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Number Cited by Other Article(s)
1
Hai NTM, Lechner D, Stricker F, Furrer J, Broekmann P. Combined Secondary Ion Mass Spectrometry Depth Profiling and Focused Ion Beam Analysis of Cu Films Electrodeposited under Oscillatory Conditions. ChemElectroChem 2015. [DOI: 10.1002/celc.201402427] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
2
Ahn S, Hong K. Electrodeposition of Cobalt Nanowires. B KOREAN CHEM SOC 2013. [DOI: 10.5012/bkcs.2013.34.3.927] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
3
Matsuoka T, Otsubo K, Onishi Y, Amaya K, Hayase M. Inverse analysis of accelerator distribution in copper through silicon via filling. Electrochim Acta 2012. [DOI: 10.1016/j.electacta.2012.05.136] [Citation(s) in RCA: 40] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
4
Chiu YD, Dow WP, Krug K, Liu YF, Lee YL, Yau SL. Adsorption and desorption of bis-(3-sulfopropyl) disulfide during Cu electrodeposition and stripping at Au electrodes. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2012;28:14476-14487. [PMID: 22978781 DOI: 10.1021/la3025183] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
5
Cho SK, Kim MJ, Koo HC, Kim SK, Kim JJ. An Empirical Relation between the Plating Process and Accelerator Coverage in Cu Superfilling. B KOREAN CHEM SOC 2012. [DOI: 10.5012/bkcs.2012.33.5.1603] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
6
Adsorption behavior of redox-active suppressor additives: Combined electrochemical and STM studies. Electrochim Acta 2011. [DOI: 10.1016/j.electacta.2011.06.008] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
7
Ho HL, Dryfe RA. Metallisation of gel surfaces under ambient conditions. Chem Commun (Camb) 2011;47:11318-20. [DOI: 10.1039/c1cc14472c] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
8
Moffat TP, Josell D. Superconformal Electrodeposition for 3-Dimensional Interconnects. Isr J Chem 2010. [DOI: 10.1002/ijch.201000029] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
9
A Three-Dimensional Cellular Copper Prepared by Multiple-Step Electrodeposition. ACTA ACUST UNITED AC 2008. [DOI: 10.1149/1.2888175] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
10
The influence of self-assembled disulfide additive on the pattern shape by Cu electrodeposition through mask. J Electroanal Chem (Lausanne) 2007. [DOI: 10.1016/j.jelechem.2007.06.004] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
11
Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing. Electrochim Acta 2007. [DOI: 10.1016/j.electacta.2007.03.025] [Citation(s) in RCA: 111] [Impact Index Per Article: 6.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
12
Kim SK, Kang MC, Koo HC, Cho SK, Kim JJ, Yeo JK. Cu Metallization for Giga Level Devices Using Electrodeposition. JOURNAL OF THE KOREAN ELECTROCHEMICAL SOCIETY 2007. [DOI: 10.5229/jkes.2007.10.2.094] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
13
HASEGAWA M, YAMACHIKA N, OKINAKA Y, SHACHAM-DIAMAND Y, OSAKA T. An Electrochemical Investigation of Additive Effect in Trench-Filling of ULSI Interconnects by Electroless Copper Deposition. ELECTROCHEMISTRY 2007. [DOI: 10.5796/electrochemistry.75.349] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]  Open
14
Void-Free Trench-Filling by Electroless Copper Deposition Using the Combination of Accelerating and Inhibiting Additives. ACTA ACUST UNITED AC 2006. [DOI: 10.1149/1.2206008] [Citation(s) in RCA: 43] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
15
Superconformal Cu Electrodeposition on Various Substrates. ACTA ACUST UNITED AC 2005. [DOI: 10.1149/1.1833687] [Citation(s) in RCA: 26] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
16
Microvia Filling over Self-Assembly Disulfide Molecule on Au and Cu Seed Layers. ACTA ACUST UNITED AC 2005. [DOI: 10.1149/1.2039957] [Citation(s) in RCA: 31] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
17
Gold Superfill in Sub-Micrometer Trenches. ACTA ACUST UNITED AC 2005. [DOI: 10.1149/1.1854777] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
18
Bottom-Up Fill of Copper in Deep Submicrometer Holes by Electroless Plating. ACTA ACUST UNITED AC 2004. [DOI: 10.1149/1.1707029] [Citation(s) in RCA: 75] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
19
Superfilling Evolution in Cu Electrodeposition. ACTA ACUST UNITED AC 2004. [DOI: 10.1149/1.1777552] [Citation(s) in RCA: 55] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
20
Baker BC, Witt C, Wheeler D, Josell D, Moffat TP. Superconformal Silver Deposition Using KSeCN Derivatized Substrates. ACTA ACUST UNITED AC 2003. [DOI: 10.1149/1.1561280] [Citation(s) in RCA: 41] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
21
Accelerator Aging Effects During Copper Electrodeposition. ACTA ACUST UNITED AC 2003. [DOI: 10.1149/1.1553936] [Citation(s) in RCA: 57] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
22
Interactions Between Brightener and Chloride Ions on Copper Electroplating for Laser-Drilled Via-Hole Filling. ACTA ACUST UNITED AC 2003. [DOI: 10.1149/1.1595311] [Citation(s) in RCA: 84] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
23
Seedless Superfill: Copper Electrodeposition in Trenches with Ruthenium Barriers. ACTA ACUST UNITED AC 2003. [DOI: 10.1149/1.1605271] [Citation(s) in RCA: 131] [Impact Index Per Article: 6.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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