|
1
|
Li S, Xue Q, Duh JG, Du H, Xu J, Wan Y, Li Q, Lü Y. Driving ferromagnetic resonance frequency of FeCoB/PZN-PT multiferroic heterostructures to Ku-band via two-step climbing: composition gradient sputtering and magnetoelectric coupling. Sci Rep 2014; 4:7393. [PMID: 25491374 PMCID: PMC5377017 DOI: 10.1038/srep07393] [Citation(s) in RCA: 49] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/10/2014] [Accepted: 11/20/2014] [Indexed: 01/30/2023] Open
Abstract
RF/microwave soft magnetic films (SMFs) are key materials for miniaturization and multifunctionalization of monolithic microwave integrated circuits (MMICs) and their components, which demand that the SMFs should have higher self-bias ferromagnetic resonance frequency fFMR, and can be fabricated in an IC compatible process. However, self-biased metallic SMFs working at X-band or higher frequency were rarely reported, even though there are urgent demands. In this paper, we report an IC compatible process with two-step superposition to prepare SMFs, where the FeCoB SMFs were deposited on (011) lead zinc niobate-lead titanate substrates using a composition gradient sputtering method. As a result, a giant magnetic anisotropy field of 1498 Oe, 1-2 orders of magnitude larger than that by conventional magnetic annealing method, and an ultrahigh fFMR of up to 12.96 GHz reaching Ku-band, were obtained at zero magnetic bias field in the as-deposited films. These ultrahigh microwave performances can be attributed to the superposition of two effects: uniaxial stress induced by composition gradient and magnetoelectric coupling. This two-step superposition method paves a way for SMFs to surpass X-band by two-step or multi-step, where a variety of magnetic anisotropy field enhancing methods can be cumulated together to get higher ferromagnetic resonance frequency.
Collapse
Affiliation(s)
- Shandong Li
- College of Physics, and Key Laboratory of Photonics Materials and Technology in Universities of Shandong, Laboratory of Fiber Materials and Modern Textile, the Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, China
| | - Qian Xue
- College of Physics, and Key Laboratory of Photonics Materials and Technology in Universities of Shandong, Laboratory of Fiber Materials and Modern Textile, the Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, China
| | - Jenq-Gong Duh
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
| | - Honglei Du
- College of Physics, and Key Laboratory of Photonics Materials and Technology in Universities of Shandong, Laboratory of Fiber Materials and Modern Textile, the Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, China
| | - Jie Xu
- College of Physics, and Key Laboratory of Photonics Materials and Technology in Universities of Shandong, Laboratory of Fiber Materials and Modern Textile, the Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, China
| | - Yong Wan
- College of Physics, and Key Laboratory of Photonics Materials and Technology in Universities of Shandong, Laboratory of Fiber Materials and Modern Textile, the Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, China
| | - Qiang Li
- College of Physics, and Key Laboratory of Photonics Materials and Technology in Universities of Shandong, Laboratory of Fiber Materials and Modern Textile, the Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, China
| | - Yueguang Lü
- Department of Physics, School of Science, Harbin Institute of Technology, Harbin 150001, China
| |
Collapse
|