Design of a Collapse-Mode CMUT With an Embossed Membrane for Improving Output Pressure

cMUT technology developments

Capacitive micromachined ultrasonic transducer (cMUT) technology has steadily advanced since its advent in the mid-1990's. Though cMUTs have not supplanted piezoelectric transducers for medical ultrasound imaging to date, researchers and engineers are continuing to improve cMUTs and leverage unique cMUT characteristics toward new applications. While not intended to be an exhaustive review of every aspect of cMUT state-of-the-art, this article provides a brief overview of cMUT benefits, challenges, and opportunities, as well as recent progress in cMUT research and translation.

Broadband Piezoelectric Micromachined Ultrasonic Transducer With a Resonant Cavity

This article presents a broadband piezoelectric micromachined ultrasonic transducer (PMUT) surrounded by a resonant cavity called C-PMUT. The C-PMUT shows two resonance peaks derived from the resonances of the active PMUT cell and the passive resonant cavity. Both of the two resonances vibrate at the first-order resonant mode. An equivalent circuit model is established considering the vibration of the resonant cavity and the crosstalk between the PMUT cell and the resonant cavity. Finite element analysis (FEA) has been used to verify the theoretical model. Bandwidth optimization has been operated and the -6 dB bandwidth is extended to more than 100% in liquid. Furthermore, the theoretical model of the C-PMUT array is established based on the C-PMUT cell. The FEA models of the C-PMUT arrays are proposed, and the -6 dB bandwidth of a 4 ×4 C-PMUT array is increased to 2× compared to the traditional array. Therefore, the C-PMUT provides a novel broadband strategy for future real-time ultrasound imaging.

A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode

This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission sound pressure level (SPL) and the frequency bandwidth of the modified transducer can be remarkably improved by adding a piston diaphragm on the central circular diaphragm. In this work, a lumped model, an acoustic resonance model, and an equivalent circuit model are established to study the multiresonance mechanism. The second resonance peak is contributed by the interference acoustic wave generated between the circular and piston diaphragms. This work demonstrated a simulated far-field average SPL up to 132.2 dB in the single modified piston diaphragm structure and a 28.1%-6-dB frequency bandwidth by theoretical analysis and parameter optimization. The bandwidth is 3.31 times of the traditional pMUT with aluminum nitride (AlN) in air. In addition, the PD-pMUT has a -6-dB frequency bandwidth of up to 66%, which is 1.4 times of traditional pMUT in the liquid-coupled operation. The proposed PD-pMUT provides a new approach for the application of high transmission power and broad bandwidth transducers.

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

Wafer-Bonding Fabricated CMUT Device with Parylene Coating

The advantages of the capacitive micromachined ultrasound transducer (CMUT) technology have provided revolutionary advances in ultrasound imaging. Extensive research on CMUT devices for high-frequency medical imaging applications has been conducted because of strong demands and fabrication realization by using standard silicon IC fabrication technology. However, CMUT devices for low-frequency underwater imaging applications have been rarely researched because it is difficult to fabricate thick membrane structures through depositing processes using standard IC fabrication technology due to stress-related problems. To address this shortcoming, in this paper, a CMUT device with a 2.83-μm thick silicon membrane is proposed and fabricated. The CMUT device is fabricated using silicon fusion wafer-bonding technology. A 5-μm thick Parylene-C is conformally deposited on the device for immersion measurement. The results show that the fabricated CMUT can transmit an ultrasound wave, receive an ultrasound wave, and have pulse-echo measurement capability. The ability of the device to emit and receive ultrasonic waves increases with the bias voltage but does not depend on the voltage polarity. The results demonstrate the viability of the fabricated CMUT in low-frequency applications from the perspectives of the device structure, fabrication, and characterization. This study presents the potential of the CMUT for underwater ultrasound imaging applications.

Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell

Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane working in collapse mode is proposed to further improve the output pressure. To evaluate the performance of an embossed CMUT cell, both the embossed and uniform membrane CMUT cells were fabricated in the same die with a customized six-mask sacrificial release process. An annular nickel pattern with the dimension of 3 μm × 2 μm (width × height) was formed on a full top electrode CMUT to realize an embossed CMUT cell. Experimental characterization was carried out with optical, electrical, and acoustic instruments on the embossed and uniform CMUT cells. The embossed CMUT cell achieved 27.1% improvement of output pressure in comparison to the uniform CMUT cell biased at 170 V voltage. The fractional bandwidths of the embossed and uniform CMUT cells were 52.5% and 41.8%, respectively. It substantiated that the embossed pattern should be placed at the vibrating center of the membrane for achieving a higher output pressure. The experimental characterization indicated that the embossed CMUT cell has better operational performance than the uniform CMUT cell in collapse region.

High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs

Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded springs offer highly efficient output pressure performance over conventional CMUTs, owing to their nonflexural parallel plate movement. The embedded silicon springs support thick Si piston plates, creating a large nonflexural average volume displacement efficiency in the operating frequency range from 1⁻3 MHz. Static and dynamic volume displacements of the nonflexural parallel plates were examined using white light interferometry and laser Doppler vibrometry. In addition, an output pressure measurement in immersion was performed using a hydrophone. The device showed a maximum transmission efficiency of 21 kPa/V, and an average volume displacement efficiency of 1.1 nm/V at 1.85 MHz with a low DC bias voltage of 55 V. The device element outperformed the lead zirconate titanate (PZT) ceramic HD3203, in the maximum transmission efficiency or the average volume displacement efficiency by 1.35 times. Furthermore, its average volume displacement efficiency reached almost 80% of the ideal state-of-the-art single-crystal relaxor ferroelectric materials PMN-0.33PT. Additionally, we confirmed that high-efficiency output pressure could be generated from the CMUT device, by quantitatively comparing the hydrophone measurement of a commercial PZT transducer.