not stable in high-temperature conditions under a low-oxygen atmosphere due to their oxide nature. However, if the stability of bulk LGS crystals under a high-temperature air atmosphere is well established, the surface deterioration under such conditions has been hardly investigated, as most of the papers dedicated to LGS-based SAW sensors are essentially focused on the development of thin film electrodes that are able to withstand very elevated temperatures to be combined with LGS crystals. Yet, any surface modification of the substrate can dramatically change the performance of SAW sensors. Consequently, the aim of this paper is to study the stability of the LGS surface under a high-temperature air environment. To do so, LGS substrates have been annealed in an air atmosphere at temperatures between 800 and 1200 °C and for durations between one week and one month. The morphology, microstructure, and chemical composition of the LGS surface was examined before and after annealing treatments by numerous and complementary methods, while the surface acoustic properties have been probed by SAW measurements. These investigations reveal that depending on both the temperature and the annealing duration, many defects with a corolla-like shape appear at the surface of LGS crystals in high-temperature prolonged exposure in an air atmosphere. These defects are related to the formation of a new phase, likely an oxiapatite ternary compound, the chemical formula of which is La₁₄Ga_xSi_9−xO_39−x/2. These defects are located on the surface and penetrate into the depth of the sample by no more than 1–2 microns. However, SAW measurements show that the surface acoustic properties are modified by the high-temperature exposure at a larger deepness of at least several tens of microns. These perturbations of the LGS surface acoustic properties could induce, in the case of LGS-based SAW sensors operating in the 434 MHz ISM band, temperature measurement errors around 10 °C.

Effect of Partial Ba Substitutions on the Crystallization of Sr2TiSi2O8 (STS) Glass-Ceramics and on the Generation of a SAW Signal at High Temperatures

Because of their characteristics, including a d₃₃ of 10–15 pC/N and high stability up to temperatures over 1000 °C, polar glass–ceramics containing fresnoite crystals can be regarded as highly effective materials for applications requiring piezoelectricity at high temperatures. In the present paper we investigate barium substitutions in an Sr-fresnoite (STS) glass–ceramic. Two aspects are studied: first, the effect of the substitution on the preferential orientation of the crystallization, and second, the ability of the glass–ceramics to generate and propagate surface acoustic waves (SAW) at high temperatures. XRD analyses show that a 10 at.% substitution of Ba allows us to keep a strong preferential orientation of the (00l) planes of the fresnoite crystals down to more than 1 mm below the surfaces. Higher substitution levels (25 and 50 at.%), induce a non-oriented volume crystallization mechanism that competes with the surface mechanism. SAW devices were fabricated from glass–ceramic substrates with 0, 10 and 25 at.% Ba substitutions. Temperature testing reveals the high stability of the frequency and delay for all of these devices. The glass–ceramic with a 10 at.% Ba substitution gives the strongest amplitude of the SAW signal. This is attributed to the high (00l) preferential orientation and the absence of disoriented volume crystallization.

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO₃; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a −3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be −95.27 ppm/°C and 57.5 ppb/°C² for resonant mode A, and −95.43 ppm/°C and 55.8 ppb/°C² for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (k_t²) were extracted and are reported. Device Q decreased to 334 and total k_t² increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.

Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Scandium aluminum nitride (Sc_xAl_1−xN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent trade-off they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of Sc_0.09Al_0.91N and Sc_0.18Al_0.82N films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films. X-ray diffraction rocking-curve measurements show a full width at half maximum below 1.5°. Moreover, high-resolution transmission electron microscopy investigations reveal the epitaxial nature of the growth. Electrical characterizations of the Sc_0.09Al_0.91N/sapphire-based SAW devices show three identified modes. Numerical investigations demonstrate that the intermediate compositions between 10 and 20% of scandium allow for the achievement of SAW devices with an electromechanical coupling coefficient up to 2%, provided the film is combined with electrodes constituted by a metal with a high density.

Design and Implementation of 2.45 GHz Passive SAW Temperature Sensors with BPSK Coded RFID Configuration

A surface acoustic wave based passive temperature sensor capable of multiple access is investigated. Binary Phase Shift Keying (BPSK) codes of eight chips were implemented using a reflective delay line scheme on a Y-Z LiNbO₃ piezoelectric substrate. An accurate simulation based on the combined finite- and boundary element method (FEM/BEM) was performed in order to determine the optimum design parameters. The scaling factor ‘s’ and time delay factor ‘τ’ were extracted using signal processing techniques based on the wavelet transform of the correlation function, and then evaluated at various ambient temperatures. The scaling factor ‘s’ gave a more stable and reliable response to temperature than the time delay factor ‘τ’. Preliminary results show that the sensor response is fast and consistent subject to ambient temperature and it exhibits good linearity of 0.9992 with temperature varying from 0 to 130 °C.

