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Mattioli F, Cibella S, Gaggero A, Martini F, Leoni R. Waveguide-integrated niobium- nitride detectors for on-chip quantum nanophotonics. NANOTECHNOLOGY 2020;32:104001. [PMID: 33217751 DOI: 10.1088/1361-6528/abcc97] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/03/2020] [Accepted: 11/20/2020] [Indexed: 06/11/2023]
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