Reddy PG, Mamidi N, Kumar P, Sharma SK, Ghosh S, Gonsalves KE, Pradeep CP. Design, development, EUVL applications and nano mechanical properties of a new HfO2 based hybrid non-chemically amplified resist.
RSC Adv 2016. [DOI:
10.1039/c6ra10575k]
[Citation(s) in RCA: 21] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
A new HfO2-based hybrid n-CAR resist material has been developed for EUVL applications and its nano-mechanical properties have been reported.
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