Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

Quantitative imaging performance of frequency-tunable capacitive micromachined ultrasonic transducer array designed for intracardiac application: Phantom study

Commercially available intracardiac echo (ICE) catheters face a trade-off between viewing depth and resolution. Frequency-tunable ICE probes would offer versatility of choice between penetration or resolution imaging within a single device. In this phantom study, the imaging performance of a novel, frequency-tunable, 32-element, 1-D CMUT array integrated with front-end electronics is evaluated. Phased-array ultrasound imaging with a forward-looking CMUT probe prototype operated beyond collapse mode at voltages up to three times higher than the collapse voltage (-65 V) is demonstrated. Imaging performance as a function of bias voltage (-70 V to -160 V), transmit pulse frequency (5-25 MHz), and number of transmit pulse cycles (1-3) is quantified, based on which penetration, resolution, and generic imaging modes are identified. It is shown that by utilizing the concept of frequency tuning, images with different characteristics can be generated trading-off the resolution and penetration depth. The penetration mode provides imaging up to 71 mm in the tissue-mimicking phantom, axial resolution of 0.44 mm, and lateral resolution of 0.12 rad. In the resolution mode, axial resolution of 0.055 mm, lateral resolution of 0.035 rad, and penetration depth of 16 mm are measured. These results show what this CMUT array has the potential versatile characteristics needed for intracardiac imaging, despite its relatively small transducer aperture size of 2 mm × 2 mm imposed by the clinical application.

Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

The information in an ultrasound image depends on the frequency that is used. In a clinical examination it may therefore be beneficial to generate ultrasound images acquired at multiple frequencies, which is difficult to achieve with conventional transducers. Capacitive micromachined ultrasonic transducers (CMUTs) offer a frequency response that is tunable by the bias voltage. In this study we investigate this frequency tunability for ultrasonic imaging. We characterized a CMUT array operated at bias voltages up to three times higher than the collapse-voltage. All elements of the array were connected to a single transmit and receive channel through a bias circuit. We quantified the transmit-receive and transmit sensitivity as a function of frequency for a range of bias voltages. Impulse response measurements show that the center frequency is modifiable between 8.7MHz and 15.3MHz with an applied bias voltage of -50V to -170V. The maximum transmit sensitivity is 52kPa/V at a center frequency of 9.0MHz with an applied bias voltage of -105V. The -3dB transmit range in center frequency accessible with the variable bias voltage is 6.7-15.5MHz. This study shows that a collapse-mode CMUT can operate efficiently at multiple center frequencies when the driving pulse and the bias voltage are optimized. We demonstrate the usefulness of frequency tuning by comparing images at different optimal combinations of driving frequency and bias voltage, acquired by linearly moving the transducer across a tissue mimicking phantom.

Design of a Collapse-Mode CMUT With an Embossed Membrane for Improving Output Pressure

Capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a competitive alternative to piezoelectric ultrasonic transducers, especially in medical ultrasound imaging and therapeutic ultrasound applications, which require high output pressure. However, as compared with piezoelectric ultrasonic transducers, the output pressure capability of CMUTs remains to be improved. In this paper, a novel structure is proposed by forming an embossed vibrating membrane on a CMUT cell operating in the collapse mode to increase the maximum output pressure. By using a beam model in undamped conditions and finite-element analysis simulations, the proposed embossed structure showed improvement on the maximum output pressure of the CMUT cell when the embossed pattern was placed on the estimated location of the peak deflection. As compared with a uniform membrane CMUT cell worked in the collapse mode, the proposed CMUT cell can yield the maximum output pressure by 51.1% and 88.1% enhancement with a single embossed pattern made of Si3N4 and nickel, respectively. The maximum output pressures were improved by 34.9% (a single Si3N4 embossed pattern) and 46.7% (a single nickel embossed pattern) with the uniform membrane when the center frequencies of both original and embossed CMUT designs were similar.