AlN/IDT/AlN/Sapphire SAW Heterostructure for High-Temperature Applications

Recent studies have evidenced that Pt/AlN/Sapphire surface acoustic wave (SAW) devices are promising for high-temperature high-frequency applications. However, they cannot be used above 700°C in air atmosphere as the Pt interdigital transducers (IDTs) agglomerate and the AlN layer oxidizes in such conditions. In this paper, we explore the possibility to use an AlN protective overlayer to concurrently hinder these phenomena. To do so, AlN/IDT/AlN/Sapphire heterostructures undergo successive annealing steps from 800°C to 1000°C in air atmosphere. The impact of each step on the morphology, microstructure, and phase composition of AlN and Pt films is evaluated using optical microscopy, scanning and transmission electron microscopy (SEM and TEM), X-ray diffraction (XRD), and secondary ion mass spectroscopy (SIMS). Finally, acoustical performance at room temperature of both protected and unprotected SAW devices are compared, as well as the effects of annealing on these performance. These investigations show that the use of an overlayer is one possible solution to strongly hinder the Pt IDTs agglomeration up to 1000°C. Moreover, AlN/IDT/AlN/Sapphire SAW heterostructures show promising performances in terms of stability up to 800°C. At higher temperatures, the oxidation of AlN is more intense and makes it inappropriate to be used as a protective layer.

High-temperature piezoelectric sensing

Piezoelectric sensing is of increasing interest for high-temperature applications in aerospace, automotive, power plants and material processing due to its low cost, compact sensor size and simple signal conditioning, in comparison with other high-temperature sensing techniques. This paper presented an overview of high-temperature piezoelectric sensing techniques. Firstly, different types of high-temperature piezoelectric single crystals, electrode materials, and their pros and cons are discussed. Secondly, recent work on high-temperature piezoelectric sensors including accelerometer, surface acoustic wave sensor, ultrasound transducer, acoustic emission sensor, gas sensor, and pressure sensor for temperatures up to 1,250 °C were reviewed. Finally, discussions of existing challenges and future work for high-temperature piezoelectric sensing are presented.

Anisotropy of Lamb and SH waves propagation in langasite single crystal plates under the influence of dc electric field

Paper is presented the results of computer simulation. Effect of the homogeneous dc electric field influence on the propagation of zero and first order Lamb and SH waves in piezoelectric langasite single crystal plates for a lot of cuts and directions have been calculated. Crystalline directions and cuts with maximal and minimal influence of dc electric field have indicated. Effect of hybridization of plate modes has been discussed.

Determination and experimental verification of high-temperature SAW orientations on langatate

Langatate (LGT) is a member of the langasite family of crystals appropriate for high-temperature frequency control and sensing applications. This paper identifies multiple LGT SAW orientations for use at high temperature, specifically in the 400°C to 900°C range. Orientations with low sensitivity to temperature are desired for frequency control devices and many sensors, conversely large temperature sensitivity is a benefit for temperature sensors. The LGT SAW temperature behavior has been calculated for orientations sweeping the Euler angles (0°, Θ, ψ), (90°, Θ, ψ), and (ψ, 90°, ψ), based on newly identified high-temperature elastic constants and temperature coefficients for this material. The temperature coefficient of delay (TCD) and total frequency change over the temperature range were analyzed from 400°C to 900°C. Multiple SAW orientations were identified with zero-TCD between 400°C and 500°C. Although no orientations that have turn-over temperatures above 500°C were identified, several have low frequency variation with temperature, of the order of -0.8% over the range 400°C to 800°C. Temperature-sensitive orientations with TCD up to 75 ppm/°C at 900°C were identified, with potential for high-temperature sensor applications. The reported predictions are shown to agree with measured behavior of LGT SAW delay lines fabricated along 6 orientations in the (90°, 23°, ψ) plane. In addition, this work demonstrates that concurrently operated LGT SAW devices fabricated on the same wafer provide means of temperature sensing. In particular, the measured frequency difference between delay lines oriented along (90°, 23°, 0°) and (90°, 23°, 48°) has fractional temperature sensitivity that ranges from -172 ppm/°C at 25°C to -205 ppm/°C at 900°C.

Langasite surface acoustic wave sensors: fabrication and testing

We report on the development of harsh-environment surface acoustic wave sensors for wired and wireless operation. Surface acoustic wave devices with an interdigitated transducer emitter and multiple reflectors were fabricated on langasite substrates. Both wired and wireless temperature sensing was demonstrated using radar-mode (pulse) detection. Temperature resolution of better than ±0.5°C was achieved between 200°C and 600°C. Oxygen sensing was achieved by depositing a layer of ZnO on the propagation path. Although the ZnO layer caused additional attenuation of the surface wave, oxygen sensing was accomplished at temperatures up to 700°C. The results indicate that langasite SAW devices are a potential solution for harsh-environment gas and temperature sensing.