Sputtered SiO2 as low acoustic impedance material for Bragg mirror fabrication in BAW resonators

Modeling the sensitivity dependence of silicon-photonics-based ultrasound detectors

With recent advances in optical technology, interferometric sensing has grown into a highly versatile approach for ultrasound detection, with many interferometric detectors relying on optical waveguides to achieve high levels of sensitivity and miniaturization. In this Letter, we establish a practical model for assessing the sensitivity of silicon-photonics waveguides to acoustic waves. The analysis is performed for different polarizations, waveguide dimensions, and acoustic wave types. Our model was validated experimentally in the acoustic frequency band of 1-13 MHz by measuring the sensitivities of the two polarization modes in a silicon strip waveguide. Both the experimental results and theoretical prediction show that the transverse-magnetic polarization achieves a higher sensitivity and suppression of surface acoustic waves compared to the transverse-electric polarization for the geometries studied.

Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators

Thin film acoustic wave resonator based devices require compensation of temperature coefficient of frequency (TCF) in many applications. This work presents the design and fabrication of temperature compensated solidly mounted resonators (SMRs). The characteristics of each material of the layered structure have an effect on the device TCF but depending on the relative position with respect to the piezoelectric material in the stack. The influence of material properties of the different layers composing the device on the TCF is discussed in detail. TCF behavior simulation is done with Mason's model and, to take into account the deterioration of overall performance due to the finite lateral size and shape of the resonator, we have used 2D and 3D finite element modelling of the resonators. The overall behavior of the device for external loads is predicted. SMRs are designed according to simulations and fabricated with different configurations to obtain TCF as near to zero as possible with an optimized response. Resonators are made by depositing Mo/AlN/Mo piezoelectric stacks on acoustic reflectors. As reflector materials, conductive W and insulating WO_x films have been used as high acoustic impedance materials. SiO₂ films are used as low acoustic impedance material.

Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors

Gravimetric sensors based on solidly mounted resonators require fully insulating acoustic reflectors to avoid parasitics when operating in liquid media. In this work, we propose a new high-acoustic impedance material, tungsten oxide ([Formula: see text]), for acoustic reflectors. We have optimized the sputtering conditions of [Formula: see text] to obtain nonconductive layers with mass density around [Formula: see text] and acoustic velocities for the shear and the longitudinal modes up to 2700 and 4500 m/s, respectively. Compared to other conventionally used high impedance layers, [Formula: see text] films display several manufacture advantages, such as high deposition rates, great reproducibility, and good adhesion to underlying substrates. We have demonstrated the applicability of [Formula: see text] in practical shear mode bulk acoustic wave resonators that display good performance in liquid environments.

Assessment of the shear acoustic velocities in the different materials composing a high frequency solidly mounted resonator

Thin film acoustic resonators operating in the shear mode are being increasingly used for in-liquid sensing applications. A good design of such sensors requires accurate knowledge of the acoustic properties of the materials composing the whole device, which specifically includes their shear velocities. Here we present a method to assess the shear acoustic velocity of high and low acoustic impedance films commonly used in AlN-based solidly mounted resonators (SMRs), using test devices specifically designed to induce a half-wavelength resonance in the layer under study. Provided that the thickness and mass densities of all the layers are known, fitting the electrical response by Mason's model over a wide frequency range gives accurate values of both longitudinal and shear mode velocities. The assessment of porous and dense SiO2, Mo, W and Ta2O5 sputtered films yields shear velocities of 3150m/s, 3950m/s, 3450m/s, 3350m/s and 2900m/s, respectively. In addition, the resonances stimulated in the Ir and Au top electrodes enable deriving their shear modes velocities, with values of 3950m/s and 2350m/s, respectively.

High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed dc powers, and substrate biases. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is assessed by deriving the mass density from X-ray reflectometry measurements and the acoustic velocity from picosecond acoustic spectroscopy and the analysis of the frequency response of the test resonators.