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Paterson GW, Webster RWH, Ross A, Paton KA, Macgregor TA, McGrouther D, MacLaren I, Nord M. Fast Pixelated Detectors in Scanning Transmission Electron Microscopy. Part II: Post-Acquisition Data Processing, Visualization, and Structural Characterization. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2020; 26:944-963. [PMID: 32883393 DOI: 10.1017/s1431927620024307] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Fast pixelated detectors incorporating direct electron detection (DED) technology are increasingly being regarded as universal detectors for scanning transmission electron microscopy (STEM), capable of imaging under multiple modes of operation. However, several issues remain around the post-acquisition processing and visualization of the often very large multidimensional STEM datasets produced by them. We discuss these issues and present open source software libraries to enable efficient processing and visualization of such datasets. Throughout, we provide examples of the analysis methodologies presented, utilizing data from a 256 × 256 pixel Medipix3 hybrid DED detector, with a particular focus on the STEM characterization of the structural properties of materials. These include the techniques of virtual detector imaging; higher-order Laue zone analysis; nanobeam electron diffraction; and scanning precession electron diffraction. In the latter, we demonstrate a nanoscale lattice parameter mapping with a fractional precision ≤6 × 10−4 (0.06%).
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Affiliation(s)
- Gary W Paterson
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Robert W H Webster
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Andrew Ross
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Kirsty A Paton
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Thomas A Macgregor
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Damien McGrouther
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Ian MacLaren
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
| | - Magnus Nord
- SUPA, School of Physics and Astronomy, University of Glasgow, GlasgowG12 8QQ, UK
- EMAT, Department of Physics, University of Antwerp, Antwerp2000, Belgium
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